Positioning device for scanning probe microscopes

• US 5,306,919 A
• Filed: 09/21/1992
• Issued: 04/26/1994
• Est. Priority Date: 09/21/1992
• Status: Expired due to Term

• Current Assignee: Bruker Nano, Inc. (Bruker Corporation)
• Original Assignee: Digital Instruments, Inc. (Veeco Instruments Incorporated)
• Inventors: Elings, Virgil B., Gurley, John A.
• Primary Examiner(s): Anderson, Bruce C.
• Application Number:
  US07/947,831
• Time in Patent Office: 582 Days
• Field of Search: 250/306, 250/442.11, 310/328
• US Class Current: 250/442.11
• CPC Class Codes: B82Y 35/00 Methods or apparatus for measurement or analysis of nanostructures
• CPC Class Codes: G01Q 10/04 Fine scanning or positioning
• CPC Class Codes: G02B 21/002 Scanning microscopes scanning near field optical microscopes G01Q60/18
• CPC Class Codes: G02B 21/26 Stages; Adjusting means therefor
• CPC Class Codes: Y10S 977/872 Positioner

Abstract

A two dimensional piezoelectric positioning device of the type including a thin walled cylindrical shaped member of piezoelectric material. A plurality of substantially rectangular shaped members are positioned around one surface of the cylindrical shaped member to form opposite pairs of electrodes to control the two dimensional movement in accordance with voltages applied to the pairs of electrodes. Each rectangular shaped member is split into at least two electrode portions and with particular polarity voltages applied to the individual electrode portions to maintain a substantially constant length for the cylindrical shaped member during the two dimensional movement.

Claims

1. A piezoelectric positioning device for controlling at least a two dimensional horizontal movement between a tip and a sample surface in a scanning probe microscope, including,

a thin walled cylindrical shaped member formed of piezoelectric material having inner and outer surfaces and having a first fixed end and a second opposite movable end,

a tip member and a sample member having a sample surface and with the tip member and sample member positioned relative to each other to have the tip member located adjacent to the sample surface and with one of the tip member and sample member mounted on the movable end of the cylindrical shaped member,

a plurality of substantially rectangular shaped members positioned around one of the surfaces of the cylindrical shaped member to form opposite pairs of electrodes to control the two dimensional horizontal movement between the tip member and sample surface in accordance with voltages applied to the pairs of electrodes,

wherein each rectangular shaped member is split into at least two electrode portions and with particular polarity voltages applied to the individual electrode portions to substantially eliminate tilting of the movable end of the cylindrical shaped member during the two dimensional movements, and

wherein the cylindrical shaped member is formed of at least two pieces of piezoelectric material polarized in opposite directions and with the individual electrode portions in each split electrode located on a different one of the pieces of piezoelectric material and with the same polarity voltage applied to the individual electrode portions in each split electrode.

2. The piezoelectric positioning device of claim 1 wherein the sample member is mounted on the movable end of the cylindrical shaped member.

3. The piezoelectric positioning device of claim 1 additionally including a unitary member positioned around the other surface of the cylindrical shaped member to form a unitary electrode to control a vertical movement between the tip member and sample surface in accordance with voltage applied to the unitary electrode.

4. The piezoelectric positioning device of claim 1 additionally including complementary electrode portions on the other surface of the cylindrical shaped member to receive particular polarity voltages to substantially increase the two dimensional movement.

5. The piezoelectric positioning device of claim 1 additionally including a unitary member positioned around the one surface of the cylindrical shaped member to form a unitary electrode to control a vertical movement between the tip member and sample surface in accordance with voltage applied to the unitary electrode.

6. The piezoelectric positioning device of claim 5 wherein the unitary electrode is located at one end of the cylindrical shaped member.

7. The piezoelectric positioning device of claim 5 wherein the unitary electrode is located in the middle of the cylindrical shaped member between the individual portions of each split electrode.

8. The piezoelectric position device of claim 1 wherein each of the rectangular shaped members is of substantially the same length.

9. In an at least two dimensional piezoelectric positioning device of the type including a thin walled cylindrical shaped member of piezoelectric material having a plurality of substantially rectangular shaped members positioned around one surface of the cylindrical shaped member to form opposite pairs of electrodes to control the two dimensional movement in accordance with voltages applied to the pairs of electrodes, an improvement including

each rectangular shaped member split into at least two electrode portions and with particular polarity voltages applied to the individual electrode portions to maintain a substantially constant length for the cylindrical shaped member during the two dimensional movement, and

wherein the cylindrical shaped member is formed of at least two pieces of piezoelectric material polarized in opposite directions and with the individual electrode portions in each split electrode located on a different one of the pieces of piezoelectric material and with the same polarity voltage applied to the individual electrode portions in each split electrode.

