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Rotation rate sensor

  • US 5,275,047 A
  • Filed: 09/12/1991
  • Issued: 01/04/1994
  • Est. Priority Date: 10/13/1990
  • Status: Expired due to Term
First Claim
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1. Rotation rate sensor with a multi-layer sensor element having first and second layers (10, 21), whereinsaid first layer (10) defines a generally planar carrier having two mutually parallel major surfaces,at least one oscillatory body (13) is formed in said first layer, said body being formed as a seismic mass suspended from said planar carrier (10),said oscillatory body is capable of oscillation (1) in at least a first oscillation direction (1) oriented parallel to said major surfaces of said planar carrier (10),said oscillatory body (13) is supported from the carrier (10) on at least one side by support rods (14);

  • said second layer defines at least one acceleration-sensitive structural element (21) supported (23) on a surface of said at least one oscillatory body (13), said oscillatory body surface being oriented parallel to said major surfaces of said carrier (10);

    said at least one structural element (21) is deflectable (2) perpendicular to said major surfaces of said carrier (10); and

    further comprising capacitive or piezoresistive detecting means (17, 181;

    21,

         182) for detecting Coriolis force deflections (2), perpendicular to said carrier major surfaces, of said at least one structural element (21) formed from said second layer.

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