Coordinate-measuring machine for non-contact measurement of objects

• US 5,285,397 A
• Filed: 11/21/1990
• Issued: 02/08/1994
• Est. Priority Date: 12/13/1989
• Status: Expired due to Fees

• Current Assignee: Carl-Zeiss-Stiftung
• Original Assignee: Carl-Zeiss-Stiftung
• Inventors: Koch, Klaus-Peter, Breyer, Karl-Hermann, Heier, Helmut
• Primary Examiner(s): Harvey, Jack B.
• Assistant Examiner(s): Wachsman, Hal D.
• Application Number:
  US07/616,627
• Time in Patent Office: 1,175 Days
• Field of Search: 364/559, 364/525, 364/560, 364/713, 358/107, 358/108, 358/106, 358/109, 33/503, 33/504, 356/1, 356/375, 367/907, 340/712
• US Class Current: 702/167
• CPC Class Codes: G01B 11/002 for measuring two or more coordinates
• CPC Class Codes: G01B 11/024 by means of diode-array scanning
• CPC Class Codes: Y10S 367/907 Coordinate determination

Abstract

A plurality of video cameras (7a-d) are mounted on a table which is adapted support a workpiece or other object to be measured, and the mounting of each camera to the table provides for controlled universal orientation of each camera via an articulating head having provision for selective rotation about each of two orthogonally related axes. The table is provided with vibration damping, whereby both the measured object, and the cameras which provide triangulation data for each measurement, can operate from the same rigid base, isolated from external sources of mechanical shock. The video signals of the cameras are fed, along with instantaneous optical-axis orientation data for each camera, to the computer of a coordinate-measuring machine. The computer relies upon stored calibration data and angular-position data sensed about each of the rotary axes of the articulating heads to derive the orientation data; and the computer additionally relies on video-image analysis to calculate the coordinates of each measured point on the object.

Claims

1. A coordinate-measuring machine for the contactless measurement of objects, wherein a plurality of cameras (7;

27) are mounted to motor-driven articulating heads with angular-position transmitters (6;

26) for each of two orthogonal axes of joint articulation and are arranged a distance apart from each other alongside the object, and wherein the cameras produce video signals which, together with angular-position output data of the transmitters (7;

27), are fed to a computer (10) for determination of the coordinate values of measurement points, said coordinate-measuring machine having an image-processing device (11) with associated storage means (29) having capacity to store a plurality of images for each of the cameras (7a-c), the motor-driven articulating heads (6;

26) being installed with the cameras (7;

27) on a table (1;

21) which is adapted for supporting an object (3;

23) to be measured, and vibration-damping means (4;

24) for said table.

2. A coordinate-measuring machine according to claim 1, wherein the articulating heads (26) are mounted on individual vertically adjustable columns (28) that are fixed to said table.

3. A coordinate-measuring machine according to claim 1, wherein each of the articulating heads (6) has a mount-receiving plate (16) and each of said cameras (7) is provided with a suitable mount (14) and is replaceably mounted to a mount-receiving plate (16) of a different one of the articulating heads (6).

4. A coordinate-measuring machine according to claim 3, wherein one or more sighting-mark projectors (17) are provided with a suitable mount (14) which can be replaceably mounted instead of a camera (7a) to the mount-receiving plate (16).

5. A coordinate-measuring machine according to claim 1, wherein a turntable (22) is integrated in the workpiece table (21) for rotation about a vertical axis with measurement means for sensing instantaneous rotary position of the turntable about such axis, and sensed rotary-position data of the measurement means are also fed to the computer (10).

6. A coordinate-measuring machine according to claim 1, wherein a plurality of calibrating bodies (29a-c) are arranged on the table (21) in the image field of the cameras (26a, b).

7. A coordinate-measuring machine according to claim 1, wherein the computer (10) has means (19) for storage of calibration values descriptive of axis location of the articulating heads (6a-c) and of the optical-axis location of the cameras (7a-c).

