Abrasion wear resistant coated substrate product

• US 5,268,217 A
• Filed: 08/03/1992
• Issued: 12/07/1993
• Est. Priority Date: 09/27/1990
• Status: Expired due to Term

• Current Assignee: Morgan Advanced Ceramics Inc.
• Original Assignee: Diamonex, Inc. (Morgan Advanced Materials PLC)
• Inventors: Finke, Steven J., Kimock, Fred M., Knapp, Bradley J.
• Primary Examiner(s): Turner, A. A.
• Application Number:
  US07/924,297
• Time in Patent Office: 491 Days
• Field of Search: 428/408, 428/336, 428/426, 428/432, 428/489, 428/472, 428/697, 428/698, 428/701, 428/913, 428/216
• US Class Current: 428/216
• CPC Class Codes: B32B 17/06 comprising glass as the main or only constituent of a layer, next to another layer of a specific material
• CPC Class Codes: C03C 17/06 with metals C03C17/34, C03C17/44 take precedence
• CPC Class Codes: C03C 17/3417 all coatings being oxide coatings
• CPC Class Codes: C03C 17/3435 comprising a nitride, oxynitride, boronitride or carbonitride
• CPC Class Codes: C03C 17/3441 comprising carbon, a carbide or oxycarbide
• CPC Class Codes: C03C 17/3452 comprising a fluoride
• CPC Class Codes: C03C 17/347 comprising a sulfide or oxysulfide
• CPC Class Codes: C03C 17/3476 comprising a selenide or telluride
• CPC Class Codes: C03C 17/36 at least one coating being a metal
• CPC Class Codes: C03C 17/3613 Coatings of type glass/inorganic compound/metal/inorganic compound/metal/other
• CPC Class Codes: C03C 17/3618 Coatings of type glass/inorganic compound/other inorganic layers, at least one layer being metallic
• CPC Class Codes: C03C 17/3621 one layer at least containing a fluoride
• CPC Class Codes: C03C 17/3626 one layer at least containing a nitride, oxynitride, boronitride or carbonitride
• CPC Class Codes: C03C 17/3628 one layer at least containing a sulfide
• CPC Class Codes: C03C 17/3634 one layer at least containing carbon, a carbide or oxycarbide
• CPC Class Codes: C03C 17/3642 the multilayer coating containing a metal layer
• CPC Class Codes: C03C 2217/734 comprising an alternation of high and low refractive indexes
• CPC Class Codes: C03C 2217/78 Coatings specially designed to be durable, e.g. scratch-resistant
• CPC Class Codes: C23C 14/02 Pretreatment of the material to be coated C23C14/04 takes precedence
• CPC Class Codes: C23C 14/021 Cleaning or etching treatments
• CPC Class Codes: C23C 14/024 : Deposition of sublayers, e.g. to promote adhesion of the coating C23C14/027 takes precedence
• CPC Class Codes: C23C 14/025 : Metallic sublayers
• CPC Class Codes: C23C 14/06 : characterised by the coating material C23C14/0021 , C23C14/04 take precedence
• CPC Class Codes: C23C 14/0605 : Carbon
• CPC Class Codes: C23C 14/0629 : of zinc, cadmium or mercury
• CPC Class Codes: C23C 14/0635 : Carbides
• CPC Class Codes: C23C 14/0641 : Nitrides C23C14/0617 takes precedence
• CPC Class Codes: C23C 14/0647 : Boron nitride
• CPC Class Codes: C23C 14/0676 : Oxynitrides
• CPC Class Codes: C23C 14/08 : Oxides C23C14/10 takes precedence
• CPC Class Codes: C23C 14/081 : of aluminium, magnesium or beryllium
• CPC Class Codes: C23C 14/082 : of alkaline earth metals
• CPC Class Codes: C23C 14/083 : of refractory metals or yttrium
• CPC Class Codes: C23C 14/086 : of zinc, germanium, cadmium, indium, tin, thallium or bismuth
• CPC Class Codes: C23C 14/10 : Glass or silica
• CPC Class Codes: C23C 14/18 : on other inorganic substrates
• CPC Class Codes: C23C 16/0227 : by cleaning or etching
• CPC Class Codes: C23C 16/0272 : Deposition of sub-layers, e.g. to promote the adhesion of the main coating
• CPC Class Codes: C23C 16/0281 : of metallic sub-layers C23C16/029 takes precedence
• CPC Class Codes: C23C 16/26 : Deposition of carbon only
• CPC Class Codes: G02B 1/105 : Protective coatings
• CPC Class Codes: G02B 1/111 : using layers comprising organic materials
• CPC Class Codes: G02B 1/14 : Protective coatings, e.g. hard coatings
• CPC Class Codes: Y10S 427/103 : Diamond-like carbon coating, i.e. DLC
• CPC Class Codes: Y10S 428/913 : Material designed to be responsive to temperature, light, moisture
• CPC Class Codes: Y10T 428/24975 : No layer or component greater than 5 mils thick
• CPC Class Codes: Y10T 428/265 : 1 mil or less
• CPC Class Codes: Y10T 428/30 : Self-sustaining carbon mass or layer with impregnant or other layer

