Method of obtaining hologram and an exposure apparatus

• US 5,291,315 A
• Filed: 05/21/1993
• Issued: 03/01/1994
• Est. Priority Date: 07/26/1988
• Status: Expired due to Fees

• Current Assignee: Konica Corporation (Konica Minolta Inc.)
• Original Assignee: Konica Corporation (Konica Minolta Inc.)
• Inventors: Hosoe, Shigeru
• Primary Examiner(s): Sugarman, Scott J.
• Assistant Examiner(s): PARSONS, DAVID
• Application Number:
  US08/065,449
• Time in Patent Office: 284 Days
• Field of Search: 356/347, 350/3.66, 350/3.60, 359/1, 359/3, 359/9, 359/15, 359/35, 359/565, 430/321, 430/397, 430/1, 430/2
• US Class Current: 359/3
• CPC Class Codes: G03F 7/201 characterised by an oblique exposure; characterised by the use of plural sources; characterised by the rotation of the optical device; characterised by a relative movement of the optical device, the light source, the sensitive system or the mask
• CPC Class Codes: G03H 1/08 Synthesising holograms, i.e. holograms synthesized from objects or objects from hologramsusing electric digital computers G06F; G06T

Abstract

A hologram exposure apparatus for and method of obtaining a hologram using a photoresist for an in-line type interferometer wherein a photoresist substrate is detachably mounted on a substrate rotating device. A concentric pattern of a hologram from a source of light is projected onto the photoresist on the substrate mounted on the substrate rotating device while rotating the substrate and moving a projecting device in a direction at right angles with the rotary shaft of the photoresist substrate.

Claims

1. An apparatus for exposing a photoresist deposited on a substrate to form a hologram pattern for use in an in-line type interferometer, comprising:

means for generating an electrical signal corresponding to a hologram pattern;

means for rotating the substrate upon which the photoresist is deposited, the substrate being detachably mounted on the rotating means;

means for projecting a laser beam corresponding to the electrical signal onto the photoresist, wherein the projecting means includes an optical system for projecting a beam spot of the laser beam on a surface of the photoresist so as to expose the photoresist to the hologram pattern;

means for linearly moving the projecting means or the substrate rotating means relative to one another in a direction parallel to the plane of the photoresist; and

means for controlling the rotating means, projecting means, and moving means based on the electrical signal so that the beam spot projecting by the projecting means onto one photoresist is moved by the moving means to provide the hologram pattern on the photoresist.

2. The apparatus of claim 1, wherein the moving means moves the projecting means relative to the substrate rotating means.

3. The apparatus of claim 2, wherein the moving means is comprises an air-slider for obtaining a high degree of accuracy of movement.

4. The apparatus of claim 2, wherein the rotating means comprises an air-bearing for obtaining a high degree of accuracy of rotation.

5. The apparatus of claim 2, further comprising:

means for supplying a photoresist solution to the substrate rotated by the rotating means so as to make the photoresist.

6. The apparatus of claim 2, further comprising:

means for calculating the hologram pattern to be exposed on said photoresist, wherein said generating means generates the electrical signal based on the calculation by the calculating means.

7. The apparatus of claim 1, wherein the moving means moves the substrate rotating means relative to the projecting means.

8. The apparatus of claim 7, wherein the moving means comprises an air-slider for obtaining a high degree of accuracy of movement.

9. The apparatus of claim 7, wherein the rotating means comprises an air-bearing for obtaining a high degree of accuracy of rotation.

10. The apparatus of claim 7, further comprising:

means for supplying a photoresist solution to the substrate rotated by the rotating means so as to make the photoresist.

11. The apparatus of claim 7, further comprising:

means for calculating the hologram pattern to be exposed on said photoresist, wherein said generating means generates the electrical signal based on the calculation by the calculating means.

12. A method of exposing a photoresist on a substrate to form an optical element for use in an in-line type interferometer, comprising the steps of:

placing a substrate on a substrate-mounting plate;

rotating the substrate-mounting plate while placing at least one drop of a photoresist solution onto the center of rotation of the substrate so that a photoresist is formed;

exposing the photoresist with a means for projecting a laser beam spot onto the photoresist while rotating the substrate with the photoresist thereon; and

moving linearly the projecting means and the substrate relative to one another in a direction parallel to the plane of the photoresist to produce a concentric pattern.