Rotation rate sensor
First Claim
1. Rotation rate sensor with a multi-layer sensor element having first and second layers (10, 21), whereinsaid first layer (10) defines a generally planar carrier having two mutually parallel major surfaces,at least one oscillatory body (13) is formed in said first layer, said body being formed as a seismic mass suspended from said planar carrier (10),said oscillatory body is capable of oscillation (1) in at least a first oscillation direction (1) oriented parallel to said major surfaces of said planar carrier (10),said oscillatory body (13) is supported from the carrier (10) on at least one side by support rods (14);
- said second layer defines at least one acceleration-sensitive structural element (21) supported (23) on a surface of said at least one oscillatory body (13), said oscillatory body surface being oriented parallel to said major surfaces of said carrier (10);
said at least one structural element (21) is deflectable (2) perpendicular to said major surfaces of said carrier (10); and
further comprising capacitive or piezoresistive detecting means (17, 181;
21,
182) for detecting Coriolis force deflections (2), perpendicular to said carrier major surfaces, of said at least one structural element (21) formed from said second layer.
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Abstract
A rotation rate sensor has a multi-layer structure, with an oscillatory body (13) formed in one carrier layer (10). The body can be stimulated to oscillate in a first oscillation direction (1). On top of this body (13), a further structural element (21), which is deflectable normal to the major surface of the carrier (10) and which serves to detect Coriolis acceleration, is located. There is a device for capacitive or piezo-resistive measurement of the deflection of the structural element. Preferably, the entire structure is fabricated from a silicon wafer, so that the measurement device can be integrated onto the sensor element.
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Citations
12 Claims
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1. Rotation rate sensor with a multi-layer sensor element having first and second layers (10, 21), wherein
said first layer (10) defines a generally planar carrier having two mutually parallel major surfaces, at least one oscillatory body (13) is formed in said first layer, said body being formed as a seismic mass suspended from said planar carrier (10), said oscillatory body is capable of oscillation (1) in at least a first oscillation direction (1) oriented parallel to said major surfaces of said planar carrier (10), said oscillatory body (13) is supported from the carrier (10) on at least one side by support rods (14); -
said second layer defines at least one acceleration-sensitive structural element (21) supported (23) on a surface of said at least one oscillatory body (13), said oscillatory body surface being oriented parallel to said major surfaces of said carrier (10); said at least one structural element (21) is deflectable (2) perpendicular to said major surfaces of said carrier (10); and further comprising capacitive or piezoresistive detecting means (17, 181;
21,
182) for detecting Coriolis force deflections (2), perpendicular to said carrier major surfaces, of said at least one structural element (21) formed from said second layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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Specification
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- Resources
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Current AssigneeRobert Bosch GmbH
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Original AssigneeRobert Bosch GmbH
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InventorsMarek, Jiri, Zabler, Erich
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Primary Examiner(s)CHAPMAN JR, JOHN E
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Application NumberUS07/758,746Time in Patent Office845 DaysField of Search73/505, 73/510US Class Current73/504.12CPC Class CodesG01C 19/5755 the devices having a single...