Abstract

The coated substrate product finds particular application in eyeglass and sunglass lenses, architectural glass, analytical instrument windows, automotive windshields and laser bar code scanners for use in retail stores and supermarkets. The product has greatly improved wear resistance for severe abrasive environments and comprises a substantially optically transparent substrate, a chemicaly vapor deposited first interlayer bonded to the substrate and a chemically vapor deposited outer layer of substantially optically transparent diamond-like carbon bonded to the interlayer and away from the substrate.

Claims

1. A coated substrate product comprised of a substantially optically transparent substrate which is transparent to light in the visible region of 350 to approximately 750 nanometers and which comprises a material selected from the group consisting of an amorphous material, a single crystal, polycrystalline materials, glass, salt materials, ceramic materials and mixtures thereof and at least one composite layer having a thickness in the range of 1 μ

m to about 20 μ

m, said composite layer comprising a chemically vapor deposited first interlayer bonded to said substrate, and a chemically vapor deposited outer layer of substantially optically transparent diamond-like carbon which is transparent to light in the visible region of 350 to approximately 750 nonometers and is bonded to said first interlayer and away from said substrate;

said first interlayer and comprising a substantially optically transparent material devoid of alkali metal atoms and fluorine, which first interlayer is transparent to light in the visible region of 350 to approximately 750 nonometers and is selected from the group consisting of silicon nitride, titanium nitride, tantalum nitride, hafnium nitride, zirconium nitride, boron nitride, yttrium oxide, germanium oxide, hafnium oxide, silicon oxide, silicon dioxide, tantalum oxide, titanium oxide, zirconium oxide, silicon carbide, germanium carbide, mixtures thereof, and chemically bonded combinations thereof and capable of forming a strong chemical bond to said substrate and a strong chemical bond to said diamond-like carbon outer layer, whereby said product has greatly improved wear resistance for severe abrasive environments.

2. The product of claim 1 wherein the thickness of said first interlayer is in the range of about 1 μ

m to about 20 μ

m.

3. The product of claim 1 wherein the thickness of said diamond-like carbon outer layer is at least 50 Å

thick.

4. The product of claim 1 wherein the thickness of at least one of said composite layers and said diamond-like carbon outer layer is selected to maximize the reflection of light at predetermined wavelengths.

5. The product of claim 1 wherein the thickness of said diamond-like carbon layer corresponds to integer multiples of quarter wavelength optical thickness at predetermined wavelengths.

6. The product of claim 1 wherein the thickness of said first interlayer and said diamond-like carbon layer corresponds to integer multiples of quarter wavelength optical thickness at predetermined wavelengths.

