Empty drum detecting apparatus

• US 5,293,893 A
• Filed: 01/27/1993
• Issued: 03/15/1994
• Est. Priority Date: 01/27/1993
• Status: Expired due to Fees

• Current Assignee: Edwards Vacuum, LLC (Atlas Copco AB)
• Original Assignee: FSI International, Inc. (Tokyo Electron Limited)
• Inventors: O'Dougherty, Kevin T.
• Primary Examiner(s): Hepperle, Stephen M.
• Application Number:
  US08/009,725
• Time in Patent Office: 412 Days
• Field of Search: 137/113, 137/110, 137/171, 137/599
• US Class Current: 137/113
• CPC Class Codes: B67D 1/1247 Means for detecting the presence or absence of liquid
• CPC Class Codes: B67D 2210/0006 Manifolds
• CPC Class Codes: G05D 7/0688 by combined action on throttling means and flow sources G05D7/0694 takes precedence
• CPC Class Codes: H01L 21/6715 Apparatus for applying a liquid, a resin, an ink or the like H01L21/67126 takes precedence
• CPC Class Codes: Y10T 137/2569 Control by depletion of source
• CPC Class Codes: Y10T 137/3003 Fluid separating traps or vents
• CPC Class Codes: Y10T 137/87265 Dividing into parallel flow paths with recombining

Abstract

Empty drum detecting apparatus comprises an upright manifold chamber connected at its intermediate portion to a supply line extended to a supply drum of liquid chemical, and a pump for directing pumped liquid to process equipment utilizing the liquid chemical and having an inlet line. An outlet line is connected to the bottom portion of the upright manifold chamber and connected to the inlet line of the pump; and a shunt line with a flow restriction therein is connected between the upper portion of the manifold chamber and the outlet line for delivering collected gases and liquid to the inlet line and pump. An alternate flow restricting valve may be placed in the outlet line to restrict liquid flow from the lower portion of the manifold chamber. A capacitance proximity sensor is mounted above the inlet of the manifold chamber and senses the liquid level in the manifold chamber to produce an indication of the liquid level.

Claims

1. An empty drum detecting apparatus interposed between a liquid supply drum and process equipment utilizing the supplied liquid, comprising

a supply line to extend remotely from such a supply drum,

a liquid pump and an inlet line to the pump, the pump being adapted to supply liquid to such process equipment,

manifold means defining an elongate upright manifold chamber to contain a quantity of the liquid and comprising an upper portion and a lower portion below said upper portion,

sensing means adjacent the manifold chamber and producing first and second indications when the liquid level in the manifold chamber respectively rises and lowers relative to the sensor,

the supply line being connected into the manifold chamber below the upper portion thereof,

an outlet line connected to the lower portion of the manifold chamber and also connected to the inlet line for supplying liquid to the pump,

and a shunt line with a restriction to liquid flow therein, the shunt line being connected between the upper portion of the manifold chamber and the inlet line to allow the pump to draw gas and liquid from the upper portion manifold chamber as liquid is also being drawn by the pump from the lower portion of the manifold chamber.

2. An empty drum detecting apparatus according to claim 1 wherein said outlet line has a controllable valve therein, whereby when liquid flow is restricted at the valve, the pump will quickly draw accumulated gas and then liquid through the shunt line and flow restriction during commencing to draw liquid out of the supply drum.

3. An empty drum detecting apparatus according to claim 2 wherein said controllable valve comprises an on-off valve to prevent flow of liquid through the outlet line while the manifold chamber is being emptied of gas.

4. An empty drum detecting apparatus according to claim 1 wherein said supply line comprises a pair of supply end portions respectively extendible into alternate liquid supply drums, and valve means alternately connecting said supply end portions to the supply line in liquid flow relation, and control means responding to the indication from the sensing means and operating the valve means to change the connection of the supply line from one supply end portion and drum to the other supply end portion and the corresponding drum.

5. An empty drum detecting apparatus according to claim 2 wherein control means responds to the indications from the sensing means and operates said controllable valve in the outlet line as the liquid level in the manifold chamber rises and lowers.

6. An empty drum detecting apparatus according to claim 1 wherein said manifold chamber has an intermediate portion between the upper and lower portions, said supply line being connected into the manifold chamber at said intermediate portion.

7. An empty drum detecting apparatus according to claim 6 wherein the sensing means is disposed adjacent the intermediate portion of the manifold chamber.

8. An empty drum detecting apparatus according to claim 7 wherein the manifold chamber has a liquid inlet at said intermediate portion and connected to said supply line, said sensing means being disposed above said liquid inlet.

9. An empty drum detecting apparatus according to claim 1 wherein gas disposal means are connected to the pump for relieving the gases pumped from the manifold chamber.

10. An empty drum detecting apparatus according to claim 9 wherein said gas disposal means comprises a vented reservoir connected to the liquid pump for receiving gases and pumped liquid therefrom.

11. An empty drum detecting apparatus according to claim 10 wherein said outlet line has a controllable valve therein, whereby when liquid flow is restricted at the valve, the pump will quickly draw accumulated gas and then liquid through the shunt line and flow restriction while adding only minimal amounts of liquid to the vented reservoir.

12. An empty drum detecting apparatus according to claim 1 wherein the sensing means comprises a capacitance proximity sensor.

13. An empty drum detecting apparatus according to claim 1 wherein said manifold means comprises an elongate pipe portion comprising a top portion, a bottom portion and a middle portion between the top and bottom portions, the supply line being connected into said middle portion, the outlet line being connected into said bottom portion, and the shunt line being connected into the top portion.