Bonding metal members with multiple laser beams

• US 5,272,309 A
• Filed: 01/17/1992
• Issued: 12/21/1993
• Est. Priority Date: 08/01/1990
• Status: Expired due to Term

• Current Assignee: Stovokor Technology LLC (Intellectual Ventures LLC)
• Original Assignee: Microelectronics and Computer Technology Corporation
• Inventors: Spletter, Philip J., Goruganthu, Rama R.
• Primary Examiner(s): ALBRITTON, CLARENCE
• Application Number:
  US07/822,273
• Time in Patent Office: 704 Days
• Field of Search: 219/121.76, 219/121.77, 219/121.74, 219/121.68, 219/121.69, 219/121.63, 219/121.64, 219/121.65, 219/121.66
• US Class Current: 219/121.63
• CPC Class Codes: B23K 26/0604 by a combination of beams
• CPC Class Codes: B23K 26/0613 having a common axis B23K26/0619 takes precedence
• CPC Class Codes: B23K 26/0622 by shaping pulses
• CPC Class Codes: B23K 26/067 Dividing the beam into multiple beams, e.g. multifocusing
• CPC Class Codes: H01S 3/0931 Imaging pump cavity, e.g. elliptical
• CPC Class Codes: H01S 3/109 Frequency multiplication, e.g. harmonic generation
• CPC Class Codes: H01S 3/2383 Parallel arrangements

Abstract

A first laser beam and a second laser beam with a longer wavelength than the first laser beam are directed at a first metal member in contact with a second metal member. At the ambient temperature the first member has high absorption of energy from the first laser beam but low absorption of energy from the second laser beam. As the first member absorbs energy from the first laser beam the temperature of the first member increases and the reflectivity of the first member decreases so that the first member has high absorption of energy from the second laser beam. The first member then absorbs energy from the second laser beam, the temperature of the first member further increases and at least one of the members melts. After discontinuing the laser beams a solid bond forms between the members.

Claims

1. A method of using multiple laser beams to bond metal members, comprising:

generating a first laser beam;

generating a second laser beam with a longer wavelength than the first laser beam;

contacting first and second metal members wherein at an ambient temperature the first member has high absorption of energy from the first laser beam but low absorption of energy from the second laser beam;

directing the first laser beam at the first member at the ambient temperature wherein the first member absorbs energy from the first laser beam, the temperature of the first member increases and the reflectivity of the first member decreases so that the first member has high absorption of energy from the second laser beam;

directing the second laser beam at the first member while the first member has high absorption of energy from the second laser beam so that the first member absorbs energy from the second laser beam, the temperature of the first member further increases and a member melts; and

discontinuing to direct the laser beams at the first member, thereby cooling the molten member and forming a solid bond between the members.

2. The method of claim 1, wherein high absorption is greater than or equal to 10 percent of the energy in the laser beam where the laser beam impinges upon the first member, and low absorption is less than 10 percent of the energy in the laser beam where the laser beam impinges upon the first member.

3. The method of claim 1, wherein the bond is pure gold.

4. The method of claim 1, wherein the bond consists of an alloy of the members.

5. The method of claim 4, wherein the alloy contains no tin.

6. The method of claim 4, wherein the alloy comprises gold.

7. The method of claim 6, wherein the alloy is a copper/gold alloy.

8. The method of claim 1, wherein the first member is heated above the ambient temperature solely by absorbed energy from the laser beams.

9. The method of claim 8, wherein essentially all of the absorbed energy is absorbed by the members.

10. The method of claim 8, wherein essentially all of the absorbed energy is absorbed by the first member.

11. The method of claim 1, wherein the first member melts.

12. The method of claim 11, wherein both members melt.

13. The method of claim 12, wherein

at the ambient temperature the second member has high absorption of energy from the first laser beam but low absorption of energy from the second laser beam,

the second member absorbs energy from the first laser, the temperature of the second member increases and the reflectivity of the second member decreases so that the second member has high absorption of the second laser beam,

the second member absorbs energy from the second laser beam while the second member has high absorption of energy from the second laser beam and the temperature of the second member further increases, and

both members melt.

