Plasma reactor for processing substrates comprising means for inducing electron cyclotron resonance (ECR) and ion cyclotron resonance (ICR) conditions

• US 5,279,669 A
• Filed: 12/13/1991
• Issued: 01/18/1994
• Est. Priority Date: 12/13/1991
• Status: Expired due to Fees

• Current Assignee: International Business Machines Corporation
• Original Assignee: International Business Machines Corporation
• Inventors: Lee, Young H.
• Primary Examiner(s): Hearn, Brian E.
• Assistant Examiner(s): BASKIN, JONATHAN
• Application Number:
  US07/806,504
• Time in Patent Office: 767 Days
• Field of Search: 118/723, 156/345, 315/111.21, 315/111.41, 204/298.38, 204/298.34, 204/298.37, 204/298.16
• US Class Current: 118/723.0MR
• CPC Class Codes: B01J 19/126 Microwaves
• CPC Class Codes: B01J 19/129 Radiofrequency
• CPC Class Codes: B01J 2219/0894 Processes carried out in the presence of a plasma
• CPC Class Codes: H01J 37/321 the radio frequency energy being inductively coupled to the plasma
• CPC Class Codes: H01J 37/32192 Microwave generated discharge H01J37/32357, H01J37/32366, H01J37/32394, H01J37/32403 take precedence
• CPC Class Codes: H01J 37/32587 Triode systems
• CPC Class Codes: H01J 37/32596 Hollow cathodes
• CPC Class Codes: H01J 37/32678 Electron cyclotron resonance

Abstract

A plasma reactor for forming a dense plasma from a gas is described incorporating a housing, a gas inlet to the housing, a pump for evacuating the housing, a magnetic coil to generate a magnetic field in the housing, a radio frequency power supply, an electrode or induction coil in the housing, a microwave power supply. The invention overcomes the problem of an upper plasma density limit independent of increases in microwave power by inducing electron cyclotron resonance (ECR) and ion cyclotron resonance (ICR) conditions.

Claims

1. An apparatus for forming a dense plasma from a gas at low pressure comprising:

a housing for holding said gas and said dense plasma to be formed,

first means for admitting one or more gas species into said housing to form said gas,

second means for evacuating said housing to a predetermined low pressure,

third means for generating a magnetic field along a first axis in a first region within said housing,

fourth means for applying first radio frequency along a second axis to said gas and dense plasma in said first region, and

fifth means for applying microwave power along a third axis to said gas and dense plasma in said first region, whereby electrons are excited to electron cyclotron resonance (ECR) in said first region,

said fourth means includes sixth means for determining the frequency of said first radio frequency power as a function of the magnetic field and one of said gas species whereby ion cyclotron resonance (ICR) is obtained of said ions of said gas specie in said plasma.

2. The apparatus of claim 1 wherein said fourth means includes a first electrode of nonmagnetic material positioned in said first region, and

a second electrode of nonmagnetic material positioned in gaseous communication with said first region.

3. The apparatus of claim 2 wherein said first and second electrodes are coupled across said fourth means for applying said first radio frequency power.

4. The apparatus of claim 2 wherein said first electrode has inner sidewall surfaces of predetermined material whereby said material on said inner sidewall surfaces may be used for deposition on a substrate.

5. The apparatus of claim 4 wherein said substrate is positioned between said first and second electrode.

6. The apparatus of claim 2 further including seventh means for applying second radio frequency power to said second electrode.

7. The apparatus of claim 2 wherein said first electrode includes cylindrical inner sidewalls concentric with said first axis.

8. The apparatus of claim 2 wherein said second electrode is positioned outside said first region.

9. The apparatus of claim 1 wherein said second means includes seventh means for evacuating said housing below 1 m Torr.

10. The apparatus of claim 1 wherein said third means includes seventh means for generating said magnetic field in the range from 1170 to 1430 gauss.

11. The apparatus of claim 1 wherein said fourth means includes seventh means for applying said first radio frequency power at a frequency in the range from 0.1 to 100 MHz.

12. The apparatus of claim 1 wherein said fourth means includes seventh means for applying said first radio frequency power in the range from 10 to 500 watts.

13. The apparatus of claim 1 wherein said fourth means includes seventh means for applying said first radio frequency power to said plasma in the range from 0.01 w/cm³ to 0.63 w/cm³.

14. The apparatus of claim 1 further including an extraction grid positioned adjacent said first region adapted for coupling to a voltage for removing ions from said first region in response to said voltage.

15. The apparatus of claim 14 wherein said extraction grid includes a conductive plate having an upper and lower surface and having holes therein for passing ions there through.

16. The apparatus of claim 15 wherein said holes in said conductive plate have a longitudinal axis passing through said plate at a predetermined angle with respect to said upper surface.

17. The apparatus of claim 16 wherein said holes are cylindrical having a diameter in the range from 1000 Å

to 0.051 cm (0.020 inch).

18. The apparatus of claim 16 wherein said plate has a thickness in the range from 0.1 cm (0.04 inch) to 0.5 cm (0.2 inch).

19. The apparatus of claim 1 wherein said fourth means includes an induction coil positioned around said first region.

20. The apparatus of claim 19 further including an extraction grid positioned adjacent said first region adapted for coupling to a voltage for removing ions from said first region in response to said voltage.