Apparatus for forming thin film
First Claim
1. An apparatus constructed and arranged for manufacturing a thin film by depositing sputtered particles on a predetermined surface of a substrate comprising:
- a vacuum chamber;
a first front chamber formed adjacent to said vacuum chamber;
a first on-off means for on-off operating the passage between said front chamber and vacuum chamber;
a target base disposed in said vacuum chamber and for holding a target having at least a hydrophobic organic substance;
a first moving mechanism for moving said target base between said vacuum chamber and first front chamber;
a neutral beam generation means for irradiating said target supported by said target base with a neutral beam including ions with more than 95% thereof neutralized;
a substrate base for supporting said substrate; and
shutter means disposed between said substrate base and target base for controlling the passage and blocking of said sputtered particles.
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Accused Products
Abstract
In the manufacture of a substrate with a hydrophobic film used for a reference electrode of an ion sensor or the like, a hydrophobic film is formed on a substrate by irradiating a target consisting of a hydrophobic compound with a neutral atom beam and thereby effecting sputtering. The apparatus for effecting the sputtering comprises a target base disposed in a vacuum chamber, an atom beam gun for irradiating a target on the target base with a neutral beam, a substrate base and a shutter for controlling the passage of sputtered particles. A thin film that is manufactured is suitable for an ion sensor, such as an ISFET or the like or an enzyme sensor.
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Citations
8 Claims
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1. An apparatus constructed and arranged for manufacturing a thin film by depositing sputtered particles on a predetermined surface of a substrate comprising:
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a vacuum chamber; a first front chamber formed adjacent to said vacuum chamber; a first on-off means for on-off operating the passage between said front chamber and vacuum chamber; a target base disposed in said vacuum chamber and for holding a target having at least a hydrophobic organic substance; a first moving mechanism for moving said target base between said vacuum chamber and first front chamber; a neutral beam generation means for irradiating said target supported by said target base with a neutral beam including ions with more than 95% thereof neutralized; a substrate base for supporting said substrate; and shutter means disposed between said substrate base and target base for controlling the passage and blocking of said sputtered particles. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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Specification