Light emitting device utilizing cavity quantum electrodynamics

• US 5,289,018 A
• Filed: 05/14/1993
• Issued: 02/22/1994
• Est. Priority Date: 08/14/1990
• Status: Expired due to Term

• Current Assignee: Canon Kabushiki Kaisha (Canon Inc.)
• Original Assignee: Canon Kabushiki Kaisha (Canon Inc.)
• Inventors: Okuda, Masahiro, Shimizu, Akira
• Primary Examiner(s): Hille, Rolf
• Assistant Examiner(s): TRAN, MINH LOAN
• Application Number:
  US08/061,328
• Time in Patent Office: 284 Days
• Field of Search: 357/4, 357/16, 357/17, 372/43, 372/45, 372/46, 372/96, 372/50, 372/99, 257/83, 257/94, 257/98
• US Class Current: 257/98
• CPC Class Codes: B82Y 20/00 Nanooptics, e.g. quantum optics or photonic crystals
• CPC Class Codes: H01L 33/04 with a quantum effect structure or superlattice, e.g. tunnel junction
• CPC Class Codes: H01L 33/06 within the light emitting region, e.g. quantum confinement structure or tunnel barrier
• CPC Class Codes: H01L 33/105 with a resonant cavity structure
• CPC Class Codes: H01S 5/0614 controlled by electric field, i.e. whereby an additional electric field is used to tune the bandgap, e.g. using the Stark-effect
• CPC Class Codes: H01S 5/06213 Amplitude modulation
• CPC Class Codes: H01S 5/1042 Optical microcavities, e.g. cavity dimensions comparable to the wavelength
• CPC Class Codes: H01S 5/1078 with means to control the spontaneous emission, e.g. reducing or reinjection
• CPC Class Codes: H01S 5/11 Comprising a photonic bandgap structure
• CPC Class Codes: H01S 5/183 having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL]
• CPC Class Codes: H01S 5/2009 by using electron barrier layers
• CPC Class Codes: H01S 5/3211 characterised by special cladding layers, e.g. details on band-discontinuities
• CPC Class Codes: H01S 5/3412 quantum box or quantum dash

Abstract

A light emitting device includes a light emitting active layer, electrodes to supply carriers to the active layer and a resonator enclosing the active layer with high reflectance for light radiated in the active layer. An electrode may be used to apply an electric field to change the wavelength of light radiated in the active layer. The spontaneous emission probability is controlled or modified to obtain high light emission efficiency or a high degree of light modulation.

Claims

1. A light emitting device comprising:

a light emitting active layer having a quantum confinement structure;

means for supplying carriers to said active layer;

means for applying a reverse bias electric field to said active layer; and

reflector means enclosing said active layer and having a high reflectance for light generated in said active layer,

wherein, said reflector means comprises a pair of reflectors sandwiching the active layer, the optical length between said reflectors being equal to a wavelength of a light generated in the active layer.

2. A light emitting device according to claim 1, wherein said active layer comprises a quantum line structure.

3. A light emitting device according to claim 1, wherein said active layer comprises a quantum box structure.

4. A light emitting device according to claim 1, wherein said reflector means comprises a one-dimensional distributed Bragg reflector.

5. A light emitting device according to claim 1, wherein said reflector means comprises a three-dimensional Bragg reflector.

6. A light emitting device according to claim 1, wherein said reflector means comprises a chirped distributed reflector.

7. A light emitting device according to claim 1, wherein said reflector means comprises a metal mirror of low loss.

8. A light emitting device according to claim 1, wherein said carrier supplying means comprises a transistor structure including an emitter region on one side of the active layer and a collector region on an opposite side of the active layer for injecting current into said active layer.

9. A light emitting device according to claim 1, wherein said carrier supplying means generates the carriers by optical pumping.

10. A method of controlling light emitted from a light emitting device which includes a light emitting active layer having a quantum confinement structure, a reflector means enclosing said active layer including a pair of reflectors sandwiching the active layer and having a high reflectance for light generated in said active layer, said method comprising the steps of:

supplying carriers to said active layer to generate light;

reflecting the generated light by said pair of reflectors with an optical length between reflectors equal to a wavelength of the light generated in the active layer so as to cause the light to resonate;

allowing a part of the resonating light to be emitted from said light emitting device; and

allowing a part of the resonating light to be emitted from said light emitting device; and

controlling the light emitted from said light emitting device by applying a reverse bias electric field to said active layer.

11. A method according to claim 10, wherein the application of said reverse electric field to said active layer causes a gradient of the potential in the said active layer so that electrons and holes are spatially separated so as to reduce a transition probability of spontaneous emission, whereby the light emission recoupling time is increased.

12. A method according to claim 10, wherein the application of said reverse bias electric field to said active layer causes a tendency for the emission wavelength to be shifted due to a quantum confinement Stark effect so as to deviate from the resonance, whereby a transition probability of spontaneous emission is reduced.

