Optical submicron aerosol particle detector

• US 5,294,806 A
• Filed: 02/12/1993
• Issued: 03/15/1994
• Est. Priority Date: 01/14/1992
• Status: Expired due to Term

• Current Assignee: International Business Machines Corporation
• Original Assignee: International Business Machines Corporation
• Inventors: DeCain, Donald M., Hobbs, Philip C. D., Batchelder, John S.
• Primary Examiner(s): Nelms, David C.
• Application Number:
  US08/017,214
• Time in Patent Office: 396 Days
• Field of Search: 250/564, 250/565, 250/573, 250/574, 356/338, 356/341, 356/342, 356/343
• US Class Current: 250/574
• CPC Class Codes: G01N 15/0205 by optical means
• CPC Class Codes: G01N 15/1434 Optical arrangements
• CPC Class Codes: G01N 2015/0238 Single particle scatter
• CPC Class Codes: G01N 2015/145 by pattern of light, e.g. fringe pattern
• CPC Class Codes: G01N 21/94 Investigating contamination, e.g. dust G01N21/85 takes precedence

Abstract

A particle detector that determines the presence of particles in an enclosed volume includes a laser that directs an optical beam to a beam splitter that produces first and second beams. An optical system directs the first beam into the enclosed volume. A detector is positioned adjacent the volume in order to receive back scattered optical energy arising from a particle in the volume encountering the first beam. The back scattered optical energy and the second beam are optically combined so as to overlap in a region and in the overlap region the back scattered optical energy and second beam are in the same state of focus, of the same polarization and are substantially parallel. A detector located at the overlap region produces an electrical signal indicative of the intensity of the back scattered light. A signal processor analyzes the electrical signal to determine the presence of the particle.

Claims

1. A particle detector for detecting particles within an enclosed volume, said detector comprising:

laser means for producing an optical beam and directing it along a path;

beam splitting means in said path for dividing said optical beam into first and second beams;

means for directing said first beam into said volume to interact with a particle and acquiring resultant back scattered optical energy from said first beam interacting with said particle, and directing said back scattered optical energy to said beam splitting means for being combined with said second beam such that said back scattered optical energy and said second beam overlap in a region and in the overlap region said back scattered optical energy and said second beam are in substantially the same state of focus, of substantially the same polarization and are substantially parallel; and

optical detection means disposed at said overlap region for detecting the presence of a particle in said enclosed volume from said combined back scattered optical energy and said second signal.

2. A particle detector as set forth in claim 1, wherein said optical detection means includes filter means for isolating a Doppler tone burst contained in said back scattered optical energy and threshold means for determining whether the tone burst exceeds a predetermined limit.

3. A particle detector as set forth in claim 1, wherein said beam splitting means comprises an internally reflective retro reflector and said means directing said first beam comprises a half wave plate disposed in one of the path of said first beam and the path of said back scattered optical energy.

4. A particle detector as set forth in claim 3, wherein said optical detection means includes filter means for isolating Doppler tone burst contained in said back scattered optical energy and threshold means for determining whether the tone burst exceeds a predetermined limit.

5. A particle detector as set forth in claim 1, wherein said beam splitting means comprises a non-polarizing beam splitter.

6. A particle detector as set forth in claim 5, wherein said optical detection means includes filter means for isolating a Doppler tone burst contained in said back scattered optical energy and threshold means for determining whether the tone burst exceeds a predetermined limit.

7. A particle detector as set forth in claim 1, wherein said beam splitting means comprises a beam splitter having regions of different reflective/transmissive properties.

8. A particle detector as set forth in claim 7, wherein said beam splitter has a region of high transmissivity in the path of said first beam and a region of high reflectivity in the path of said back scattered optical energy.

9. A particle detector as set forth in claim 7, wherein said optical detection means includes filter means for isolating a Doppler tone burst contained in said back scattered optical energy and threshold means for determining whether the tone burst exceeds a predetermined limit.

10. A particle detector as set forth in claim 1, wherein said beam splitting means comprises a wavefront splitting interferometer.

11. A particle detector as set forth in claim 10, wherein said optical detection means includes filter means for isolating a Doppler tone burst contained in said back scattered optical energy and threshold means for determining whether the tone burst exceeds a predetermined limit.

12. A particle detector as set forth in claim 10, further comprising first optical fiber means for directing said back scattered optical energy, second optical fiber means for directing said second beam, and fiber coupling means for combining said back scattered optical energy and said second beam.

13. A particle detector as set forth in claim 12, wherein said optical detection means includes filter means for isolating a Doppler tone burst contained in said back scattered optical energy and threshold means for determining whether the tone burst exceeds a predetermined limit.