Membrane light modulation systems

• US 5,287,215 A
• Filed: 07/17/1991
• Issued: 02/15/1994
• Est. Priority Date: 07/17/1991
• Status: Expired due to Term

• Current Assignee: Optron Systems Incorporated
• Original Assignee: Optron Systems Incorporated
• Inventors: Horsky, Thomas N., Warde, Cardinal, Schiller, Craig M., Genetti, George J.
• Primary Examiner(s): Sugarman, Scott J.
• Assistant Examiner(s): Lester, Evelyn A.
• Application Number:
  US07/734,289
• Time in Patent Office: 944 Days
• Field of Search: 359/293, 359/291, 359/292, 359/295, 359/298
• US Class Current: 359/293
• CPC Class Codes: G02B 26/0825 the reflecting element being a flexible sheet or membrane, e.g. for varying the focus flexible mirrors for cosmetic use A45D42/24
• CPC Class Codes: G09F 9/372 the positions of the elements being controlled by the application of an electric field
• CPC Class Codes: H04N 9/3102 using two-dimensional electronic spatial light modulators micromechanical modulators as such G02B26/0833; liquid crystal modulators as such G02F1/13

Abstract

A membrane light modulator comprising a charge transfer plate, and having a multiplicity of conductors extending from the rear surface to the front surface of the plate. The conductors are supported in an insulating matrix. The front side of the transfer plate has a plurality of potential wells defined by insulating walls, each potential well constituting a pixel. A plurality of conductors is provided for each pixel. A deformable reflecting membrane comprising a metal layer spans the potential wells. An electric potential is provided on the metal layer, and a source of electrons is provided for impacting the rear surface of the charge transfer plate.

Claims

1. A membrane light modulator comprising, a charge transfer plate having rear and front surfaces, a multiplicity of conductors extending from the rear surface to the front surface of said plate, said conductors being supported in an insulating matrix, the front surface of said transfer plate having thereon a plurality of potential wells defined by insulating walls, each said potential well constituting a pixel, a plurality of said multiplicity of conductors being provided for each pixel, a deformable reflecting membrane comprising a metal layer spanning said potential wells, means providing an electric potential on said metal layer, means providing a source of electrons for impacting the rear surface of said charge transfer plate, and means providing an image defining charge distribution to one of said last two means to provide an image defining deformation to said metal layer at each pixel.

2. The membrane light modulator of claim 1 wherein the metal layer is a thin flexible sheet of metal.

3. The membrane light modulator of claim 2 wherein the metal layer is a metal coating on a flexible insulating substrate.

4. The membrane light modulator of claim 3 wherein the metal layer is a metalized plastic.

5. The light modulator of claim 1 wherein said insulating walls are formed from an insulating layer, said walls being created by etching portions of said insulating layer not protected by an overlying photoresist.

7. The membrane light modulator of claim 1 wherein said means for providing a source of electrodes comprises a photocathode and microchannel plate assembly.

8. A membrane light modulator of claim 1 wherein said means for providing a source of electrodes comprises a field emitter array.

9. The membrane light modulator of claim 1 wherein said means for providing a source of electrodes comprises a cathode ray tube.

6. The membrane light modulator of claim wherein said means for providing a source of electrons comprises an electronic controller hard wired to the electrode surface.

10. A membrane light modulator comprising, a charge transfer plate having rear and front surfaces, a multiplicity of conductors extending from the rear surface to the front surface of said plate, said conductors being supported in an insulating matrix, the front surface of said transfer plate having thereon a plurality of potential wells defined by insulating walls, each said potential well constituting a pixel, a plurality of said multiplicity of conductors being provided for each pixel, a metal electrode in the bottom of each potential well spanning a plurality of said conductors, a deformable reflecting membrane spanning said potential wells, said membrane comprising a metal layer, means providing a potential on said metal layer, means providing a source of electrons for impacting the rear surface of said charge transfer plate, and means providing an image defining charge distribution to said source of electrons to provide an image defining deformation to said metal layer at each pixel.

11. A membrane light modulator comprising, a charge transfer plate having rear and front surfaces, a multiplicity of conductors extending from the rear surface to the front surface of said plate, said conductors being supported in an insulating matrix, the front surface of said transfer plate having thereon a plurality of potential wells defined by insulating walls, each said potential well constituting a pixel, a plurality of said multiplicity of conductors being provided for each pixel, a metal electrode in the bottom of each potential well spanning a plurality of said conductors, a deformable reflecting plastic membrane spanning said potential wells, a metal coating on said plastic membrane insulated from said potential wells, means providing a modulated stream of electrons for to the rear surface of said charge transfer plate, means providing a potential on said metal coating, means providing an image defining charge distribution to one of said last two means to provide an image defining deformation to said sheet at each pixel, and a light source of predetermined wavelength impinging on said reflective membrane to be modified by the deformation of each pixel on said reflective membrane.

12. The membrane light modulator of claim 11 wherein a plurality of light modulators is employed and a different wavelength of light is provided to each modulator and the resultant modulated light beams are combined to give a multi color image.

13. In a membrane light modulator comprising, a charge transfer plate having rear and front surfaces, a multiplicity of conductors extending from the rear surface to the front surface of said plate, said conductors beings supported in an insulating matrix, the front surface of said transfer plate having thereon a plurality of potential wells defined by insulating walls, each said potential well constituting a pixel, a deformable reflecting membrane spanning said potential wells, a metal coating on said membrane, means providing a potential on said metal coating, means providing a source of electrons for impacting the rear surface of said charge transfer plate, means providing an image defining charge distribution to one of said last two means to provide an image defining deformation to said membrane at each pixel;

the improvement wherein a plurality of said multiplicity of conductors are provided for each pixel and a metal electrode in the bottom of each potential well spans a plurality of said conductors.

14. In a membrane light modulator comprising, a charge transfer plate having rear and front surfaces, a multiplicity of conductors extending from the rear surface to the front surface of said plate, said conductors being supported in an insulating matrix, the front surface of said transfer plate having thereon a plurality of potential wells defined by insulating walls, each said potential well constituting a pixel, a deformable reflecting membrane spanning said potential wells, a metal coating on said membrane, means providing a potential on said metal coating, means providing a source of electrons for impacting the rear surface of said charge transfer plate, means providing an image defining charge distribution to one of said last two means to provide an image defining deformation to said membrane at each pixel;

the improvement wherein a secondary electron emitting coating is applied to the rear surface of said charge transfer plate to increase the secondary emission of electrons therefrom and a grid electrode is carried by an insulator structure on the rear surface of said charge transfer plate and having insulating walls corresponding to the insulating walls defining each pixel on the front of the charge transfer plate.