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D.C. reactively sputtered antireflection coatings

  • US 5,270,858 A
  • Filed: 09/06/1991
  • Issued: 12/14/1993
  • Est. Priority Date: 10/11/1990
  • Status: Expired due to Term
First Claim
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1. An antireflection coating for a substrate, comprising:

  • five adjoining layers, said layers designated the first, second, third, fourth, and fifth in consecutive numerical order beginning with the layer farthest from said substrate;

    said first layer having a refractive index less than the refractive index of said substrate and an optical thickness of about 0.25 λ

    0 ;

    said second layer having a refractive index greater than about 2.20 and an optical thickness less than about 0.25 λ

    0 ;

    said third layer having a refractive index less than said second layer and an optical thickness between about 0.25 λ

    0 and 0.5 λ

    0, said third layer including a transparent electrically conductive material;

    said fourth layer having a refractive index less than that of said third layer and an optical thickness less than about 0.25 λ

    0 ;

    said fifth layer having a refractive index greater than the refractive index of said substrate and said fourth layer, and an optical thickness less than about 0.25 λ

    0 ; and

    λ

    0 being between about 480 nm and 560 nm.

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