Slotline reflective phase shifting array element utilizing electrostatic switches
First Claim
1. A radiating element having an electrical reflective phase shifter for directing electromagnetic energy received from an electromagnetic energy source comprising:
- (a) a dielectric substrate having a top surface;
(b) a conductive layer disposed on said top surface of said dielectric substrate, said conductive layer having a top surface and a slotline having a preselected length formed therein, said slotline having an open radiating end portion;
(c) means for shorting said slotline to vary said length of said slotline to a fraction of said preselected length of said slotline as measured from said open radiating end portion to said means for shorting to reflect said electromagnetic energy; and
(d) means for selectively actuating said means for shorting.
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Accused Products
Abstract
An apparatus is disclosed for providing a radiating element having an electrical reflective phase shifter for reflecting electromagnetic energy received from an electromagnetic energy source including a dielectric substrate having a top surface, a conductive layer having a channel-like opening in its top surface and disposed on the top surface of the dielectric substrate, at least one electrostatic switch spans the channel-like opening and a means for selectively actuating the electrostatic switch to reflect the electrostatic energy. The electrostatically actuated mechanical switch utilizes a cantilever element fabricated by solid-state microfabrication techniques. The electrical reflective phase shifter can be grouped into a phase shifting reflect array for beam steering an electromagnetic energy from an electromagnetic energy source.
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Citations
19 Claims
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1. A radiating element having an electrical reflective phase shifter for directing electromagnetic energy received from an electromagnetic energy source comprising:
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(a) a dielectric substrate having a top surface; (b) a conductive layer disposed on said top surface of said dielectric substrate, said conductive layer having a top surface and a slotline having a preselected length formed therein, said slotline having an open radiating end portion; (c) means for shorting said slotline to vary said length of said slotline to a fraction of said preselected length of said slotline as measured from said open radiating end portion to said means for shorting to reflect said electromagnetic energy; and (d) means for selectively actuating said means for shorting. - View Dependent Claims (2, 3)
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4. A radiating element having an electrical reflective phase shifter for directing electromagnetic energy from an electromagnetic energy source received by the radiating element comprising:
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(a) a dielectric substrate having a top surface; (b) a conductive layer disposed on said top surface of said dielectric substrate, said conductive layer having a top surface and a slotline formed therein, said slotline having an open radiating end portion and a closed reflective end portion; (c) at least one electrostatic switch disposed atop said conductive layer and said dielectric substrate so that at least a portion of said electrostatic switch spans said slotline; and (d) means for selectively actuating said electrostatic switch to reflect said electromagnetic energy. - View Dependent Claims (5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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15. An antenna having an electrical reflective phase shifting array for beam steering electromagnetic energy from an electromagnetic energy source received by the antenna comprising:
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(a) a dielectric substrate having a top surface; (b) a conductive layer disposed on said top surface of said dielectric substrate, said conductive layer having a top surface and a plurality of slotline formed therein, said slotline having an open radiating end portion and a closed reflective end portion; (c) at least one electrostatic switch disposed atop said conductive layer and said dielectric substrate so that at least a portion of said electrostatic switch spans each slotline; and (d) means for selectively actuating each electrostatic switch for beam steering said electromagnetic energy. - View Dependent Claims (16, 17, 18)
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19. A radiating element having an electrical reflective phase shifter for reflecting electromagnetic energy from an electromagnetic source received by the radiating element comprising:
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(a) a dielectric substrate having a top surface; (b) an conductive layer disposed on said top surface of said dielectric substrate, said conductive layer having a top surface; (c) at least one slotline in said conductive layer, each slotline having an input port at one end for receiving an electrical RF signal, a slotline short at an opposite end, a first side and an opposite second side between said one end and said opposite end; (d) a pull down electrode connected to said top surface of said dielectric substrate on said first side of each slotline; (e) at least one cantilever element having a first end portion secured to said top surface of said conductive layer on said second side of said slotline, an opposite end portion positioned in spaced relation to said pull down electrode and operable in response to an electrostatic charge established between said cantilever element and said pull down electrode to deflect in a direction towards said pull down electrode; and (f) a contact pad mounted on said top surface of said conductive layer between said cantilever element first end portion and said pull down electrode and positioned to contact said cantilever element as said cantilever element deflects towards said pull down electrode; whereby, said cantilever element acts as a slotline short upon making contact with said contact pad by reflecting the electromagnetic energy from an electromagnetic energy source.
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Specification