D.C. reactively sputtered antireflection coatings
First Claim
Patent Images
1. An antireflection coating for a substrate, comprising:
- five adjoining layers, said layers designated the first, second, third, fourth, and fifth in consecutive numerical order beginning with the layer farthest from said substrate;
said first layer having a refractive index less than the refractive index of said substrate and an optical thickness of about 0.25 λ
0 ;
said second layer having a refractive index greater than about 2.20 and an optical thickness less than about 0.25 λ
0 ;
said third layer having a refractive index less than said second layer and an optical thickness between about 0.25 λ
0 and 0.5 λ
0, said third layer including a transparent electrically conductive material;
said fourth layer having a refractive index less than that of said third layer and an optical thickness less than about 0.25 λ
0 ;
said fifth layer having a refractive index greater than the refractive index of said substrate and said fourth layer, and an optical thickness less than about 0.25 λ
0 ; and
λ
0 being between about 480 nm and 560 nm.
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Abstract
A multilayer antireflection coating designed for deposition in in-line coating machines by DC reactive sputtering. About half of the total thickness of the coating may be formed from zinc oxide which has a high sputtering rate. Conductive transparent materials including aluminum doped zinc oxide, antimony doped tin oxide, cadmium tin oxide, and indium tin oxide may be included in the coating.
66 Citations
16 Claims
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1. An antireflection coating for a substrate, comprising:
- five adjoining layers, said layers designated the first, second, third, fourth, and fifth in consecutive numerical order beginning with the layer farthest from said substrate;
said first layer having a refractive index less than the refractive index of said substrate and an optical thickness of about 0.25 λ
0 ;
said second layer having a refractive index greater than about 2.20 and an optical thickness less than about 0.25 λ
0 ;
said third layer having a refractive index less than said second layer and an optical thickness between about 0.25 λ
0 and 0.5 λ
0, said third layer including a transparent electrically conductive material;
said fourth layer having a refractive index less than that of said third layer and an optical thickness less than about 0.25 λ
0 ;
said fifth layer having a refractive index greater than the refractive index of said substrate and said fourth layer, and an optical thickness less than about 0.25 λ
0 ; and
λ
0 being between about 480 nm and 560 nm. - View Dependent Claims (2, 3, 4, 5, 6)
- five adjoining layers, said layers designated the first, second, third, fourth, and fifth in consecutive numerical order beginning with the layer farthest from said substrate;
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7. An antireflection coating for a substrate, comprising:
- six adjoining layers, said layers being designated the first, second, third, fourth, fifth, and sixth in consecutive numerical order beginning with the layer farthest from said substrate;
said first layer having a refractive index less than that of said substrate and an optical thickness of about 0.25 λ
0 ;
said second layer having a refractive index greater than about 2.2;
said third layer having a refractive index less than that of said second layer;
said fourth layer having a refractive index less than the refractive index of said third layer and said fourth layer including a transparent electrically conductive material;
said fifth layer having a refractive index less than that of said fourth layer and having an optical thickness less than about 0.25 λ
0 ;
said sixth layer having a refractive index greater than that of said substrate and greater than that of said fifth layer and an optical thickness less than about 0.25 λ
0 ;
said second, third, and fourth layers having a combined optical thickness of about 0.5 λ
0, and λ
0 being between about 480 and 560 nm. - View Dependent Claims (8)
- six adjoining layers, said layers being designated the first, second, third, fourth, fifth, and sixth in consecutive numerical order beginning with the layer farthest from said substrate;
-
9. An antireflection coating for a substrate, comprising:
- six adjoining layers, said layers being designated the first, second, third, fourth, fifth and sixth in consecutive numerical order beginning with the layer farthest from said substrate;
said first layer having a refractive index less than that of said substrate and an optical thickness of about 0.25 λ
0 ;
said second layer having a refractive index greater than about 2.2;
said third layer having a refractive index less than that of said second layer and said third layer including a transparent electrically conductive material;
said fourth layer having a refractive index greater than that of said third layer and less than that of said second layer;
said fifth layer having a refractive index less than that of said fourth layer and an optical thickness less than about 0.25 λ
0 ;
said sixth layer having a refractive index greater than that of said substrate and said fifth layer and an optical thickness less than about 0.25 λ
0 ;
said second, third, and fourth layers having a combined optical thickness of about 0.5 λ
0, and λ
0 being between about 480 nm and 560 nm. - View Dependent Claims (10)
- six adjoining layers, said layers being designated the first, second, third, fourth, fifth and sixth in consecutive numerical order beginning with the layer farthest from said substrate;
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11. An antireflection coating for a substrate, comprising:
- four adjoining layers, said layers being designated the first, second, third, and fourth in consecutive numerical order beginning with the layer farthest from said substrate;
said first layer having a refractive index less than that of said substrate and an optical thickness of about 0.25 λ
0 ;
said fourth layer having a refractive index greater than that of said substrate and an optical thickness less than about 0.25 λ
0 ;
said third layer having an optical thickness of about 0.25 λ
0 and a refractive index less than that of said fourth layer;
said second layer having a thickness of about 0.5 λ
0 and including at least two adjacent sub-layers, the sub-layer in contact with said first layer having a refractive index greater than about 2.2 and all other sub-layers having a refractive index of said third layer, and λ
0 being between about 480 nm and 560 nm and at least one of said other sublayers including a transparent electrically conductive material. - View Dependent Claims (12)
- four adjoining layers, said layers being designated the first, second, third, and fourth in consecutive numerical order beginning with the layer farthest from said substrate;
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13. An antireflection coating for a substrate, comprising:
- five adjoining layers, said layers being designated the first, second, third, fourth, and fifth in consecutive numerical order beginning with the layer farthest from said substrate;
said first layer having a refractive index of about 1.46 at a wavelength λ
0 and an optical thickness of about 0.266 λ
0 ;
said second layer having a refractive index of about 2.35 at a wavelength λ
0 and an optical thickness of about 0.110 λ
0 ;
said third layer having a refractive index of about 2.01 at a wavelength λ
0 and an optical thickness of about 0.368 λ
0, said third layer including a transparent electrically conductive material;
said fourth layer having a refractive index of about 1.46 at a wavelength λ
0 and an optical thickness of about 0.117 λ
0 ;
said fifth layer having a refractive index of about 2.35 at a wavelength λ
0 and an optical thickness of about 0.028 λ
0, and λ
0 being about 510 nm. - View Dependent Claims (14)
- five adjoining layers, said layers being designated the first, second, third, fourth, and fifth in consecutive numerical order beginning with the layer farthest from said substrate;
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15. An antireflection coating for a substrate, comprising:
- six adjoining layers, said layers being designated the first, second, third, fourth, fifth, and sixth in consecutive numerical order beginning with the layer farthest from said substrate;
said first layer having a refractive index of about 1.46 and an optical thickness of about 0.268 λ
0 ;
said second layer having a refractive index of about 2.35 and an optical thickness of about 0.072 λ
0 ;
said third layer having a refractive index of about 2.14 and an optical thickness of about 0.170 λ
0 ;
said fourth layer having a refractive index of about 2.01 and an optical thickness of about 0.270 λ
0, said fourth layer including a transparent electrically conductive material;
said fifth layer having a refractive index of about 1.46 and having an optical thickness of about 0.120 λ
0 ;
said sixth layer having a refractive index of about 2.35 and an optical thickness of about 0.030 λ
0 ; and
λ
0 being about 510 nm. - View Dependent Claims (16)
- six adjoining layers, said layers being designated the first, second, third, fourth, fifth, and sixth in consecutive numerical order beginning with the layer farthest from said substrate;
Specification