Microstructure design for high IR sensitivity
First Claim
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1. A two-level microbridge infrared bolometer structure comprising:
- a bolometer structure on a semiconductor substrate, said structure having a lower section on the surface of the substrate and a microbridge upper detector plane structure spaced from and immediately above the lower section;
an infrared-reflective thin film metal coating on the surface of said lower section;
said upper microbridge detector plane structure comprising a planar sandwich structure including a supporting dielectric thin film layer, and a thin film temperature responsive resistive element having first and second terminals;
downwardly extending dielectric leg portion means which are a downwardly extending continuation of said upper structure dielectric supporting said upper microbridge detector plane structure above said lower section so that a thermal isolation gap exists between said upper and lower sections; and
,electrically conductive paths included in said downwardly extending leg portion means connecting said first and second terminals to said lower section.
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Abstract
A microstructure design for high IR sensitivity having a two level infrared bolometer microstructure, the lower level having a reflective metal film surface such as Pt, Au, or Al to reflect IR penetrating to that level, the upper level being separated from the lower level by an air gap of about 1-2 microns which allows the reflected IR to interfere with the incident IR and increase the sensitivity to a higher level.
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Citations
12 Claims
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1. A two-level microbridge infrared bolometer structure comprising:
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a bolometer structure on a semiconductor substrate, said structure having a lower section on the surface of the substrate and a microbridge upper detector plane structure spaced from and immediately above the lower section; an infrared-reflective thin film metal coating on the surface of said lower section; said upper microbridge detector plane structure comprising a planar sandwich structure including a supporting dielectric thin film layer, and a thin film temperature responsive resistive element having first and second terminals; downwardly extending dielectric leg portion means which are a downwardly extending continuation of said upper structure dielectric supporting said upper microbridge detector plane structure above said lower section so that a thermal isolation gap exists between said upper and lower sections; and
,electrically conductive paths included in said downwardly extending leg portion means connecting said first and second terminals to said lower section. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A two-level microbridge infrared bolometer structure comprising:
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a bolometer microstructure on a semiconductor substrate, said structure having a lower section on the surface of the substrate and a microbridge upper detector plane structure spaced from and immediately above the lower section; an infrared reflective thin film metal coating on the surface of said lower section, said metal being selected from the group consisting of Au, Pt, and Al; said upper microbridge detector plane structure comprising a planar sandwich structure including a first bridging dielectric thin film layer, a thin film temperature responsive resistive element selected from the group consisting of vanadium oxide and titanium oxide, said resistive element having first and second terminals, a second dielectric thin film layer over said first dielectric layer and resistive layer, and a thin film absorber layer; downwardly extending dielectric leg portion means which are a downwardly extending continuation of said upper structure dielectric supporting said upper microbridge detector plane structure above said lower section so that an air gap on the order of 1-2 microns exists between said upper and lower sections; and
,electrically conductive paths included in said downwardly extending leg portion means connecting said first and second terminals to said lower section.
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Specification