Secondary-ion mass spectrometry apparatus using field limiting method
First Claim
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1. A secondary-ion mass spectrometry apparatus using a field limiting method, comprising:
- an optical system for primary ions for converging primary ion emitted from an ion source as a primary ion beam to irradiate a sample with the primary ion beam;
a sample chamber for accommodating said sample irradiated with the primary ion beam from said optical system for primary ions, said sample chamber including electron spray means for effecting a spray of electrons onto said sample;
an optical system for secondary ions including an optical imaging system for imaging secondary ions emitted from said sample by irradiation thereof with the primary ion beam, an exit slit for passing therethrough only secondary ions emitted from a predetermined secondary ion emitting area on said sample, an electric sector for energy-separating secondary ions passed through said exit slit and a β
slit for passing there-through those ones of the secondary ions energy-separated by said electric sector which have a predetermined energy;
displaying means for displaying a sample image field-limited by said exit slit on the basis of secondary ions captured by said β
slit;
a magnetic sector for analyzing secondary ions passed through said β
slit; and
means for adjusting the electron spray means while displaying said sample image.
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Abstract
A secondary-ion mass spectrometry apparatus using a field limiting method includes an optical system for primary ions, a sample chamber, and an optical system for secondary ions, and a total ion monitor (TIM) interposed between an electric sector and a magnetic sector of the optical system for secondary ions. A field-limited image (or TIM image) from the TIM can be observed or monitored continually by a CRT, thereby making it possible to grasp quantitatively the charging state of a sample surface. The apparatus may further include an adjuster for adjusting quantatively the charging state of the sample surface.
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10 Claims
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1. A secondary-ion mass spectrometry apparatus using a field limiting method, comprising:
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an optical system for primary ions for converging primary ion emitted from an ion source as a primary ion beam to irradiate a sample with the primary ion beam; a sample chamber for accommodating said sample irradiated with the primary ion beam from said optical system for primary ions, said sample chamber including electron spray means for effecting a spray of electrons onto said sample; an optical system for secondary ions including an optical imaging system for imaging secondary ions emitted from said sample by irradiation thereof with the primary ion beam, an exit slit for passing therethrough only secondary ions emitted from a predetermined secondary ion emitting area on said sample, an electric sector for energy-separating secondary ions passed through said exit slit and a β
slit for passing there-through those ones of the secondary ions energy-separated by said electric sector which have a predetermined energy;displaying means for displaying a sample image field-limited by said exit slit on the basis of secondary ions captured by said β
slit;a magnetic sector for analyzing secondary ions passed through said β
slit; andmeans for adjusting the electron spray means while displaying said sample image. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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Current AssigneeHitachi Instruments Engineering Company Limited, Hitachi, Ltd.
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Original AssigneeHitachi Instruments Engineering Company Limited, Hitachi, Ltd.
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InventorsTamura, Hifumi, Sumiya, Hiroyuki, Ikebe, Yoshinori, Furuki, Akemi
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Primary Examiner(s)Anderson, Bruce C.
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Application NumberUS07/873,173Time in Patent Office627 DaysField of Search250/251, 250/309, 250/296US Class Current850/9CPC Class CodesG01N 23/2258 Measuring secondary ion emi...H01J 2237/004 Charge control of objects o...H01J 2237/2527 Ions [SIMS]H01J 37/256 using scanning beamsH01J 49/142 using a solid target which ...