7. The product of claim 1 wherein said composite layer comprises said first interlayer toward said substrate, a second interlayer which is transparent to light in the visible region of 350 to approximately 750 nonometers disposed immediately adjacent to said first interlayer and away from said substrate of a substantially optically transparent material devoid of alkali metal atoms and fluorine and capable of forming a strong chemical bond to said first interlayer and a strong chemical bond to diamond-like carbon, and said diamond-like carbon outer layer disposed immediately adjacent to said second interlayer and away from said substrate.

8. The product of claim 7 wherein said second interlayer comprises a substantially optically transparent metallic material capable of reflecting visible light selected from the group consisting of silicon, germanium, hafnium, molybdenum, tungsten, yttrium, tantalum, titanium and zirconium.

9. The product of claim 8 wherein the thickness of said first interlayer is in the range of about 5 Å

to about 20 μ

m and the thickness of said second interlayer is in the range of about 10 Å

to about 1000 Å

.

10. The product of claim 7 wherein said second interlayer comprises a substantially optically transparent metallic material capable of reflecting visible light selected from the group consisting of vanadium, niobium, chromium, manganese, rhenium, technetium, iron, cobalt, iridium, rhodium, nickel, palladium, platinum, copper, silver, gold, zinc, ruthenium, indium, aluminum, tin, osmium, thallium, lead, antimony, bismuth and polonium.

11. The product of claim 10 wherein the thickness of said first interlayer is in the range of about 5 Å

to about 20 μ

m and the thickness of said second interlayer is in the range of about 10 Å

to about 1000 Å

.

12. The product of claim 10 including a third interlayer disposed between said second interlayer and said diamond-like carbon outer layer of a substantially optically transparent material which third interlayer is transparent to light in the visible region of 350 to approximately 750 nanometers and is devoid of alkali metal atoms and fluorine and capable of forming a strong chemical bond with said second interlayer and said diamond-like carbon outer layer.

13. The product of claim 12 wherein said third interlayer comprises a substantially optically transparent material selected from the group consisting of silicon nitride, titanium nitride, tantalum nitride, hafnium nitride, zirconium nitride, boron nitride, yttrium oxide, germanium oxide, hafnium oxide, silicon oxide, silicon dioxide, tantalum oxide, titanium oxide, zirconium oxide, silicon carbide, germanium carbide, mixtures thereof, and chemically bonded combinations thereof.

14. The product of claim 13 wherein the thickness of at least one of said composite layers, said third interlayer and said diamond-like carbon outer layer is selected to minimize the reflection of light at predetermined wavelengths.

15. The product of claim 13 wherein the thickness of at least one of said composite layers, said third interlayer and said diamond-like carbon outer layer is selected to maximize the reflection of light at predetermined wavelengths.

16. The product of claim 13 wherein the thickness of said third interlayer and said diamond-like carbon outer layer corresponds to integer multiples of quarter wavelength optical thickness at predetermined wavelengths.

17. The product of claim 13 wherein the thickness of said first interlayer, said third interlayer and said diamond-like carbon outer layer corresponds to integer multiples of quarter wavelength optical thickness at predetermined wavelengths.

18. The product of claim 7 wherein said first interlayer further comprises a substantially optically transparent material selected from the group consisting of aluminum oxide, cerium oxide, tin oxide, thorium oxide, lithium oxide, sodium oxide, potassium oxide, rubidium oxide, cesium oxide, francium oxide, beryllium oxide, magnesium oxide, calcium oxide, strontium oxide, barium oxide, radium oxide, barium fluoride, cerium fluoride, magnesium fluoride, thorium fluoride, calcium fluoride, neodymium fluoride, lead fluoride, sodium fluoride, lithium fluoride, zinc selenide, zinc sulfide, mixtures thereof, and chemically bonded combinations thereof.

