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Method of making a solid state electromagnetic radiation detector

  • US 5,273,910 A
  • Filed: 05/05/1992
  • Issued: 12/28/1993
  • Est. Priority Date: 08/08/1990
  • Status: Expired due to Fees
First Claim
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1. A method of making a solid state detector for detecting electromagnetic energy, comprising the steps of:

  • (a) depositing a plurality of field effect transistors onto a substrate to form an array, wherein each of the field effect transistors has a gate electrode, and wherein a portion of the substrate contiguous to the field effect transistors is an insulating material;

    (b) depositing a planarization layer over the array of field effect transistors, wherein the planarization layer is formed from an insulating material, and wherein the planarization layer has a planarized upper surface;

    (c) depositing an energy sensitive layer onto the planarization layer, wherein the energy sensitive layer has an additional capacitance;

    (d) depositing a plurality of bottom electrodes interposed between the planarization layer and the energy sensitive layer, wherein each bottom electrode is electrically coupled to the gate electrode of a single field effect transistor;

    (e) depositing a top electrode layer onto the energy sensitive layer; and

    (f) depositing circuitry means for providing electronic read-out from each field effect transistor of the array.

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