Dewall plating technique
First Claim
1. A circuit means in an integrated circuit fabricated on a semiconductor substrate, comprising:
- signal transmission means, extending from the substrate, for transmitting signals; and
ground line means separated from said signal transmission means;
wherein at least one of said transmission means and said ground line means has a cross-sectional shape including a rectangular portion, the vertical size of which is longer than the horizontal size thereof.
2 Assignments
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Accused Products
Abstract
A new design concept is presented and demonstrated for the fabrication of active and passive components in integrated circuit (IC) devices for microwave signal transmission. High circuit packing density is desirable but the current configurations of the conventional flat strip type conductors present physical limitations to achieving such an objective. The new conductor configuration not only overcomes such circuit packing problems of the conventional line design, but provides additional improvements in performance parameters, such as lower circuit resistance and lower parasitic interactions; an ability to fabricate circuits to design specifications and to improve reliability at low cost. The new concept has been applied to the fabrication of transmission lines, capacitors, inductors, air bridges and to formulating the fabrication steps for a FET. Polyimide film enables an improved fabrication step to be performed in the invention, and a new processing technique for polyimide material has also been demonstrated.
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Citations
8 Claims
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1. A circuit means in an integrated circuit fabricated on a semiconductor substrate, comprising:
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signal transmission means, extending from the substrate, for transmitting signals; and ground line means separated from said signal transmission means; wherein at least one of said transmission means and said ground line means has a cross-sectional shape including a rectangular portion, the vertical size of which is longer than the horizontal size thereof. - View Dependent Claims (2, 3, 4)
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5. A spiral inductive line element comprising a vertical strip of a rectangular cross sectional shape formed on a horizontal insulating substrate material, wherein said line element is in contact with the substrate material locally in spots to support remaining portions of the line element above the substrate material and said line element has a cross-sectional shape of one of an I, a T, an L, a U, and an inverted L.
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6. A inductive line of a vertical rectangular cross sectional shape, having a width and a depth;
- said inductive line comprising;
an inner terminal end adapted for use as a lead-in terminal and a spiral central line element, wherein; (a) said inner terminal end is formed on an horizontal insulating substrate material wherein the width of the inner terminal is widest at an outer section, and becomes narrower toward an innermost portion of said inner terminal; and (b) said inductive line element is formed on a plane distally separated from the substrate material. - View Dependent Claims (7, 8)
- said inductive line comprising;
Specification