19. The product of claim 7 wherein said second interlayer comprises a substantially optically transparent material selected from the group consisting of silicon nitride, titanium nitride, tantalum nitride, hafnium nitride, zirconium nitride, boron nitride, yttrium oxide, germanium oxide, hafnium oxide, silicon oxide, silicon dioxide, tantalum oxide, titanium oxide, zirconium oxide, silicon carbide, germanium carbide, mixtures thereof, and chemically bonded combinations thereof.

20. The product of claim 19 wherein the thickness of said first interlayer is in the range of about 5 Å

to about 1 μ

m and the thickness of said second interlayer is in the range of about 1 μ

m to about 20 μ

m.

21. The product of claim 20 wherein said first interlayer comprises silicon dioxide and said second interlayer comprises a chemically bonded combination of silicon oxide and silicon nitride.

22. The product of claim 21 the thickness of said diamond-like carbon outer layer is at least 50 Å

thick.

23. The product of claim 19 wherein the thickness of at least one of said composite layers, said second interlayer and said diamond-like carbon outer layer is selected to minimize the reflection of light at predetermined wavelengths.

24. The product of claim 19 wherein the thickness of at least one of said composite layers, said second interlayer and said diamond-like carbon outer layer is selected to maximize the reflection of light at predetermined wavelengths.

25. The product of claim 19 wherein the thickness of said second interlayer and said diamond-like carbon outer layer corresponds to integer multiples of quarter wavelength optical thickness at predetermined wavelengths.

26. The product of claim 19 wherein the thickness of said first interlayer, said second interlayer and said diamond-like carbon layer corresponds to integer multiples of quarter wavelength optical thickness at predetermined wavelengths.

27. The product of claim 19 wherein said composite layer comprises two different and separately deposited said second interlayers, and said diamond-like carbon outer layer disposed immediately adjacent to said plurality of said second interlayers.

28. The product of claim 7 wherein said composite layer includes a chemically vapor deposited fourth interlayer disposed between said second interlayer and said diamond-like carbon outer layer of a substantially optically transparent material devoid of alkali metal atoms and fluorine and capable of forming a strong chemical bond to said second interlayer and said diamond-like carbon outer layer.

29. The product of claim 28 wherein said first interlayer and said second interlayer comprise a substantially optically transparent material selected from the group consisting of silicon nitride, titanium nitride, tantalum nitride, hafnium nitride, zirconium nitride, boron nitride, yttrium oxide, germanium oxide, hafnium oxide, silicon oxide, silicon dioxide, tantalum oxide, titanium oxide, zirconium oxide, silicon carbide, germanium carbide, aluminum oxide, cerium oxide, tin oxide, thorium oxide, lithium oxide, sodium oxide, potassium oxide, rubidium oxide, cesium oxide, francium oxide, beryllium oxide, magnesium oxide, calcium oxide, strontium oxide, barium oxide, radium oxide, barium fluoride, cerium fluoride, magnesium fluoride, thorium fluoride, calcium fluoride, neodymium fluoride, lead fluoride, sodium fluoride, lithium fluoride, zinc selenide, zinc sulfide, mixtures thereof, and chemically bonded combinations thereof.

30. The product of claim 28 wherein said fourth interlayer comprises a substantially optically transparent material selected from the group consisting of silicon nitride, titanium nitride, tantalum nitride, hafnium nitride, zirconium nitride, boron nitride, yttrium oxide, germanium oxide, hafnium oxide, silicon oxide, silicon dioxide, tantalum oxide, titanium oxide, zirconium oxide, silicon carbide, germanium carbide, mixtures thereof, and chemically bonded combinations thereof.

31. The product of claim 30 wherein the thicknesses of said first and second interlayers are in the range of about 5 Å

to about 1 μ

m and the thickness of said fourth interlayer is in the range of about 1 μ

m to about 20 μ

m.

