Method for forming a MOS transistor and structure thereof

• US 5,292,675 A
• Filed: 12/14/1992
• Issued: 03/08/1994
• Est. Priority Date: 12/24/1991
• Status: Expired due to Term

• Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Original Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Inventors: Codama, Mitsufumi
• Primary Examiner(s): Quach, T. N.
• Application Number:
  US07/990,288
• Time in Patent Office: 449 Days
• Field of Search: 437/41, 437/44, 437/21, 437/979, 748/DIG. 150, 257/336
• US Class Current: 438/163
• CPC Class Codes: H01L 27/12 the substrate being other than a semiconductor body, e.g. an insulating body
• CPC Class Codes: H01L 27/1214 comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
• CPC Class Codes: H01L 27/127 with a particular formation, treatment or patterning of the active layer specially adapted to the circuit arrangement
• CPC Class Codes: H01L 29/66598 forming drain [D] and lightly doped drain [LDD] simultaneously, e.g. using implantation through the wings a T-shaped layer, or through a specially shaped layer
• CPC Class Codes: H01L 29/66757 Lateral single gate single channel transistors with non-inverted structure, i.e. the channel layer is formed before the gate
• CPC Class Codes: H01L 29/78621 with LDD structure or an extension or an offset region or characterised by the doping profile
• CPC Class Codes: Y10S 148/15 Silicon on sapphire SOS
• CPC Class Codes: Y10S 438/907 Continuous processing

Abstract

A method for forming a MOS transistor having LDD structure by a simple and a few number of processes and a structure thereof are described. In accordance with the present invention, a low concentration of an impurity region can be formed in a semiconductor film part between an end of gate electrode and source or drain, by forming an ordinary gate insulating film extending beyond the gate electrode in the direction along the source and drain, in place of a spacer in the side of gate electrode which has been required for a preparation of conventional TFT having LDD structure, and further by forming a thinner insulating film than the gate insulating film in the side thereof, and by utilizing the thickness difference between the gate insulating film part excepting the gate electrode and the thin insulating film in the side thereof.

Claims

1. A method for forming a MOS transistor comprising the steps of:

forming a semiconductor film on a substrate;

forming a gate insulating film on said semiconductor film;

forming a conductive material on said gate insulating film;

patterning said conductive material into an island;

removing a portion of said gate insulating film by etching to form an insulating film thinner than said gate insulating film;

forming a gate electrode by reducing a width of said island by removing a portion of said island by etching; and

introducing an impurity into said semiconductor film with said gate electrode as a mask wherein the amount of said removed portion of the gate insulating film is controlled so that the impurity concentration in said semiconductor film under said insulating film thinner than said gate insulating film is rendered larger than that in said semiconductor film under the removed portion of said island by said introducing step.

2. The method of claim 1 wherein said conductive material patterning step and said removing step are carried out sequentially.

3. The method of claim 1 wherein said conductive material patterning step is carried out in vacuum and said removing step is carried out without breaking said vacuum.

4. The method of claim 3 wherein said gate electrode forming step is carried out without breaking said vacuum.

5. The method of claim 1 wherein said gate electrode forming step is carried out by isotropic etching.

6. The method of claim 1 wherein said impurity is introduced into said semiconductor film under said insulating film thinner than said gate insulating film and under the removed portion of said island at the same time by said introducing step.

7. The method of claim 6 wherein ion implantation is carried out once in said introducing step.

8. The method of claim 1 wherein said introducing step is carried out by ion implanation.

9. The method of claim 1 wherein the introduction of said impurity is carried out through said gate insulating film.

10. The method as in claim 1 where said impurity concentration under said insulating film thinner than the gate insulating film is 10²⁰ -10²¹ atoms/cm³ and the impurity concentration under said removed portion of said island is 10¹⁷ -10¹⁹ atoms/cm³.

11. A method for forming a MOS transistor comprising the steps of:

forming a semiconductor film on a substrate;

forming an insulating film on said semiconductor film;

forming a conductive material on said insulating film;

patterning said conductive material into an island;

removing a portion of said insulating film by etching to leave a portion of said insulating film unremoved under island and thin a portion of said insulating film outside the unremoved portion of said insulating film;

forming a gate electrode by reducing a width of said island by removing a portion of said island by etching; and

introducing an impurity into said semiconductor film with said gate electrode as a mask wherein the amount of said removed portion of the gate insulating film is controlled so that the impurity concentration in said semiconductor film under the thinned portion of said insulating film is rendered larger than that in said semiconductor film under the removed portion of said island by said introducing step.

12. The method of claim 11 wherein said gate electrode forming step is carried out by isotropic etching.

13. The method of claim 11 wherein said impurity is introduced into said semiconductor film under the thinned portion of said insulating film and under the removed portion of said island at the same time by said introducing step.

14. The method of claim 13 wherein ion implantation is carried out once in said introducing step.

15. The method of claim 11 wherein said introducing step is carried out by ion implantation.

16. The method of claim 11 wherein said conductive material patterning step is carried out in vacuum and said removing step is carried out without breaking said vacuum.

17. The method of claim 16 wherein said gate electrode forming step is carried out without breaking said vacuum.

18. The method as in claim 11 where said impurity concentration under said thinned portion of said insulating film is 10²⁰ -10²¹ atoms/cm³ and the impurity concentration under said removed portion of said island is 10¹⁷ -10¹⁹ atoms/cm³.

19. A method for forming a MOS transistor comprising the steps of:

forming a semiconductor island on an insulating surface of a substrate;

forming an insulating layer on said semiconductor island;

forming a gate electrode on a part of said insulating layer; and

introducing an impurity to a portion of said semiconductor island at an acceleration voltage through said insulating layer with said gate electrode as a mask in order to form source and drain regions in said semiconductor island and a channel region therebetween,

wherein said insulating layer has a first portion located under said gate electrode and extending beyond said gate electrode, and a second portion located on said source and drain regions and having a thickness thinner than said first portion,

wherein the thickness of said first and second portions and said acceleration voltage are selected in order that LDD regions are formed between said channel region and said source and drain regions.

20. The method of claim 19 wherein said introducing step is carried out by ion implantation.

21. The method of claim 19 wherein said impurity is introduced twice at different acceleration voltages.

22. The method as in claim 19 where said impurity concentration under said second portion of the insulating layer is 10²⁰ -10²¹ atoms/cm³ and the impurity concentration under the first portion of the insulating layer is 10¹⁷ -10¹⁹ atoms/cm³.