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Pressure sensor having a laminated substrate

  • US 5,285,690 A
  • Filed: 01/24/1992
  • Issued: 02/15/1994
  • Est. Priority Date: 01/24/1992
  • Status: Expired due to Term
First Claim
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1. In pressure sensor apparatus, the combination comprisingA. a substrate having first and second opposed sides, said substrate being laminated of at least first and second layers and having electrical conductors extending between said opposed sides in apertures through said substrate, and wherein said apertures are sealed pressure-wise,B. a bonding layer on said first side of said substrate,C. electrical connector elements connected with said electrical conductors and mounted on said substrate to extend from said second side of said substrate, said connector elements being disposed for removable and replaceable connection with mating connector elements, andD. a pressure sensing element having a sensor diaphragm and electrical contacts and developing at said electrical contacts an electrical signal responsive to diaphragm deflection, said sensing element being bonded by said bonding layer to said first side of said substrate and said contacts being connected electrically to said conductors, said sensing element defining a chamber between one side of said sensor diaphragm and said substrate and wherein said sensor diaphragm deflects in response to the pressure difference and between said chamber and the pressure on the other side of said sensing element.

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