32. The product of claim 28 wherein the thickness of at least one of said composite layers, said second interlayer, said fourth interlayer and said diamond-like carbon outer layer is selected to minimize the reflection of light at predetermined wavelengths.

33. The product of claim 28 wherein the thickness of at least one of said composite layers, said second interlayer, said fourth interlayer, and said diamond-like carbon outer layer is selected to maximize the reflection of light at predetermined wavelengths.

34. The product of claim 28 wherein the thickness of said second interlayer, said fourth interlayer and said diamond-like carbon layer corresponds to integer multiples of quarter wavelength optical thickness at predetermined wavelengths.

35. The product of claim 28 wherein the thickness of said first interlayer, said second interlayer, said fourth interlayer and said diamond-like carbon layer corresponds to integer multiples of quarter wavelength optical thickness at predetermined wavelengths.

36. A coated substrate product comprised of a substantially optically transparent substrate which is transparent to light in the visible region of 350 to approximately 750 nanometers and which comprises a material selected from the group consisting of an amorphous material, a single crystal, polycrystalline materials, glass, salt materials, ceramic materials and mixtures thereof, a first composite layer and at least one second composite layer;

said first composite layer having a thickness in the range of about 1 μ

m to about 20 μ

m and comprising a chemically vapor deposited first interlayer bonded to said substrate of a substantially optically transparent material capable of forming a strong chemical bond to said substrate which first interlayer is transparent to light in the visible region of 350 to approximately 750 nanometers and which is selected from the group consisting of silicon nitride, titanium nitride, tantalum nitride, hafnium nitride, zirconium nitride, boron nitride, yttrium oxide, germanium oxide, hafnium oxide, silicon oxide, silicon dioxide, tantalum oxide, titanium oxide, zirconium oxide, silicon carbide, germanium carbide, aluminum oxide, cerium oxide, tin oxide, thorium oxide, lithium oxide, sodium oxide, potassium oxide, rubidium oxide, cesium oxide, francium oxide, beryllium oxide, magnesium oxide, calcium oxide, strontium oxide, barium oxide, radium oxide, barium fluoride, cerium fluoride, magnesium fluoride, thorium fluoride, calcium fluoride, neodymium fluoride, lead fluoride, sodium fluoride, lithium fluoride, zinc selenide, zinc sulfide, mixtures thereof, and chemically bonded combinations thereof, a second interlayer bonded to and disposed immediately adjacent to said first interlayer and away from said substrate of a substantially optically transparent material devoid of alkali metal atoms and fluorine and capable of forming a strong chemical bond to said first interlayer and a strong chemical bond to diamond-like carbon, and a first substantially optically transparent diamond-like carbon layer which is transparent to light in the visible region of 350 to approximately 750 nanometers and which is bonded to and disposed immediately adjacent to said second interlayer and away from said substrate;

said second composite layer which is transparent to light in the visible region of 350 to approximately 750 nanometers and which is bonded to and disposed immediately adjacent to said first composite layer and away from said substrate comprising a chemically vapor deposited third interlayer disposed immediately adjacent to said first diamond-like carbon layer of a substantially optically transparent material devoid of alkali metal atoms and fluorine and capable of forming a strong chemical bond to diamond-like carbon and a second substantially optically transparent diamond-like carbon layer bonded to and disposed immediately adjacent to said third interlayer and away from said substrate, whereby said coated substrate product has greatly improved wear resistance for severe abrasive environments.

37. The product of claim 36 wherein said second interlayer and said third interlayer comprise a substantially optically transparent material selected from the group consisting of silicon nitride, titanium nitride, tantalum nitride, hafnium nitride, zirconium nitride, boron nitride, germanium oxide, hafnium oxide, silicon oxide, silicon dioxide, tantalum oxide, titanium oxide, yttrium oxide, zirconium oxide, silicon carbide, germanium carbide, mixtures thereof, and chemically bonded combinations thereof.

38. The product of claim 36 wherein the thickness of said second interlayer is in the range of about 1 μ

m to about 20 μ

m.

