Plasma surface treating method and apparatus
First Claim
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1. A plasma surface treating apparatus comprising:
- a rotary electrode capable of supporting a sample to be treated for rotation together therewith;
a counterelectrode confronting said rotary electrode and having an opening defined therein;
a direct current source disposed between said rotary electrode and said counterelectrode for applying a voltage; and
an ion source disposed in face-to-face relationship with said opening in said counterelectrode for forming a pattern on said sample.
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Abstract
In a plasma surface treating method, a sample to be treated is supported on a first electrode within a vacuum vessel and a second electrode is caused to confront the first electrode. Active species of negative ions are then generated by means of a direct current glow discharge produced in an abnormal glow discharge region and are subsequently impinged upon a surface of the sample to induce a chemical reaction with the sample.
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1 Claim
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1. A plasma surface treating apparatus comprising:
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a rotary electrode capable of supporting a sample to be treated for rotation together therewith; a counterelectrode confronting said rotary electrode and having an opening defined therein; a direct current source disposed between said rotary electrode and said counterelectrode for applying a voltage; and an ion source disposed in face-to-face relationship with said opening in said counterelectrode for forming a pattern on said sample.
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Specification
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Current AssigneeMatsushita Electric Industrial Company Limited (Panasonic Holdings Corporation)
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Original AssigneeMatsushita Electric Industrial Company Limited (Panasonic Holdings Corporation)
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InventorsOgawa, Hiroyuki, Nagashima, Michiyoshi, Nambu, Taro, Ueno, Fumiaki, Kishi, Toshinori
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Primary Examiner(s)Powell, William A.
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Application NumberUS07/991,405Time in Patent Office356 DaysField of Search156/345, 156/643, 156/646, 156/655, 156/668, 134/1, 134/31, 134/32, 134/33, 134/119, 204/192.34, 204/192.36, 204/298.35, 204/298.36US Class Current156/345.39CPC Class CodesG03F 7/427 using plasma means onlyH01J 2237/3342 Resist strippingH01J 37/32018 Glow dischargeH01J 37/32027 DC poweredH01J 37/32045 Circuits specially adapted ...
