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Integrated-optic waveguide devices and method

  • US 5,278,925 A
  • Filed: 04/13/1993
  • Issued: 01/11/1994
  • Est. Priority Date: 03/28/1991
  • Status: Expired due to Term
First Claim
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1. An integrated-optic device comprising:

  • a. a lower cladding layer;

    b. at least one electrode located under or upon a portion of said lower cladding so as to electrostatically deflect a membrane;

    c. a core layer of material with a higher index of refraction than said lower cladding upon said lower cladding;

    d. an upper cladding layer with a lower index of refraction than said core layer formed upon said core layer, said upper cladding being selectively removable; and

    e. a metal layer upon said upper cladding layer, wherein said metal layer has access holes for said selected removal of said upper cladding layer, said metal layer only supported at the edges.

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