39. The product of claim 38 wherein the first interlayer comprises silicon dioxide and said second interlayer comprises a chemically bonded combination of silicon oxide and silicon nitride.

40. The product of claim 36 wherein said first composite layer comprises at least one pair of separately deposited said second interlayers.

41. The product of claim 36 wherein the thickness of said first interlayer, said second interlayer and said third interlayer is at least 2 μ

m thick.

42. The product of claim 36 wherein the thickness of said first diamond-like carbon layer and said second diamond-like carbon layer is at least 50 Å

thick.

43. The product of claim 42 wherein the thickness of at least one of said first interlayer, said second interlayer, said third interlayer, said first diamond-like carbon layer and said second diamond-like carbon layer is selected to minimize the reflection light at predetermined wavelengths.

44. The product of claim 36 wherein the thickness of at least one of said first interlayer, said second interlayer, said third interlayer, said first diamond-like carbon layer and said second diamond-like carbon layer is selected to maximize the reflection of light at predetermined wavelengths.

45. The product of claim 36 wherein the thickness of said second interlayer, said third interlayer, said first diamond-like carbon layer and said second diamond-like carbon layer corresponds to integer multiples of quarter wavelength optical thickness at predetermined wavelengths.

46. The product of claim 36 wherein the thickness of said first interlayer, said second interlayer, said third interlayer, said first diamond-like carbon layer and said second diamond-like carbon layer corresponds to integer multiples of quarter wavelength optical thickness at predetermined wavelengths.

47. The product of claim 36 wherein said third interlayer comprises a substantially optically transparent material selected from the group consisting of silicon nitride, titanium nitride, tantalum nitride, hafnium nitride, zirconium nitride, boron nitride, germanium oxide, hafnium oxide, silicon oxide, silicon dioxide, tantalum oxide, titanium oxide, yttrium oxide, zirconium oxide, silicon carbide, germanium carbide, mixtures thereof, and chemically bonded combinations thereof.

48. The product of claim 47 wherein said second interlayer comprises a substantially optically transparent metallic material capable of reflecting visible light selected from the group consisting of silicon, germanium, hafnium, molybdenum, tungsten, yttrium, tantalum, titanium and zirconium.

49. The product of claim 48 wherein the thickness of said first interlayer is in the range of about 5 Å

to about 20 μ

m and the thickness of said second interlayer is in the range of about 10 Å

to about 1000 Å

.

50. The product of claim 47 wherein said second interlayer comprises a substantially optically transparent metallic material capable of reflecting visible light selected from the group consisting of vanadium, niobium, chromium, manganese, rhenium, technetium, iron, cobalt, iridium, rhodium, nickel, palladium, platinum, copper, silver, gold, zinc, ruthenium, indium, aluminum, tin, osmium, thallium, lead, antimony, bismuth and polonium.

51. The product of claim 50 wherein the thickness of said first interlayer is in the range of about 5 Å

to about 20 μ

and the thickness of said second interlayer is in the range of about 10 Å

to about 1000 Å

.

52. The product of claim 50 including a fourth interlayer disposed between said second interlayer and said first diamond-like carbon layer of a substantially optically transparent material devoid of alkali metal atoms and fluorine and capable of forming a strong chemical bond with said second interlayer and said first diamond-like carbon layer.

53. The product of claim 52 wherein said fourth interlayer comprises a substantially optically transparent material selected from the group consisting of silicon nitride, titanium nitride, tantalum nitride, hafnium nitride, zirconium nitride, boron nitride, yttrium oxide, germanium oxide, hafnium oxide, silicon oxide, silicon dioxide, tantalum oxide, titanium oxide, zirconium oxide, silicon carbide, germanium carbide, mixtures thereof, and chemically bonded combinations thereof.

