Method of making semiconductor device using a trimmable thin-film resistor

• US 5,284,794 A
• Filed: 10/13/1992
• Issued: 02/08/1994
• Est. Priority Date: 02/21/1990
• Status: Expired due to Term

• Current Assignee: Nippondenso Co., Ltd. (DENSO Corporation)
• Original Assignee: Nippondenso Co., Ltd. (DENSO Corporation)
• Inventors: Saito, Masami, Kajiura, Keizou, Iida, Makio, Miura, Shoji, Isobe, Yoshihiko, Suzuki, Mikimasa
• Primary Examiner(s): Hearn, Brian E.
• Assistant Examiner(s): Fleck, Linda J.
• Application Number:
  US07/960,298
• Time in Patent Office: 483 Days
• Field of Search: 357/51, 437/173, 437/195, 437/192, 437/922, 437/979, 437/918, 148/DIG. 136
• US Class Current: 438/385
• CPC Class Codes: H01L 28/24 with an active material comprising a refractory, transition or noble metal, metal compound or metal alloy, e.g. silicides, oxides, nitrides
• CPC Class Codes: H01L 28/40 Capacitors
• CPC Class Codes: Y10S 148/055 Fuse
• CPC Class Codes: Y10S 148/136 Resistors
• CPC Class Codes: Y10S 438/94 Laser ablative material removal

Abstract

A semiconductor device has a thin-film resistor trimmed by laser. The semiconductor device comprises a semiconductor substrate having an element region that covers at least part of the surface of the semiconductor substrate, a first insulation film disposed on the surface of the semiconductor substrate, and a second insulation film disposed on the surface of the semiconductor substrate through an opening of the first insulation film. The opening is formed by selectively removing at least part of the first insulation film at a location on the surface of the semiconductor substrate where the element region is not involved. The thin-film resistor is formed on the second insulation film.

Claims

1. A method of producing a semiconductor device, comprising the steps of:

forming a first insulation film on the surface of a semiconductor substrate;

selectively removing the first insulation film and forming a second insulation film on the surface of the semiconductor substrate, the thickness of the second insulation film being thinner than that of the first insulation film;

forming a thin-film resistor on the surface of the second insulation film;

forming a passivation film on the surface of the thin-film resistor; and

trimming the thin-film resistor by laser, thereby setting a resistance value of the thin-film resistor.

2. A method as set forth in claim 1, wherein proper semiconductor elements are formed on the surface of the semiconductor substrate in advance.

3. A method as set forth in claim 1, wherein said thin-film resistor is mainly made of Cr-Si or Ni-Cr.

4. A method as set forth in claim 1, wherein said second insulation film is a thermally-oxidized film.

5. A method as set forth in claim 1, wherein the thickness of said second insulation film is in a range from 0.1 to 0.3 micrometer.

6. A method as set forth in claim 1, wherein the thickness of said second insulation film is 0.2 plus or minus 0.02 micrometer.

7. A method as set forth in claim 1, wherein said second insulation film is formed according to a wet oxidation method.

8. A method as set forth in claim 1, wherein a wavelength of the laser used for trimming the thin-film resistor is in a range from 1.047 to 1.06 micrometers.

9. A method as set forth in claim 1, wherein the laser is a YAG pulse laser or a YLF pulse laser.