14. The method of claim 1, wherein the laser beams are co-linear.

15. The method of claim 1, wherein the laser beams are not co-linear.

16. The method of claim 1, wherein the first laser beam is directed at the first member before the second laser beam is directed at the first member.

17. The method of claim 16, wherein the second laser beam is directed at the first member after the first member has high absorption of energy from the second laser beam.

18. The method of claim 1, wherein the laser beams are directed at the first member simultaneously.

19. The method of claim 1, wherein the first laser beam is visible and the second laser beam is infrared.

20. The method of claim 1, wherein the first laser beam has a wavelength between 300-600 nm and the second laser beam has a wavelength between 600-1200 nm.

21. The method of claim 20, wherein the first laser beam has a 532 nm wavelength and the second laser beam has a 1064 nm wavelength.

22. The method of claim 1, wherein the laser beams are pulsed laser beams.

23. The method of claim 1, wherein the laser beams are not Q-switched laser beams.

24. The method of claim 1, wherein the first laser beam is an argon ion laser beam.

25. The method of claim 1, wherein the second laser beam is an Nd:

YAG laser beam.

26. The method of claim 1, wherein the first laser beam consists of a plurality of seperate beams.

27. The method of claim 1, wherein the first laser beam is directed through a fiber optical cable.

28. The method of claim 1, wherein the ambient temperature is at room temperature.

29. The method of claim 1 wherein the first member comprises copper or gold.

30. The method of claim 1, wherein at the ambient temperature the first member is highly reflective.

31. The method of claim 1, wherein at the ambient temperature the members are highly reflective, the first laser beam is visible and the second laser beam is infrared.

32. The method of claim 1, wherein the first member is the inner end of a tape-automated-bonding lead and the second member is a bonding pad on an integrated circuit chip.

33. The method of claim 30, wherein the tape-automated-bonding lead is gold plated copper and bonding pad is gold.

34. A method of using multiple laser beams to bond metal members, comprising:

generating a first pulsed laser beam;

generating a second pulsed laser beam with a longer wavelength than the first laser beam;

contacting first and second metal members wherein at an ambient temperature the first member has high absorption of energy from the first laser beam but low absorption of energy from the second laser beam, and wherein high absorption is greater than or equal to 10 percent of the energy in the laser beam where the laser beam impinges upon the first member and low absorption is less than 10 percent of the energy in the laser beam where the laser beam impinges upon the first member;

directing the first laser beam at the first member at the ambient temperature wherein the first member absorbs energy from the first laser beam, the temperature of the first member increases and the reflectivity of the first member decreases so that the first member has high absorption of energy from the second laser beam;

directing the second laser beam at the first member while the first member has high absorption of energy from the second laser beam so that the first member absorbs energy from the second laser beam, the temperature of the first member further increases and both of the members melt; and

discontinuing to direct the laser beams at the first member, thereby cooling the members and forming a solid bond between the members.

35. The method of claim 34, wherein the bond is pure gold.

36. The method of claim 34, wherein

at the ambient temperature the second member has high absorption of energy from the first laser beam but low absorption of energy from the second laser beam,

the second member absorbs energy from the first laser, the temperature of the second member increases and the reflectivity of the second member decreases so that the second member has high absorption of the second laser beam, and

the second member absorbs energy from the second laser beam while the second member has high absorption of energy from the second laser beam and the temperature of the second member further increases.

37. The method of claim 34, wherein the first laser beam is directed at the first member before the second laser beam is directed at the first member.

38. The method of claim 34, wherein the members are highly reflective, the first laser beam is visible and the second laser beam is infrared.

39. The method of claim 34, wherein the second laser beam is an Nd:

YAG laser beam.

