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Apparatus and method for detecting leaks in packages

  • US 5,307,139 A
  • Filed: 01/15/1992
  • Issued: 04/26/1994
  • Est. Priority Date: 08/30/1990
  • Status: Expired due to Term
First Claim
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1. A method of inspecting a package for gross leaks, the method comprising the steps of:

  • a) placing the package in a chamber,b) varying the pressure in the chamber by an amount sufficient to deform a surface of the package by a small integral number of wavelengths of light,c) recording an interferometric image of the surface of the package,d) waiting for an interval of several seconds,e) varying the pressure in the chamber at a known rate, while simultaneously recording a series of second interferometric images of the surface observed in step (c),f) comparing the second images with the image of step (c) to determine whether the surface has moved during the interval of step (d), andg) determining whether the package is leaking by analyzing movement of said surface.

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