8. A computer-operated multiple-coordinate measuring machine for non-contact measurement of a workpiece comprising a stable rigid horizontal table with vibration-damping means for mounting said table in isolation from external mechanical shock, means on said table for mounting a workpiece to be measured, a plurality of articulating heads mounted to spaced locations on said table;

each articulating head comprising (i) a first or base member fixedly mounted to said table and establishing a first generally vertical axis of rotation, (ii) a second or intermediate member mounted to said base member for motor-driven rotary positioning about said first and establishing a second axis of rotation that is orthogonal to said first axis and therefor contained in a generally horizontal plane, (iii) a third or article-chucking member mounted to said intermediate member for motor-driven rotary positioning about said second axis, and (iv) angle-measuring means associated with each axis of rotation for generating separate electrical signals indicative of instantaneous angular position (a) of said second member about said first axis and (b) of said third member about said second axis;

a video camera chuck-mounted to each article-chucking member such that the optical axis of the camera is orthogonal to said second axis; and

computer means connected to control motor-driven rotary positioning about said axes and to receive electrical signals from said angle-measuring means and from said video cameras for use of said signals to computer coordinates of triangulating video-camera sightings on measurement points of the workpiece, said computer means including an image-analysis device with associated storage means having capacity to store a plurality of images for each of said video cameras.

9. The machine of claim 8, in which a further such articulating head is mounted to said table in spaced relation to two of said articulating heads, and an optical-mark projector having an optical axis of projection, said optical-mark projector being chuck-mounted to the third member of said further articulating head such that the optical-projection axis thereof is orthogonal to the second axis of rotation of said further articulating head, said computer means being additionally connected to control motor-driven rotary positioning about the first and second axes of said further articulating head and to receive electrical signals from the angle-measuring means of said further articulating head.

10. The machine of claim 8, in which the means on said table for mounting the workpiece is a turntable mounted for motor-driven rotary positioning about a vertical axis, angle-measuring means associated with the vertical axis of turntable rotation for generating electrical signals indicative of instantaneous angular position of said turntable, said computer means being additionally connected to control motor-driven turntable rotation and to receive electrical signals from the angle-measuring means associated with the axis of turntable rotation.

11. The machine of claim 8, in which said table establishes a flat rectangular horizontal surface of workpiece support, and said articulating heads are mounted at the four corners of said surface, with intersections of orthogonally related axes positioned above said surface.

12. The machine of claim 11, in which the base member of each articulating head is mounted to an upstanding pedestal at a corner of said surface.

13. The machine of claim 12, in which the height of each upstanding pedestal is adjustable.

19. The machine of claim 8, in which said video camera is one of a plurality of video cameras of different focal length, and in which all of said video cameras have like mounting formations for interchangeable chuck-mounting to each article-chucking member.

14. A computer-operated multiple-coordinate machine for non-contact measurement of a workpiece comprising a stable rigid horizontal table with vibration-damping means for mounting the same in isolation from external mechanical shock, means on said table for mounting a workpiece to be measured, a plurality of video cameras mounted to spaced parts of said table for selective rotary articulation of the optical axis of each camera about two orthogonally related axes which intersect above said table, a separate motor drive for articulation about each of the orthogonally related axes, angle-measuring means associated with each of said orthogonally related axes for generating separate electrical signals indicative of instantaneous angle of relative rotation about each of said orthogonally related axes, and computer means connected to control motor-driven rotary positioning about said orthogonally related axes and to receive electrical signals from said angle-measuring means and from said video cameras for use of said signals to compute coordinates of triangulating video-camera sightings on measurement points on the workpiece, said computer means including an image-analysis device with associated storage means having capacity to store a plurality of images for each of said video cameras.

15. The machine of claim 14, in which the means on said table for mounting the workpiece is a turntable mounted for motor-driven rotary positioning about a vertical axis, angle-measuring means associated with the vertical axis of turntable rotation for generating electrical signals indicative of instantaneous angular position of said turntable, said computer means being additionally connected to control motor-driven turntable rotation and to receive electrical signals from the angle-measuring means associated with the axis of turntable rotation.

16. A computer-operated multiple-coordinate machine for non-contact measurement of a workpiece comprising a stable rigid horizontal table with vibration-damping for mounting the same in isolation from external mechanical shock, means on said table for mounting a workpiece to be measured, a video camera and an optical-mark projector mounted to spaced parts of said table for selective rotary articulation of the respective optical axes of said video camera and of said optical-mark projector about two orthogonally related axes which intersect above said table, a separate motor drive for articulation about each of the orthogonally related axes, angle-measuring means associated with each of said orthogonally related axes for generating separate electrical signals indicative of instantaneous angle of relative rotation about each of said orthogonally related axes, and computer means connected to control motor-driven rotary positioning about said orthogonally related axes and to receive electrical signals from said angle-measuring means and from said video camera for use of said signals to computer coordinates of video-camera sightings on measurement points marked on the workpiece by said optical-mark projector, said computer means including an image-analysis device with associated storage means having capacity to store a plurality of images for each of said video cameras.

