Valve closure mechanism for semiconductor deposition apparatus

• US 5,275,303 A
• Filed: 02/03/1992
• Issued: 01/04/1994
• Est. Priority Date: 02/03/1992
• Status: Expired due to Fees

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Szalai, Laszlo
• Primary Examiner(s): Shoap, Allan N.
• Assistant Examiner(s): CRONIN, STEPHEN K
• Application Number:
  US07/830,809
• Time in Patent Office: 701 Days
• Field of Search: 220/263, 220/264, 220/211, 220/342, 220/343, 220/344, 220/260, 49/340, 49/344
• US Class Current: 220/264
• CPC Class Codes: E05F 15/53 for swinging wings
• CPC Class Codes: F16K 1/2007 specially adapted operating means therefor operating means per se F16K31/00
• CPC Class Codes: F16K 1/205 the sealing being arranged on the valve member
• CPC Class Codes: F16K 1/2078 Sealing means for the axis of rotation

Abstract

This invention provides a closure means for an aperture in a semiconductor deposition furnace, the closure means including an aperture cover plate; at least one articulated linkage including at least two arms, the arms being pivotally mounted with respect to each other to define an angle between them such that variation of the angle causes the plate to move between an aperture closing position and an open position in which the plate is clear of the aperture; and an actuator for driving the articulated linkage and for locking the plate in the aperture closing position. The articulated linkage is in the form of a first arm connected to the cover plate, and a second arm for transferring motive force from the actuator to the first arm. As the plate is moved from its open position to its aperture closing position, the angle between the first and second arms changes from a relatively small angle to a relatively large angle.

Claims

1. A means for closing an aperture formed through a wall comprising:

an aperture cover plate;

at least one articulated linkage for moving the cover plate between an open position and an aperture closing position, each of said at least one linkage including at least a first member attached to the plate and a second member for pivotally mounting relative to the wall in which the aperture is formed, the members furthermore being pivotally attached with respect to each other to define an angle between them such that increasing the angle causes the plate to move between said aperture closing position and said open position whereby, when the cover plate is in the aperture closing position, said angle between the first and second members, is greater than one hundred and eighty degrees; and

actuating means for driving said articulated linkage.

2. A means for closing according to claim 1 wherein said actuating means is adapted to rotate said second member in a plane normal to the axis of its pivotal attachment to said first member.

3. A means for closing according to claim 1, further comprising means for releasably locking the cover plate in the aperture closing position.

4. A means for closing according to claim 3 wherein the cover plate further comprises a means for pivotally mounting the plate onto the wall through which the aperture is formed.

5. A means for closing according to claim 4 wherein said actuating means is adapted to rotate said second member in a plane normal to the axis of its pivotal attachment to said first member.

6. A means for closing according to claim 4 wherein the angle between the first and second members becomes smaller as the plate is moved from the closed position to the open position.

7. A means for closing according to claim 6 wherein said actuating means is adapted to rotate said second member in a plane normal to the axis of its pivotal attachment to said first member.

8. A means for closing according to claim 4 wherein the first and second members lock into an over-centered position, when the plate is in the aperture closing position.

9. A means for closing according to claim 8 wherein said actuating means is adapted to rotate said second member in a plane normal to the axis of its pivotal attachment to said first member.

10. A means for closing according to claim 8 wherein the actuating means is a linear actuator having a maximum and minimum throw and at least one of said maximum and minimum throws corresponds to the over-centered configuration of said articulated linkage.

11. A means for closing according to claim 10 wherein said actuating means is adapted to rotate said second member in a plane normal to the axis of its pivotal attachment to said first member.

12. A means for closing according to claim 10 wherein the cover plate includes means for resiliently biasing the cover plate away from the aperture closing position.

13. A means for closing according to claim 12 wherein said actuating means is adapted to rotate said second member in a plane normal to the axis of its pivotal attachment to said first member.

14. A means for closing according to claim 12, wherein the means for resiliently biasing includes a seal for engaging the chamber wall and for providing a seal about the aperture.

15. A means for closing according to claim 14 wherein said actuating means is adapted to rotate said second member in a plane normal to the axis of its pivotal attachment to said first member.

16. A means for closing according to claim 14 wherein the seal is in the form of at least one O-ring.

17. A semiconductor substrate processing apparatus comprising:

(i) a reactor including at least one wall defining a substrate processing chamber;

(ii) an aperture formed through one of the at least one wall;

(iii) an aperture cover plate;

(iv) at least one articulated linkage for moving the cover plate between an open position and an aperture closing position, each of said at least one linkage including at least a first member attached to the plate and a second member pivotably mounted relative to the wall in which the aperture is formed, the members furthermore being pivotally attached with respect to each other to define an angle between them such that increasing the angle causes the plate to move between said open position and said aperture closing position, and whereby when the cover plate is in the aperture closing position, the angle between the first and second members, is greater than one hundred and eighty degrees; and

(v) actuating means for driving said articulated linkage.

18. A semiconductor substrate processing apparatus according to claim 17, further comprising biasing means for biasing the cover plate away from the aperture closing position when the plate is in said closing position.

19. A semiconductor substrate processing apparatus according to claim 18, wherein the actuating means and the articulated linkage co-operate to releasably lock the cover plate in the aperture closing position.

20. A semiconductor substrate processing apparatus according to claim 19, wherein the biasing means includes a seal for engaging the chamber wall and for providing a seal about the aperture.

21. A semiconductor substrate processing apparatus according to claim 20, wherein the first and second members lock into an over-centered position when the plate is in the aperture closing position.

22. A semiconductor substrate processing apparatus according to claim 21, wherein the cover plate is pivotally mounted onto the wall through which said aperture is formed.