54. The product of claim 53 wherein the thickness of at least one of said first interlayer, said fourth interlayer, said third interlayer, said first diamond-like carbon layer and said second diamond-like carbon layer is selected to minimize the reflection of light at predetermined wavelengths.

55. The product of claim 52 wherein the thickness of at least one of said first interlayer, said fourth interlayer, said third interlayer, said first diamond-like carbon layer and said second diamond-like carbon layer is selected to maximize the reflection of light at predetermined wavelengths.

56. The product of claim 52 wherein the thickness of said fourth interlayer, said third interlayer, said first diamond-like carbon layer and said second diamond-like carbon layer corresponds to integer multiples of quarter wavelength optical thickness at predetermined wavelengths.

57. The product of claim 52 wherein the thickness of said first interlayer, said fourth interlayer, said third interlayer, said first diamond-like carbon layer and said second diamond-like carbon layer corresponds to integer multiples of quarter wavelength optical thickness at predetermined wavelengths.

58. The product of claim 36 wherein said first composite layer includes a fifth interlayer disposed between said second interlayer and said first diamond-like carbon layer of a substantially optically transparent material devoid of alkali metal atoms and fluorine and capable of forming a strong chemical bond with said second interlayer and said diamond-like carbon outer layer.

59. The product of claim 58 wherein said third interlayer and said fifth interlayer comprise a substantially optically transparent material selected from the group consisting of silicon nitride, titanium nitride, tantalum nitride, hafnium nitride, zirconium nitride, boron nitride, yttrium oxide, germanium oxide, hafnium oxide, silicon oxide, silicon dioxide, tantalum oxide, titanium oxide, zirconium oxide, silicon carbide, germanium carbide, mixtures thereof, and chemically bonded combinations thereof.

60. The product of claim 59 wherein the thickness of said first and second interlayers are in the range of about 5 Å

to about 20 μ

m and the thickness of said fifth interlayer is in the range of about 1 μ

m to about 20 μ

m.

61. The product of claim 58 wherein said second interlayer comprises a substantially optically transparent material selected from the group consisting of silicon nitride, titanium nitride, tantalum nitride, hafnium nitride, zirconium nitride, boron nitride, yttrium oxide, germanium oxide, hafnium oxide, silicon oxide, silicon dioxide, tantalum oxide, titanium oxide, zirconium oxide, silicon carbide, germanium carbide, aluminum oxide, cerium oxide, tin oxide, thorium oxide, lithium oxide, sodium oxide, potassium oxide, rubidium oxide, cesium oxide, francium oxide, beryllium oxide, magnesium oxide, calcium oxide, strontium oxide, barium oxide, radium oxide, barium fluoride, cerium fluoride, magnesium fluoride, thorium fluoride, calcium fluoride, neodymium fluoride, lead fluoride, sodium fluoride, lithium fluoride, zinc selenide, zinc sulfide, mixtures, thereof, and chemically bonded combinations thereof.

62. The product of claim 58 wherein the thickness of at least one of said first interlayer, said second interlayer, said fifth interlayer, said first diamond-like carbon layer, said third interlayer and said second diamond-like carbon layer is selected to minimize the reflection of light at predetermined wavelengths.

63. The product of claim 58 wherein the thickness of at least one of said first interlayer, said second interlayer, said fifth interlayer, said first diamond-like carbon layer, said third interlayer and said second diamond-like carbon layer is selected to maximize the reflection of light at predetermined wavelengths.

64. The product of claim 58 wherein the thickness of said second interlayer, said third interlayer, said fifth interlayer said first diamond-like carbon layer and said second diamond-like carbon layer corresponds to integer multiples of quarter wavelength optical thickness at predetermined wavelengths.

65. The product of claim 58 wherein the thickness of said first interlayer, said second interlayer, said third interlayer, said fifth interlayer said first diamond-like carbon layer and said second diamond-like carbon layer corresponds to integer multiples of quarter wavelength optical thickness at predetermined wavelengths.