10. The piezoelectric positioning device of claim 9 wherein the cylindrical shaped member is formed of a single piece of piezoelectric material polarized in a particular direction and with opposite polarity voltages applied to the individual electrode portions in each split electrode.

11. The piezoelectrode positioning device of claim 9 wherein the cylindrical shaped member is formed of at least two pieces of piezoelectric material polarized in opposite directions and with the individual electrode portions in each split electrode located on a different one of the pieces of piezoelectric material and with the same polarity voltage applied to the individual electrode positioning in each split electrode.

12. The piezoelectric positioning device of claim 9 wherein a sample member is mounted on the end of the cylindrical shaped member.

13. The piezoelectric positioning device of claim 9 additionally including complementary electrode portions on the other surface of the cylindrical shaped member to receive particular polarity voltages to substantially increase the two dimensional movement.

14. The piezoelectric positioning device of claim 9 additionally including a unitary member positioned around another surface of the cylindrical shaped member to form a unitary electrode to control a vertical movement of the sample member in accordance with voltage applied to the unitary electrode.

15. The piezoelectric positioning device of claim 9 additionally including a unitary member positioned around both surfaces of the cylindrical shaped member to form a unitary electrode to control a vertical movement of the sample member in accordance with voltage applied to the unitary electrode.

16. The piezoelectrode positioning device of claim 15 where in the unitary electrode is located at one end of the cylindrical shaped member.

17. The piezoelectric positioning device of claim 15 wherein the unitary electrode is located in the middle of the cylindrical shaped member between the individual portions of each split electrode.

18. The piezoelectric position device of claim 9 wherein each of the rectangular shaped members is of substantially the same length.

19. A piezoelectric positioning device for controlling at least a two dimensional horizontal movement between a tip and a sample surface in a scanning probe microscope, including,

a thin walled cylindrical shaped member formed of piezoelectric material having inner and outer surfaces and having a first fixed end and a second opposite movable end,

a tip member and a sample member having a sample surface and with the tip member and sample member positioned relative to each other to ave the tip member located adjacent to the sample surface and with one of the tip member and sample member mounted on the movable end of the cylindrical shaped member,

a plurality of substantially rectangular shaped members positioned around one of the surfaces of the cylindrical shaped member to form opposite pairs of electrodes to control the two dimensional horizontal movement between the tip member and sample surface in accordance with voltages applied to the pairs of electrodes,

wherein each rectangular shaped member is split into at least two electrode portions and with particular polarity voltages applied to the individual electrode portions to substantially eliminate tilting of the movable end of the cylindrical shaped member during the two dimensional movements,

a unitary member positioned around the one surface of the cylindrical shaped member to form a unitary electrode to control a vertical movement between the tip member and sample surface in accordance with voltage applied to the unitary electrode, and

wherein the unitary electrode is located in the middle of the cylindrical shaped member between the individual portions of each split electrode.

20. The piezoelectric positioning device of claim 19 wherein the cylindrical shaped member is formed of a single piece of piezoelectric material polarized in a particular direction and with opposite polarity voltages applied to the individual electrode portions in each split electrode.

21. The piezoelectric positioning device of claim 19 wherein the sample member is mounted on the movable end of the cylindrical shaped member.

22. The piezoelectric positioning device of claim 19 additionally including complementary electrode portions on the other surface of the cylindrical shaped member to receive particular polarity voltages to substantially increase the dimensional movement.

23. The piezoelectric position device of claim 19 wherein each of the rectangular shaped members is of substantially the same length.

24. In an at least two dimensional piezoelectric positioning device of the type including a thin walled cylindrical shaped member of piezoelectric material having a plurality of substantially rectangular shaped members positioned around one surface of the cylindrical shaped member to form opposite pairs of electrodes to control the two dimensional movement in accordance with voltages applied to the pairs of electrodes, an improvement including

each rectangular shaped member split into at least two electrode portions and with particular polarity voltages applied to the individual electrode portions to maintain a substantially constant length for the cylindrical shaped member during the two dimensional movement,

a unitary member positioned around both surfaces of the cylindrical shaped member to form a unitary electrode to control a vertical movement of the sample member in accordance with voltage applied to the unitary electrode, and

wherein the unitary electrode is located in the middle of the cylindrical shaped member between the individual portions of each split electrode.

25. The piezoelectric positioning device of claim 24 wherein the cylindrical shaped member is formed of a single piece of piezoelectric material polarized in a particular direction and with opposite polarity voltages applied to the individual electrode portions in each split electrode.

26. The piezoelectric positioning device of claim 24 wherein a sample member is mounted on the end of the cylindrical shaped member.

27. The piezoelectric positioning device of claim 24 additionally including complementary electrode portions on the other surface of the cylindrical shaped member to receive particular polarity voltages to substantially increase the two dimensional movement.

28. The piezoelectric position device of claim 24 wherein each of the rectangular shaped members is of substantially the same length.