Catadioptric reduction projection optical system

• US 5,289,312 A
• Filed: 09/22/1992
• Issued: 02/22/1994
• Est. Priority Date: 09/28/1991
• Status: Expired due to Fees

• Current Assignee: Nikon Corporation
• Original Assignee: Nikon Corporation
• Inventors: Ichihara, Yutaka, Hashimoto, Sumio
• Primary Examiner(s): Arnold, Bruce Y.
• Assistant Examiner(s): Phan, James
• Application Number:
  US07/948,327
• Time in Patent Office: 518 Days
• Field of Search: 359/726-740, 359/487, 359/495, 359/488, 359/494, 359/497, 359/499
• US Class Current: 359/485.07
• CPC Class Codes: G02B 17/08 Catadioptric systems used in non-imaging applications G02B19/00
• CPC Class Codes: G02B 17/0892 specially adapted for the UV
• CPC Class Codes: G03F 7/70225 Optical aspects of catadioptric systems, i.e. comprising reflective and refractive elements

Abstract

A catadioptric reduction projection optical system is of a construction in which an on-axis light beam is used in a catadioptric system, and is designed such that resolving power is not deteriorated and a stop can be disposed. The catadioptric reduction projection optical system has a first lens unit G1 having negative refractive power and diffusing a light beam from a reticle 1, a semi-transparent mirror 2 for transmitting therethrough or reflecting the light beam from the first lens unit G1, a second lens unit G2 having negative refractive power and widening the light beam reflected from the semi-transparent mirror 2, a concave reflecting mirror 4 for returning the light beam from the second lens unit G2 to the semi-transparent mirror 2 through the second lens unit G2 while converging that light beam, a third lens unit G3 having positive refractive power and converging the light beam returned to and transmitted through the semi-transmitted mirror 2 on a wafer 5, and a stop 6 disposed between the semi-transparent mirror 2 and the third lens unit G3.

Claims

1. A catadioptric reduction projection optical system for projecting a reduced image of a pattern of a first surface onto a second surface, including:

a first lens unit G1 for refracting a light beam from said first surface;

a semi-transparent mirror having a plane parallel plate for reflecting the light beam from said first lens unit G1;

a concave reflecting mirror for returning the light beam from said semi-transparent mirror to said semi-transparent mirror while converging said light beam;

a second lens unit G2 of negative refractive power disposed between said semi-transparent mirror and said concave reflecting mirror;

a third lens unit G3 of positive refractive power for converging the light beam returned to said semi-transparent mirror by the reflection on said concave reflecting mirror and transmitted through said semi-transparent mirror and forming the reduced image of the pattern of said first surface on said second surface; and

stop means disposed between said semi-transparent mirror and said third lens unit G3.

2. A catadioptric reduction projection optical system according to claim 1, wherein the radius of curvature of said concave reflecting mirror is 17 times to 25 times the diameter of the exposure area on said second surface.

3. A catadioptric reduction projection optical system according to claim 1, wherein said first lens unit G1 has negative refractive power.

4. A catadioptric reduction projection optical system according to claim 1, wherein the inclination of the marginal ray from the on-axis object point transmitted through said semi-transparent mirror with respect to the optical axis is 0.1°

or less.

5. A catadioptric reduction projection optical system according to claim 1, wherein the inclination of the off-axis principal ray incident on said concave reflecting mirror with respect to the optical axis is 4°

or less.

6. A catadioptric reduction projection optical system according to claim 1, wherein said semi-transparent mirror further has a polarization separating surface for selectively reflecting or transmitting therethrough light in conformity with the direction of polarization, and a quarter wavelength plate is disposed between said semi-transparent mirror and said concave reflecting mirror.

7. A catadioptric reduction projection optical system according to claim 6, wherein the thickness of said quarter wavelength plate is 100 μ

m or less.

8. A catadioptric reduction projection optical system for projecting a reduced image of a pattern of a first surface onto a second surface, including:

a semi-transparent mirror having a plane parallel plate for dividing the optical path of a light beam from said first surface into a reflecting optical path and a transmitting optical path;

a concave reflecting mirror disposed on the reflecting optical path of an object light beam by said semi-transparent mirror for returning the light beam from said object to said semi-transparent mirror;

an anterior lens unit disposed between said semi-transparent mirror and said first surface;

an intermediate lens unit of negative refractive power disposed between said semi-transparent mirror and said concave reflecting mirror;

a posterior lens unit of positive refractive power for converging the light beam returned to said semi-transparent mirror by said concave reflecting mirror and transmitted through said semi-transparent mirror and forming the reduced image of the pattern of said first surface on said second surface; and

stop means disposed between said semi-transparent mirror and said posterior lens unit.

9. A catadioptric reduction projection optical system according to claim 8, wherein said intermediate lens unit of negative refractive power converts the light beam reflected from said concave reflecting mirror into a substantially parallel light beam.

10. A catadioptric reduction projection optical system according to claim 8, wherein said anterior lens unit has negative refractive power.

11. A catadioptric reduction projection optical system for reduction projecting a pattern of a first surface onto a second surface, including:

a beam splitter for splitting an optical path of a light beam from the first surface into a reflection optical path and a transmission optical path;

a concave reflecting mirror disposed in said reflection optical path of the light beam from the first surface for returning the light beam from the first surface to said beam splitter;

an anterior lens unit disposed between said beam splitter and said first surface;

an intermediate lens unit disposed between said beam splitter and said concave reflecting mirror;

a posterior lens unit of positive refractive power for converging a light beam having been returned to said beam splitter by said concave reflecting mirror and transmitted by the beam splitter so as to form a reduced image of said pattern of said first surface on said second surface; and

a stop means disposed in a light path of the light beam transmitted by said beam splitter and between said beam splitter and said posterior lens unit.

12. A catadioptric reduction projection optical system according to claim 11, wherein said intermediate lens unit has negative refractive power so as to change the light beam reflected by said concave mirror into a substantially parallel beam.

13. A catadioptric reduction projection optical system according to claim 11, wherein said anterior lens unit has negative refractive power.