13. A light emitting device comprising:

a light emitting active layer having a quantum confinement structure;

a first semiconductor layer disposed in the vicinity of said active layer and having a first conduction type;

a second semiconductor layer and a third semiconductor layer which have a second conduction type and cooperate with each other in sandwiching said active layer and said first semiconductor layer therebetween, said second and third semiconductor layers each forming a distributed Bragg reflector;

a base electrode electrically connected to said active layer and said first semiconductor layer; and

an emitter electrode and a collector electrode which are electrically connected to said second semiconductor layer and said third semiconductor layer, respectively.

14. A method of driving a light emitting device which comprises a light emitting active layer having a quantum confinement structure, a first semiconductor layer disposed in the vicinity of said active layer and having a first conduction type, a second semiconductor layer and a third semiconductor layer which have a second conduction type and which cooperate with each other in sandwiching said active layer and said first semiconductor layer therebetween, said second and third semiconductor layers each forming a distributed Bragg reflector, a base electrode electrically connected to said active layer and said first semiconductor layer, and an emitter electrode and a collector electrode which are electrically connected to said second semiconductor layer and said third semiconductor layer, respectively, said method comprising the steps of:

applying a forward bias electric field between said emitter electrode and said base electrode so as to supply carriers to said active layer, thereby causing said active layer to generate light;

reflecting the light generated in said active layer by a Bragg reflector so as to cause resonance;

allowing a part of the resonating light to be emitted from said light emitting device; and

applying a reverse bias electric field between said collector electrode and said base electrode so as to control the light emitted from said light emitting device.

15. A method according to claim 14, wherein the application of said reverse bias electric field to said active layer causes a gradient of the potential in the said active layer so that electrons and holes are spatially separated so as to reduce a transition probability of spontaneous emission, whereby the light emission recoupling time is increased.

16. A method according to claim 14, wherein the application of said reverse bias electric field to said active layer causes a tendency for the emission wavelength to be shifted due to a quantum confinement Stark effect to deviate from the resonance, whereby a transition probability of spontaneous emission is reduced.

17. A light emitting device comprising:

a substrate;

a first semiconductor layer comprising a p-type semiconductor and provided on said substrate, said first semiconductor layer forming a distributed Bragg reflector;

a second semiconductor layer comprising an n-type semiconductor and provided on said first semiconductor layer;

a light emitting active layer having a quantum well structure and provided on said second semiconductor;

a third semiconductor layer comprising an intrinsic semiconductor and provided in said active layer;

a fourth semiconductor layer comprising a p-type semiconductor and provided on said third semiconductor layer, said fourth semiconductor layer forming a distributed Bragg reflector;

a base electrode contacting said third semiconductor layer;

an emitter electrode electrically connected to said fourth semiconductor layer; and

a collector electrode contacting said substrate.

18. A light emitting device according to claim 17, further comprising a cap layer provided on said fourth semiconductor layer, said emitter electrode contacting said cap layer.

19. A light emitting device according to claim 17, further comprising a barrier layer disposed between said active layer and said third semiconductor layer.

20. A light emitting device according to claim 19, wherein said active layer is made of GaAs, said barrier layer is made of intrinsic AlAs, said third semiconductor layer is made of intrinsic AlGaAs, said second semiconductor layer is made of n-AlGaAs and said first and fourth semiconductor layers each having a periodic structure including a p-AlAs layer and a p-GaAs layer which are laminated alternately.

21. A method of driving a light emitting device which comprises a substrate;

a first semiconductor layer comprising a p-type semiconductor and provided on said substrate, said first semiconductor layer forming a distributed Bragg reflector;

a second semiconductor layer comprising an n-type semiconductor and provided on said first semiconductor layer;

a light emitting active layer having a quantum well structure and provided on said second semiconductor;

a third semiconductor layer comprising an intrinsic semiconductor and provided in said active layer;

a fourth semiconductor layer comprising a p-type semiconductor and provided on said third semiconductor layer, said fourth semiconductor layer forming a distributed Bragg reflector;

a base electrode contacting said third semiconductor layer;

an emitter electrode electrically connected to said fourth semiconductor layer; and

a collector electrode contacting said substrate, said method comprising the steps of;

applying a forward bias electric filed between said emitter electrode and said base electrode so as to supply carriers to said active layer, thereby causing said active layer to generate light;

reflecting the light generated in said active layer by the Bragg reflector so as to cause resonance;

allowing a part of the resonating light to be emitted from said light emitting device; and

applying a reverse bias electric field between said collector electrode and said base electrode so as to control the light emitted from said light emitting device.

22. A method according to claim 21 wherein the application of said reverse bias electric filed to said active layer causes a gradient of the potential in the said active layer so that electrons and holes are spatially separated so as to reduce a transition probability of spontaneous emission, whereby the light emission recoupling time is increased.

23. A method according to claim 21 wherein the application of said reverse bias electric field to said active layer causes a tendency for the emission wave length to be shifted due to a quantum confinement Stark effect to deviate from the resonance, whereby a transition probability of spontaneous emission is reduced.