Radio frequency induction plasma processing system utilizing a uniform field coil

• US 5,280,154 A
• Filed: 01/30/1992
• Issued: 01/18/1994
• Est. Priority Date: 01/30/1992
• Status: Expired due to Fees

• Current Assignee: International Business Machines Corporation
• Original Assignee: International Business Machines Corporation
• Inventors: Guarnieri, Charles R., Hopwood, Jeffrey A., Cuomo, Jerome J., Whitehair, Stanley J.
• Primary Examiner(s): Paschall, Mark H.
• Application Number:
  US07/828,060
• Time in Patent Office: 719 Days
• Field of Search: 219/121.4, 219/121.43, 219/121.36, 156/646, 156/643, 156/345, 204/298.2, 204/298.19, 204/298.37
• US Class Current: 219/121.52
• CPC Class Codes: H01J 37/321 the radio frequency energy being inductively coupled to the plasma

Abstract

A plasma processing apparatus comprising: a chamber for supporting a workpiece; an inlet for introducing a gas into the chamber; a coil of conductive material having a generally flattened configuration whereby to provide a at least one generally planar surface defined by parallel conductors disposed on the chamber; and apparatus for applying radio frequency energy to the coil.

Claims

1. A plasma processing apparatus comprising:

a chamber for supporting a workpiece;

means for introducing a gas into said chamber;

a coil of conductive material disposed on said chamber and including at least one generally flattened surface defined by straight parallel conductors, said generally flattened surface positioned to overlie and be generally parallel to said workpiece when said workpiece is supported in said chamber; and

means for applying radio frequency energy to said coil.

2. The apparatus of claim 1 wherein said coil is comprised of generally flat, strap-like material.

3. The apparatus of claim 1 wherein said coil includes a second flattened surface defined by parallel conductors and disposed generally parallel to the first flattened surface.

4. The apparatus of claim 3 wherein the conductors defining the first surface of said coil are generally parallel to the conductors defining the second surface of the coil.

5. The apparatus of claim 3 wherein the conductors defining the first and second surfaces of said coil are generally helical in configuration.

6. The apparatus of claim 3 and further including:

a second coil having a generally flattened configuration whereby to provide a second pair of opposing, generally planar surfaces, said second coil positioned closely spaced to said first coil with the conductors defining said second coil generally at a ninety degree angle to the conductors defining said first coil; and

means for providing RF energy to each of said first and second coils whereby to generate a rotating electromagnetic field.

7. The apparatus of claim 1 wherein said means for applying radio frequency energy to said coil includes:

a source for generating said radio frequency energy; and

an electrical circuit for coupling said radio frequency energy to said coil.

8. The plasma processing apparatus of claim 1 wherein the shape of said generally flattened surface of said coil is selected to match the shape of said workpiece.

9. A method of operating a plasma processing apparatus, said apparatus comprising a chamber for supporting a workpiece in a controlled pressure environment, and means for introducing a gas into said chamber, said method comprising the steps of:

placing a coil of conductive material, said coil including at least one generally flattened surface defined by straight parallel conductors, onto said chamber such that said generally flattened surface is positioned to overlie and be parallel to said workpiece when said workpiece is supported in said chamber; and

applying radio frequency energy to said coil.

10. The method of claim 9 wherein said coil is comprised of generally flat, strap-like material.

11. The method of claim 10 and further including the steps of:

placing a second coil, said second coil having at least one generally flattened surface defined by parallel conductors, closely spaced to said first coil with the conductors defining said flattened surface of said second coil generally at a ninety degree angle to the conductors defining said flattened surface of said first coil; and

applying RF energy to each of said first and second coils whereby to generate a rotating electromagnetic field.

12. The method of claim 9 wherein the shape of said generally flattened surface of said coil is selected to match the shape of said workpiece.