Electrically erasable and programmable read-only memory with source and drain regions along sidewalls of a trench structure
First Claim
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1. A nonvolatile storage device comprising:
- a substrate;
at least a first trench and a second trench extending partially into the substrate, each trench having at least one vertical wall;
at least one stacked poly-dielectric gate structure formed on the substrate and disposed between the trenches, the gate structure having a first side and a second side;
a first spacer disposed on the first side of the gate structure and a second spacer disposed on the second side of the gate structure;
a first doped area of a first conductivity type under the first spacer and formed along at least part of a wall of the first trench;
a second doped area of a first conductivity type under the second spacer and formed along at least part of a wall of the second trench; and
the first doped area and the second doped area having heights greater than widths, the heights being measured parallel to the trench walls and the widths being measured perpendicular thereto.
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Abstract
A nonvolatile storage device is provided with at least one stacked poly gate structure formed on the substrate and disposed between a first trench and a second trench. The trenches each having two walls. A first doped area having a first conductivity type extending along the wall of the first trench and a second doped area having a second conductivity type extending along the wall of the second trench. The first doped area and the second doped area having heights greater than widths, the heights being parallel to the trench walls and the widths being perpendicular thereto. The trench walls are lined with a metal silicide to decrease resistivity.
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Citations
12 Claims
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1. A nonvolatile storage device comprising:
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a substrate; at least a first trench and a second trench extending partially into the substrate, each trench having at least one vertical wall; at least one stacked poly-dielectric gate structure formed on the substrate and disposed between the trenches, the gate structure having a first side and a second side; a first spacer disposed on the first side of the gate structure and a second spacer disposed on the second side of the gate structure; a first doped area of a first conductivity type under the first spacer and formed along at least part of a wall of the first trench; a second doped area of a first conductivity type under the second spacer and formed along at least part of a wall of the second trench; and the first doped area and the second doped area having heights greater than widths, the heights being measured parallel to the trench walls and the widths being measured perpendicular thereto. - View Dependent Claims (2, 3, 4, 5)
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6. A nonvolatile storage device comprising:
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a substrate; a plurality of parallel trenches extending partially through the substrate; each trench having a first sidewall and a second sidewall and at least a first doped area traversing one sidewall of the trench without a conductive layer electrically coupling the first sidewall and the second sidewall, each sidewall defining one bitline; an array of rows and columns of stacked poly gate structures formed on the substrate, each column separating two of the trenches; the doped areas having heights greater than widths, the heights being parallel to the trench sidewalls and the widths being perpendicular thereto. - View Dependent Claims (7, 8, 9, 10, 11)
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12. A nonvolatile storage device comprising:
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a substrate; at least a first trench and a second trench extending partially into the substrate, each trench having at least one wall; at least one stacked poly-dielectric gate structure formed on the substrate and disposed between the trenches, the gate structure having a first side and a second side; a first spacer disposed on the first side of the gate structure and a second spacer disposed on the second side of the gate structure; a first doped area of a first conductivity type under the first spacer and formed at least partially within and along at least part of a wall of the first trench; a second doped area of a first conductivity type under the second spacer and formed at least partially within and along at least part of a wall of the second trench; the first doped area and the second doped area having heights greater than widths, the heights being measured parallel to the trench sidewalls and the widths being measured perpendicular thereto.
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Specification