Methods and apparatus for generating a plasma for "downstream" rapid shaping of surfaces of substrates and films

• US 5,290,382 A
• Filed: 12/13/1991
• Issued: 03/01/1994
• Est. Priority Date: 12/13/1991
• Status: Expired due to Fees

• Current Assignee: Integrated Process Equipment Corp. (Speedfam Co., Ltd)
• Original Assignee: Hughes Aircraft Company (Rtx Corporation)
• Inventors: Bollinger, L. David, Zarowin, Charles B.
• Primary Examiner(s): Thomas, Tom
• Assistant Examiner(s): GOUDREAU, GEORGE A
• Application Number:
  US07/807,536
• Time in Patent Office: 809 Days
• Field of Search: 156/643, 156/345, 118/723, 427/569, 427/446, 427/34, 427/294, 219/121.36, 219/121.4, 219/0.47, 219/0.48, 313/231.31, 313/231.51, 313/231.61, 315/111.21, 315/111.77
• US Class Current: 156/345.35
• CPC Class Codes: H01J 37/32357 Generation remote from the workpiece, e.g. down-stream
• CPC Class Codes: H01J 37/32366 Localised processing
• CPC Class Codes: H01J 37/32623 Mechanical discharge control means
• CPC Class Codes: H01J 37/32633 Baffles

Abstract

A gas, which is flowed into a plasma chamber 12 positioned "upstream" from a etching reaction site on a substrate 20, is converted into a plasma and its active species by the application of excitation. The means for excitation may be radio frequency power or microwave power. The excitation is decoupled from the substrate so as to prevent "print through" effects caused by electrical and geometric characteristic of the substrate. The active species are then flowed "downstream" from the plasma chamber 12 to the surface of the substrate 20 through an outlet 16 having an interactive flange 18 attached to the terminal end. The interactive flange 18 provides a surface separate from the substrate to consume the active species. The interactive flange inhibits the etching reaction from occurring outside of the local material removal footprint. The distance between the oulet and surface of the substrate is adjustable to provide a means to control the material removal footprint and removal footprint profile.

Claims

1. An apparatus for performing localized plasma assisted chemical etching reactions on the surface of an etchable substrate comprising:

a plasma chamber for containing a reactive gas and plasma having an inlet for introducing said reactive gas to said chamber means and an outlet for exhausting said plasma from the plasma chamber;

means for applying excitation to said plasma to convert said reactive gas into said plasma wherein the plasma chamber has a toroidal shape and includes a toroidal core and wherein the means for applying excitation to said reactive gas includes a ferromagnetic toroidal coil located proximate said toroidally shaped plasma chamber such that an inductively coupled plasma within said chamber acts as a secondary loop around the toroidal core; and

means for local application of said plasma to the surface of said substrate so as to define an etching footprint having a shape substantially defined by the shape of the plasma chamber outlet.

2. The apparatus of claim 1, wherein the terminating end of the plasma chamber outlet has flange attached thereto located proximally to the surface to be etched so as to form a consumable reactive surface with the plasma.

3. The apparatus of claim 2, wherein the flange is constructed out of a material which is interactive with said plasma.

4. The apparatus of claim 3, wherein the interactive material is carbon.

5. The apparatus of claim 3, wherein the interactive material is silicon.

6. An apparatus for performing local plasma assisted chemical etching reactions on the surface of a substrate comprising:

a plasma chamber for containing a reactive gas and plasma having an inlet for introducing said reactive gas and an outlet for exhausting said plasma from the plasma chamber;

rf discharge means for inductively applying rf excitation to said plasma chamber wherein the plasma chamber has a toroidal shape and includes a toroidal core and wherein the means for applying excitation to said reactive gas includes a ferromagnetic toroidal coil located proximate said toroidally shaped plasma chamber such that an inductively coupled plasma within said chamber acts as a secondary loop around the toroidal core;

an interactive flange attached to the terminating end of the plasma chamber outlet so as to provide a consumable reactive surface proximally to the substrate surface to prevent plasma from reacting with the substrate surface outside of the area defined by the outlet.

7. The apparatus of claim 6, wherein the flange is constructed out of carbon.

8. The apparatus of claim 6, wherein the flange is constructed out of silicon.