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Diaphragm-based-sensors

  • US 5,295,395 A
  • Filed: 02/07/1991
  • Issued: 03/22/1994
  • Est. Priority Date: 02/07/1991
  • Status: Expired due to Term
First Claim
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1. A diaphragm transducer responsive to changes in a relevant fluid or fluids, comprising:

  • a diaphragm layer bonded on one side by an A surface and bounded on the opposite side by a B surface, an area extending between the A and B surfaces constituting a flexible diaphragm;

    an A wafer bounded on one side by an inner surface and bounded on the opposite side by an outer surface, said inner surface bonded to the A surface of the diaphragm layer, said A wafer containing an A cavity, said A cavity being located adjacent and opening to the diaphragm;

    a B wafer bounded on one side by an inner surface and bounded on the opposite side by an outer surface, said inner surface bonded to the B surface of the diaphragm layer, said B wafer containing a B cavity, said B cavity being and located in the bonded structure adjacent and opening to the diaphragm, and on the opposite side thereof from said A cavity;

    and wherein an A access passage connects the A cavity to an outer surface of either wafer A or wafer B and a B access passageway connects the B cavity to the outer surface of either wafer A or wafer B, and wherein each access passageway is sufficiently large to allow for communication of a relevant fluid there through;

    and wherein said diaphragm layer contains a second diaphragm and wherein said A wafer further contains a second A cavity adjacent and opening to said second diaphragm.

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