40. The method of claim 34, wherein the first member is the inner end of a gold plated copper tape-automated-bonding lead and the second member is a gold bonding pad on an integrated circuit chip.

41. The method of claim 34, further comprising

generating the first and second laser beams as a co-linear laser beam,

separating the first and second laser beams from the co-linear laser beam,

attenuating the separated first laser beam,

attenuating the separated second laser beam,

combining the attenuated first and second laser beams into a composition altered co-linear beam, and

directing the composition altered co-linear laser beam at the first member, thereby allowing the percentage of the first and second laser beams which impinge upon the first member to be adjusted.

42. An apparatus with multiple laser beams for bonding metal members, which comprises:

means for generating a first laser beam;

means for generating a second laser beam with a longer wavelength than the first laser beam;

a first metal member wherein at an ambient temperature the first member has high absorption of energy from the first laser beam but low absorption of energy from the second laser beam;

a second metal member;

means for holding the first and second members in contact with one another;

means for directing the first laser beam at the first member at the ambient temperature wherein the first member absorbs energy from the first laser beam, the temperature of the first member increases and the reflectivity of the first member decreases so that the first member has high absorption of energy from the second laser beam without roughening the surface of the first member;

means for directing the second laser beam at the first member while the first member has high absorption of energy from the second laser beam so that the first member absorbs energy from the second laser beam, the temperature of the first member further increases and a member melts; and

means for discontinuing to direct the laser beams at the first member so that the molten member cools and a solid bond forms between the members.

43. An apparatus with multiple laser beams for bonding metal members, which comprises:

means for generating a first pulsed laser beam;

means for generating a second pulsed laser beam with a longer wavelength than the first laser beam;

a first metal member wherein at an ambient temperature the first member has high absorption of energy from the first laser beam but low absorption of energy from the second laser beam, and wherein high absorption is greater than or equal to 10 percent of the energy in the laser beam where the laser beam impinges upon the first member and low absorption is less than 10 percent of the energy in the laser beam where the laser beam impinges upon the first member;

a second metal member;

means for holding the first and second members in contact with one another;

means for directing the first laser beam at the first member at the ambient temperature wherein the first member absorbs energy from the first laser beam, the temperature of the first member increase and the reflectivity of the first member decreases so that the first member has high absorption of energy from the second laser beam without roughening the surface of the first member;

means for directing the second laser beam at the first member while the first member has high absorption of energy from the second laser beam due to said temperature increase in the first member caused by energy from the first laser beam so that the first member absorbs energy from the second laser beam, the temperature of the first member further increases and both members melt; and

means for discontinuing to direct the laser beams at the first member so that the members cool and a solid bond forms between the members.

44. The system of claim 43, wherein the first laser beam is directed at the first member before the second laser beam is directed at the first member.

45. The apparatus of claim 43, wherein the first laser beam has a wavelength between 300-600 nm and the second laser beam has a wavelength between 600-1200 nm.

46. The apparatus of claim 43, wherein the first laser beam is visible and the second laser beam is infrared.

47. The apparatus of claim 43, wherein the second laser beam is an Nd:

YAG laser beam.

48. The apparatus of claim 43, further comprising:

means for generating the first and second laser beams as a co-linear laser beam,

means for separating the first and second laser beams from the co-linear laser beam,

means for attenuating the separated first laser beam,

means for attenuating the separated second laser beam,

means for combining the attenuated first and second laser beams into a composition altered co-linear beam, and

means for directing the composition altered laser beam at the first member, thereby allowing the percentage of the first and second laser beams which impinge upon the first member to be adjusted.

49. The apparatus of claim 48, wherein the means for separating the first and second laser beams is a first dichroic mirror, and the means for combining the attenuated first and second laser beams is a second dichroic mirror.

50. The apparatus of claim 43, wherein the laser beams are simultaneously directed at the first member while the first member has high absorption of energy from the second laser beam.

51. The apparatus of claim 43, wherein the first laser beam fails to melt the first member.