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Vacuum-sealed silicon incandescent light

  • US 5,285,131 A
  • Filed: 12/03/1990
  • Issued: 02/08/1994
  • Est. Priority Date: 12/03/1990
  • Status: Expired due to Fees
First Claim
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1. A microlamp, comprising:

  • a substrate;

    a cavity formed in said substrate;

    a polysilicon filament coated with a protective layer disposed in said cavity; and

    a window means for vacuum sealing said cavity wherein radiation emitted by said filament is visible through said window means.

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