End-point detection

• US 5,288,367 A
• Filed: 02/01/1993
• Issued: 02/22/1994
• Est. Priority Date: 02/01/1993
• Status: Expired due to Fees

• Current Assignee: International Business Machines Corporation
• Original Assignee: International Business Machines Corporation
• Inventors: Radens, Carl J., Angell, David
• Primary Examiner(s): DANG, THI D
• Application Number:
  US08/011,630
• Time in Patent Office: 386 Days
• Field of Search: 156/626, 156/627, 156/345, 156/643, 204/298.03, 204/298.32, 204/192.13, 204/192.33, 118/712, 427/10, 427/8
• US Class Current: 216/60
• CPC Class Codes: G01N 21/67 using electric arcs or discharges
• CPC Class Codes: H01J 37/32935 Monitoring and controlling tubes by information coming from the object and/or discharge
• CPC Class Codes: H01J 37/32972 Spectral analysis

Abstract

A wavelength of light is monitored for end-point detection during etching. Spectral data is collected during etching which characterizes variation of light emitted by discharge produced during etching. At least one principal component of the data is calculated. Each principal component has variables, each variable has a weight, and each variable corresponds to a wavelength of the light emitted by the discharge. By examining or analyzing the weights, it is then determined which variable of the principal component varies during etching such that end-point of the etch can be detected by monitoring the wavelength corresponding to the variable.

Claims

1. A method of selecting a wavelength of light to monitor for end-point detection during etching, wherein the etching produces discharge which emits light, said method comprising the steps of:

collecting data during etching, said data characterizing variation of light emitted by discharge produced during the etching;

calculating a principal component of the data, said principal component having variables, each variable having a weight, and each variable corresponding to a wavelength of the light emitted by the discharge; and

determining which variable of the principal component varies during the etching such that end-point of the etch can be detected by monitoring the wavelength corresponding to the variable.

2. A method according to claim 1, further comprising the step of centering the data prior to the step of calculating a principal component of the data.

3. A method according to claim 2, further comprising variance scaling the data subsequent to centering the data.

4. A method according to claim 1, wherein said step of calculating a principal component of the data comprises calculating no more than the first four principal components of the data.

5. A method according to claim 1, wherein said step of calculating a principal component of the data comprises using the eigenanalysis method.

6. A method according to claim 1, wherein said step of calculating a principal component of the data comprises using the singular value decomposition method.

7. A method according to claim 1, wherein said step of calculating a principal component of the data comprises using the nonlinear partial least squares method.

8. A method according to claim 1, wherein said step of determining comprises ranking the variables according to weight from maximum value to minimum value, and analyzing the behavioral pattern of the variable having weight of maximum value and the variable having weight of minimum value.

9. A method according to claim 8, wherein the ranking of the variables includes plotting the weights of the principal component variables versus variable.

10. A method according to claim 8, wherein the analyzing of behavioral pattern includes plotting the time trace of the variable having weight of maximum value and the time trace of the variable having weight of minimum value.

11. A method according to claim 1, wherein said step of collecting data during etching includes use of an optical emission spectrometer.

12. A method of etching a wafer, comprising the steps of:

etching a wafer such that discharge is produced which emits light; and

terminating etching of the wafer when light of a predetermined wavelength emitted by the discharge varies so as to signal end-point of the etch, wherein determining of the predetermined wavelength comprises the steps of;

performing an experimental etch;

collecting data during the experimental etch, said data characterizing variation of light emitted by the discharge produced during the experimental etch;

calculating a principal component of the data, said principal component having variables, each variable having a weight, and each variable corresponding to a wavelength of the light emitted by the discharge; and

determining which variable of the principal component varies during the experimental etch such that end-point can be detected by monitoring the wavelength corresponding to the variable, said wavelength being the predetermined wavelength.

13. A method according to claim 12, further comprising the step of centering the data prior to the step of calculating a principal component of the data.

14. A method according to claim 13, further comprising variance scaling the data subsequent to centering the data.

15. A method according to claim 12, wherein said step of calculating a principal component of the data comprises calculating no more than the first four principal components of the data.

16. A method according to claim 12, wherein said step of calculating a principal component of the data comprises using the eigenanalysis method.

17. A method according to claim 12, wherein said step of calculating a principal component of the data comprises using the singular value decomposition method.

18. A method according to claim 12, wherein said step of calculating a principal component of the data comprises using the nonlinear partial least squares method.

19. A method according to claim 12, wherein said step of determining comprises ranking the variables according to weight from maximum value to minimum value, and analyzing the behavioral pattern of the variable having weight of maximum value and the variable having weight of minimum value.

20. A method according to claim 19, wherein the ranking of the variables includes plotting the weights of the principal component variables versus variable.

21. A method according to claim 19, wherein the analyzing of behavioral pattern includes plotting the time trace of the variable having weight of maximum value and the time trace of the variable having weight of minimum value.

22. A method according to claim 12, wherein said step of collecting data during etching includes use of an optical emission spectrometer.

23. An apparatus for selecting a wavelength of light to monitor for end-point detection during etching, wherein the etching produces discharge which emits light, said apparatus comprising:

means for collecting data characterizing variation of light emitted by discharge produced during etching;

means for calculating a principal component of the data, said principal component having variables, each variable having a weight, and each variable corresponding to a wavelength of the light emitted by the discharge; and

means for determining which variable of the principal component varies during etching such that end-point of the etch can be detected by monitoring the wavelength corresponding to the variable.

24. An apparatus according to claim 23, further comprising means for centering the data.

25. An apparatus according to claim 24, further comprising means for variance scaling the data.

26. An apparatus according to claim 23, wherein said means for calculating a principal component of the data calculates no more than the first four principal components of the data.

27. An apparatus according to claim 23, wherein said means for calculating a principal component of the data uses the eigenanalysis method.

28. An apparatus according to claim 23, wherein said means for calculating a principal component of the data uses the singular value decomposition method.

29. An apparatus according to claim 23, wherein said means for calculating a principal component of the data uses the nonlinear partial least squares method.

30. An apparatus according to claim 23, wherein said means for determining comprises means for ranking the variables according to weight from maximum value to minimum value, and means for analyzing the behavioral pattern of the variable having weight of maximum value and the variable having weight of minimum value.

31. An apparatus according to claim 30, wherein said means for ranking the variables includes means for plotting the weights of the principal component variables versus variable.

32. An apparatus according to claim 30, wherein said means for analyzing the behavioral pattern includes means for plotting the time trace of the variable having weight of maximum value and the time trace of the variable having weight of minimum value.

33. An apparatus according to claim 23, wherein said means for collecting data during etching comprises an optical emission spectrometer.