17. The machine of claim 16, in which the means on said table for mounting the workpiece is a turntable mounted for motor-driven rotary positioning about a vertical axis, angle-measuring means associated with the vertical axis of turntable rotation for generating electrical signals indicative of instantaneous angular position of said turntable, said computer means being additionally connected to control motor-driven turntable rotation and to receive electrical signals from the angle-measuring means associated with the axis of turntable rotation.

18. The machine of claim 17, in which said video camera and said optical-mark projector are interchangeably mounted to said spaced parts of said table.

20. A computer-operated multiple-coordinate measuring machine for non-contact measurement of a workpiece comprising a stable rigid horizontal table with vibration-damping means for mounting said table in isolation from external mechanical shock, means on said table for mounting a workpiece to be measured, and a plurality of articulating heads mounted to spaced locations on said table;

each articulating head comprising (i) a first or base member fixedly mounted to said table and establishing a first generally vertical axis of rotation, (ii) a second or intermediate member mounted to said base member for motor-driven rotary positioning about said first axis and establishing a second axis of rotation that is orthogonal to said first axis and therefore contained in a generally horizontal plane, (iii) a third or article-chucking member mounted to said intermediate member for motor-driven rotary positioning about said second axis, and (iv) angle-measuring means associated with each axis of rotation for generating separate electrical signals indicative of instantaneous angular position (a) of said second member about said first axis and (b) of said third member about said second axis;

a video camera chuck-mounted to each article-chucking member such that the optical axis of the camera is orthogonal to said second axis; and

computer means connected to control motor-driven rotary positioning about said axes and to receive electrical signals from said angle-measuring means and from said video cameras for use of said signals to computer coordinates of triangulating video-camera sightings on measurement points of the workpiece;

said computer means including control means connected to said articulating heads and providing two angular-coordinate signal values (θ

, φ

) for each of said articulating heads, and image-analysis means including image-storing means connected to the output of each video camera for providing image-coordinate position-measurement values, said computer means being connected to said control means and to said image-analysis means for combining said angular-coordinate signal values and said image-coordinate position-measurement values and for calculating three-dimensional object coordinates from said values.

21. The method of using a computer-operated multiple-coordinate measurement machine (CMM) for non-contact three-dimensional measurement of one or more of a succession of workpieces, wherein (a) the CMM comprises a plurality of like articulating heads at fixed spacing, (b) each articulating head having two orthogonally related axes of rotation with sensors to report instantaneous angular positions about said axes, (c) a video camera for creating images of the workpiece and mounted to each of the articulating heads for two-axis rotary positioning, and (d) an image-analysis device with associated storage having capacity to store a plurality of images for each of the video cameras,

said method comprising the steps of:

(i) recording at least a desired surface of the workpiece, for different angular positions of at least two of the cameras, and storing the images;

(ii) analyzing the images for recorded features which occur simultaneously in the images of the at least two different cameras, and developing image coordinates for at least one recorded feature for images of the two cameras; and

(iii) calculating, from the developed image coordinates and from articulating-head sensor-reported angular-position data, the three-dimensional position coordinates of said at least one feature.

22. The method of claim 21, in which the CMM has provision for stored calibration data including calibration data for coordination of camera viewing-axis orientation as a function of two-axis angular position for each of the articulating heads, as well as an exact installed position for each of the articulating heads, and the stored calibration data are taken into account in the calculation of step (iii).

23. The method of claim 22, in which each camera has an objective lens and the stored calibration data include, for each camera, geometrical deviations of the sensors, as well as image distortion by the objective lens of each camera.

24. The method of claim 21, in which a measurement of the complete workpiece is accomplished by using the video cameras to record all measurement points of interest and by storing only partial images for measurement points of interest.

25. The method of claim 24, in which the calculation process for stored data for a first workpiece is coordinated to take place during an interval in which a measured workpiece is being removed and replaced by a succeeding workpiece to be measured.