Microstructure design for high IR sensitivity

• US 5,286,976 A
• Filed: 11/07/1988
• Issued: 02/15/1994
• Est. Priority Date: 11/07/1988
• Status: Expired

• Current Assignee: Honeywell Incorporated (Honeywell International Inc.)
• Original Assignee: Honeywell Incorporated (Honeywell International Inc.)
• Inventors: Cole, Barrett E.
• Primary Examiner(s): Sotomayor, John B.
• Application Number:
  US07/288,701
• Time in Patent Office: 1,926 Days
• Field of Search: 250/338.1, 250/338.4, 250/342, 250/370.01, 250/239, 250/522.1, 250/338.2, 250/338.3, 250/332, 250/370.08, 250/330, 250/349, 357/29, 357/30, 357/55, 357/56, 357/74, 357/80, 357/84
• US Class Current: 250/349
• CPC Class Codes: G01J 5/20 using resistors, thermistors or semiconductors sensitive to radiation, e.g. photoconductive devices
• CPC Class Codes: H10N 19/00 Integrated devices, or assemblies of multiple devices, comprising at least one thermoelectric or thermomagnetic element covered by groups H10N10/00 - H10N15/00

Abstract

A microstructure design for high IR sensitivity having a two level infrared bolometer microstructure, the lower level having a reflective metal film surface such as Pt, Au, or Al to reflect IR penetrating to that level, the upper level being separated from the lower level by an air gap of about 1-2 microns which allows the reflected IR to interfere with the incident IR and increase the sensitivity to a higher level.

Claims

1. A two-level microbridge infrared bolometer structure comprising:

a bolometer structure on a semiconductor substrate, said structure having a lower section on the surface of the substrate and a microbridge upper detector plane structure spaced from and immediately above the lower section;

an infrared-reflective thin film metal coating on the surface of said lower section;

said upper microbridge detector plane structure comprising a planar sandwich structure including a supporting dielectric thin film layer, and a thin film temperature responsive resistive element having first and second terminals;

downwardly extending dielectric leg portion means which are a downwardly extending continuation of said upper structure dielectric supporting said upper microbridge detector plane structure above said lower section so that a thermal isolation gap exists between said upper and lower sections; and

,

electrically conductive paths included in said downwardly extending leg portion means connecting said first and second terminals to said lower section.

2. The microbridge structure according to claim 1 wherein said reflective thin film metal coating is selected from the group consisting of Au, Pt, and Al.

3. The microbridge structure according to claim 1 wherein said dielectric is of silicon nitride.

4. The microbridge structure according to claim 1 wherein said thin film resistive element is selected from the group consisting of vanadium oxide and titanium oxide.

5. The microbridge structure according to claim 1 wherein said thin film resistive element is V₂ O₃.

6. The microbridge structure according to claim 1 wherein said gap between said lower section and said upper detector structure is in the range of about 1-2 microns.

7. The microbridge structure according to claim 2 wherein the coating is about 50 nm in thickness.

8. The microbridge structure according to claim 1 and further comprising, in said planar sandwich structure, a second dielectric thin film layer and a thin film absorber layer.

9. The microbridge structure according to claim 3 wherein the first dielectric layer in on the order of 100 nm in thickness and the second dielectric layer is on the order of 250 nm in thickness.

10. The microbridge structure according to claim 4 wherein the resistive element film is on the order of 50-75 nm in thickness.

11. The microbridge structure according to claim 8 wherein the absorber layer is on the order of 30 nm in thickness.

12. A two-level microbridge infrared bolometer structure comprising:

a bolometer microstructure on a semiconductor substrate, said structure having a lower section on the surface of the substrate and a microbridge upper detector plane structure spaced from and immediately above the lower section;

an infrared reflective thin film metal coating on the surface of said lower section, said metal being selected from the group consisting of Au, Pt, and Al;

said upper microbridge detector plane structure comprising a planar sandwich structure including a first bridging dielectric thin film layer, a thin film temperature responsive resistive element selected from the group consisting of vanadium oxide

and titanium oxide, said resistive element having first and second terminals, a second dielectric thin film layer over said first dielectric layer and resistive layer, and a thin film absorber layer;

downwardly extending dielectric leg portion means which are a downwardly extending continuation of said upper structure dielectric supporting said upper microbridge detector plane structure above said lower section so that an air gap on the order of 1-2 microns exists between said upper and lower sections; and

,

electrically conductive paths included in said downwardly extending leg portion means connecting said first and second terminals to said lower section.