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Method and system for selective removal of material coating from a substrate using a flashlamp

  • US 5,281,798 A
  • Filed: 12/24/1991
  • Issued: 01/25/1994
  • Est. Priority Date: 12/24/1991
  • Status: Expired due to Fees
First Claim
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1. A method for the selective removal of a material from a structure, comprising the steps of:

  • (1) irradiating a target area of a structure having at least one layer of material formed on a substrate with a pulse of incident radiant energy generated by a flashlamp, said pulse of radiant energy having an intensity sufficient to ablate said layer of material;

    (2) monitoring radiant energy from said flashlamp that is reflected from said target area in order to sense the presence of a prescribed color intensity different from a known color intensity of the layer of material being ablated; and

    (3) controlling the irradiation of the target area with said radiant energy in step (1) as a function of the color intensity sensed in step (2).

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