Combined semiconductor gas sensor

• US 5,298,783 A
• Filed: 06/24/1992
• Issued: 03/29/1994
• Est. Priority Date: 09/09/1991
• Status: Expired due to Fees

• Current Assignee: Yunnan University
• Original Assignee: Yunnan University
• Inventors: Wu, Xinghui
• Primary Examiner(s): MINTEL, WILLIAM A
• Application Number:
  US07/903,781
• Time in Patent Office: 643 Days
• Field of Search: 257/414, 257/410, 257/411, 204/415, 204/416, 204/418, 204/419, 73/30.01, 73/30.02, 73/30.03, 73/30.04, 338/34
• US Class Current: 257/414
• CPC Class Codes: G01N 27/12 of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid , for detecting components in the fluid
• CPC Class Codes: G01N 33/0031 comprising two or more sensors, e.g. a sensor array electrochemical electrode arrays G01N27/27

Abstract

The present invention relates to a combined semiconductor gas sensor, this sensor is constituted by combining two portions, each of the portions is made of a different gas sensitive material, their resistance exhibit different variation with the variation of the density of a specific gas, a detecting signal is led out from the junction of the two portion. Because of the mutual compensation and propagation effect of the two portions of the above mentioned gas sensor, the stability and/or sensitivity as well as the stability to temperature and humidity and the initial relaxation time can be improved. Gas sensors of different characteristics can be obtained by different combinations of two different gas sensitive materials selected according to need.

Claims

1. A combined semiconductor gas sensor for measuring the density of a specific gas, comprising the combination of two portions, which portions are formed on a single substrate and are made of two different gas sensitive materials respectively, wherein the resistances of these two portions vary differently with the density of the specific gas;

when said gas sensor is coupled into a detecting circuit, an output signal is led out from the junction of said two portions, wherein one of the portions serves as the load simultaneously, an absolute value of the temperature coefficient of the gas sensitive material constituting the portion serving as the load simultaneously is not greater than an absolute value of the temperature coefficient of the material constituting the other portion.

2. The gas sensor according to claim 1, wherein the temperature coefficients of said two portions are equal to or approximately equal to each other.

3. The gas sensor according to claim 1, wherein both gas sensitive materials are N-type, the combined gas sensor being of N-N-type, wherein one gas sensitive material is sensitive to the gas to be detected but insensitive to interference gas(es), while the other gas sensitive material is sensitive to interference gas(es) but insensitive to the gas to be detected.

4. The gas sensor according to claim 1, wherein one material is N-type, and the other is P-type respectively, and both of them are sensitive to the gas to be detected.

5. The gas sensor according to claim 4, wherein both gas sensitive materials are insensitive to interference gases.

6. The gas sensor according to claim 1, wherein the gas sensor is of sintered type.

7. The gas sensor according to claim 3, wherein the portion serving as load is made from the following materials:

ZnSnO₃, 54.4%-56.7% by weight,

SnO₂, 27.5%-29.8% by weight,

ThO₂, 1% by weight,

TiO₂, 0.5% by weight,

MgO, 4.7% by weight,

Co₂ O₃, 1% by weight,

Sb, 3.6% by weight,

Al₂ O₃, 2% by weight,

mordanting asbestos, 1.5% by weight, and

porcelain powder, 1.5% by weight;

and the other portion is made from;

SnO₂, 51.2% by weight,

WO₃, 24% by weight,

SiO₂, 10.3% by weight,

ThO₂, 10.3% by weight,

Pt, 0.8% by weight,

porcelain powder, 1.7% by weight, and

mordanting asbestos, 1.7% by weight.

8. The gas sensor according to claim 3, wherein the portion serving as load is made from the following materials:

WO₃, 90.4%-91% by weight,

Al₂ O₃, 3%-3.1% by weight, and

porcelain powder, 6%-6.5% by weight;

and the other portion is made from;

ZnSnO₃, 51.4% by weight,

SnO₂, 41.1% by weight,

Al₂ O₃, 1.5% by weight,

CaO, 2% by weight,

Ag₂ O, 1.5% by weight,

Sb, 1% by weight, and

porcelain powder, 1.5% by weight.

9. The gas sensor according to claim 1, wherein both gas sensitive materials are P-type, the combined gas sensor being of P-P-type, wherein one gas sensitive material is sensitive to the gas to be detected but insensitive to interference gas(es), while the other gas sensitive material is sensitive to interference gas(es) but insensitive to the gas to be detected.

10. The gas sensor according to claim 4, wherein both gas sensitive materials are insensitive to interference gases.

11. The gas sensor according to claim 1, wherein the gas sensor is of thin film type.

12. The gas sensor according to claim 1, wherein the gas sensor is of thick film type.

13. A combined gas sensor for measuring the density of a specific gas, the gas sensor comprising:

a first portion of a gas sensitive material, the first portion having a first end and a second end, such that when the first portion is exposed to the specific gas, the resistance between the first and second ends across the first portion varies with the density of the specific gas;

a second portion of a gas sensitive material, the second portion having a first end and a second end, such that when the second portion is exposed to the specific gas, the resistance between the first and second ends of the second portion across the second portion varies with the density of the specific gas differently from said resistance across the first portion;

a first electrode connected to the first end of the first portion;

a second electrode connected to the second end of the second portion, the first and second electrodes being for passing a current therebetween through the first and second portions; and

a third electrode connected to the second end of the first portion and the first end of the second portion, for providing an output signal indicative of the density of the specific gas.

14. The combined gas sensor of claim 13 wherein the first and second portions are formed on a single substrate.

15. The combined gas sensor of claim 14 wherein the substrate is a ceramic tube.

16. The combined gas sensor of claim 13 wherein the output signal is a voltage determined by the ratio of said resistance across the first portion to said resistance across the second portion.

17. The combined gas sensor of claim 13 wherein the first portion has a greater sensitivity to the specific gas than the second portion, and the first portion has a smaller sensitivity to an interference gas than the second portion.

18. The combined gas sensor of claim 13 whose sensitivity to the specific gas is greater than a sensitivity to the specific gas of the first portion and greater than a sensitivity to the specific gas of the second portion.

19. The combined gas sensor of claim 13 whose resolution to the specific gas and an interference gas is greater than a resolution to the specific gas and the interference gas of the first portion and greater than a resolution to the specific gas and the interference gas of the second portion.

20. The combined gas sensor of claim 13 wherein variations of said resistance across the first and second portions with humidity at least partially offset each other to reduce variation of the output signal with humidity.

21. The gas sensor of claim 13, further comprising means for connecting the first electrode to a first voltage and the second electrode to a second voltage lower in magnitude than the first voltage,

wherein, for the specific gas, a time constant of the resistance response of the first portion is smaller than a time constant of the resistance response of the second portion.

22. The gas sensor of claim 13, further comprising means for connecting the first electrode to a first voltage and the second electrode to a second voltage lower in magnitude than the first voltage,

wherein, for an interference gas, a time constant of the resistance response of the first portion is greater than a time constant of the resistance response of the second portion.

23. The combined gas sensor of claim 13 wherein:

for the specific gas, a time constant of the resistance response of the first portion is smaller than a time constant of the resistance response of the second portion, and

for an interference gas, a time constant of the resistance response of the first portion is greater than a time constant of the resistance response of the second portion.

24. The combined gas sensor of claim 13 wherein an initial relaxation time of the first portion is equal or approximately equal to an initial relaxation time of the second portion.