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Multi-chamber wafer process equipment having plural, physically communicating transfer means

  • US 5,286,296 A
  • Filed: 01/09/1992
  • Issued: 02/15/1994
  • Est. Priority Date: 01/10/1991
  • Status: Expired due to Fees
First Claim
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1. A multi-chamber process equipment comprising:

  • a wafer transfer chamber for wafer transfer;

    a plurality of process chambers for processing a wafer;

    a plurality of gate valves each of which connects a unique one of said process chambers with said wafer transfer chamber so that said process chambers are connected with said wafer transfer chamber in parallel to one another; and

    a plurality of wafer transfer means for transferring the wafer between said wafer transfer chamber and one of said process chambers through one of said gate valves, each of said wafer transfer means being placed in said wafer transfer chamber, each of said wafer transfer means being provided for a unique one of said process chambers so that each of said wafer transfer means is assigned to a unique one of said process chambers;

    whereby each of said transfer means is capable of transferring a wafer directly to any other of said transfer means.

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