Coliolis rate sensor using tunnel-effect displacement sensor
First Claim
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1. An angular rate sensor for deriving a Coriolis acceleration signal comprising:
- Coriolis force sensing means having first and second vibrating tines interconnected with a mounting pad for generating a deflection of said mounting pad in response to an angular rotation of said force sensing means;
sensing circuit means including tunnel-effect sensing means having a first sensing probe disposed on said mounting pad of said Coriolis force sensing means and a second sensing probe disposed at an average predetermined spaced relation from said first sensing probe for detecting said deflection and generating a sensing signal in response to said deflection;
feedback circuit means coupled with said sensing circuit means for receiving said sensing signal and for providing a feedback signal to said Coriolis force sensing element for maintaining said first and second sensing probes at said average predetermined spaced relation; and
output circuit means coupled with said sensing circuit means for receiving said sensing signal and providing an output Coriolis signal indicative of angular rate.
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Abstract
A rate detection system (10) uses a balanced resonant sensor (12) having first and second tines (14,16) interconnected with a mounting pad (20). A sensing circuit (50) including a tunnel effect displacement sensor (38) having a first probe (40) connected to the mounting pad (20) and a second probe (42) connected to a reference pad (32) detects an output signal having a Coriolis component. A feedback circuit provides a compensation signal to the balanced resonant sensor (12).
44 Citations
11 Claims
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1. An angular rate sensor for deriving a Coriolis acceleration signal comprising:
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Coriolis force sensing means having first and second vibrating tines interconnected with a mounting pad for generating a deflection of said mounting pad in response to an angular rotation of said force sensing means; sensing circuit means including tunnel-effect sensing means having a first sensing probe disposed on said mounting pad of said Coriolis force sensing means and a second sensing probe disposed at an average predetermined spaced relation from said first sensing probe for detecting said deflection and generating a sensing signal in response to said deflection; feedback circuit means coupled with said sensing circuit means for receiving said sensing signal and for providing a feedback signal to said Coriolis force sensing element for maintaining said first and second sensing probes at said average predetermined spaced relation; and output circuit means coupled with said sensing circuit means for receiving said sensing signal and providing an output Coriolis signal indicative of angular rate. - View Dependent Claims (2, 3, 4, 5)
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6. A rate detection system for deriving a Coriolis acceleration signal comprising:
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oscillator circuit means for providing a predetermined frequency signal; balanced resonant sensing means including first and second tines mechanically connected with a mounting pad, said first and second tines electrically connected with said oscillator circuit means and oscillating at said predetermined frequency; tunnel-effect sensing means including a first sensing electrode connected to said mounting pad and a second electrode connected to a reference surface, said tunnel-effect sensing means detecting variations in the separation of said first and second electrodes; output circuit means for generating an output signal having a Coriolis signal component feedback circuit means for receiving said output signal and supplying a low frequency component of said output signal to said balanced resonant sensing means; and demodulation circuit means coupled with said oscillator circuit means and with said output circuit means for receiving said predetermined frequency signal and said output signal and generating an analog Coriolis signal. - View Dependent Claims (7)
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8. A system for deriving a Coriolis acceleration signal comprising:
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oscillator circuit means for providing a signal having a predetermined frequency of oscillation; balanced resonant sensing means including first and second tines mechanically connected with a mounting pad, said first and second tines electrically coupled with said oscillator circuit means and oscillating at said predetermined frequency about a longitudinal sensing axis; first tunnel-effect sensing circuit means including a first sensing electrode connected to said mounting pad opposite said sensing axis and a second sensing electrode connected to a reference surface with a selected spacing from said first electrode, said first tunnel-effect sensing circuit means detecting variations in the separation of said first and second electrodes and providing a first output signal having a Coriolis signal component and a low frequency component; first feedback circuit means for receiving said low frequency component and providing a first feedback signal to said balanced resonant sensing means; second tunnel-effect sensing circuit means including a third sensing electrode connected to said mounting pad opposite said first sensing electrode and said sensing axis and a fourth sensing electrode connected said reference surface within a selected spacing from said third sensing electrode, said second tunnel-effect sensing circuit means detecting variations in the separation of said third and fourth sensing electrodes and providing a second output signal having a Coriolis signal component and a low frequency component; second feedback circuit means for receiving said second output signal and providing a second feedback signal to said balanced resonant sensing means; and output circuit means including summing means for combining said first and second Coriolis signals and for providing an output Coriolis signal indicative of angular rate. - View Dependent Claims (9)
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10. A method for detecting Coriolis acceleration using at least one balanced resonant sensor having first and second tines mechanically connected with mounting pad about a longitudinal sensing axis, tunnel-effect sensing circuit means including a first sensing electrode connected to said mounting pad and a second electrode connected to a reference surface, said method including;
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inducing said first and second tines into resonance; detecting variations in the separation of said first and second electrodes and providing a sensing signal having a Coriolis component; filtering said sensing signal and providing a feedback signal within a selected frequency range; supplying said feedback signal to said balanced resonant sensor for maintaining the average spacing between said first and second electrodes; and demodulating said sensing signal for generating an analog Coriolis signal. - View Dependent Claims (11)
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Specification