Force-sensing system, including a magnetically mounted rocking element

• US 5,307,693 A
• Filed: 01/21/1993
• Issued: 05/03/1994
• Est. Priority Date: 01/21/1993
• Status: Expired due to Term

• Current Assignee: American Telephone & Telegraph Company (AT&T, Inc.)
• Original Assignee: AT&T, Inc.
• Inventors: Griffith, Joseph E., Miller, Gabriel L.
• Primary Examiner(s): Chilcot, Jr., Richard E.
• Assistant Examiner(s): Dougherty, Elizabeth L.
• Application Number:
  US08/007,304
• Time in Patent Office: 467 Days
• Field of Search: 73/105, 73/862.61, 73/862.68, 73/862.69, 73/862.626, 73/862.633, 73/606, 73/718, 73/724, 73/517 A, 73/517 R, 361/280, 361/283.2, 361/290, 361/299.3, 384/2, 384/446
• US Class Current: 73/862.68
• CPC Class Codes: B82Y 35/00 Methods or apparatus for measurement or analysis of nanostructures
• CPC Class Codes: G01Q 60/38 Probes, their manufacture, or their related instrumentation, e.g. holders
• CPC Class Codes: Y10S 977/865 Magnetic force probe
• CPC Class Codes: Y10S 977/873 Tip holder

Abstract

A force-sensing system suitable, for example, for atomic force microscopy. This system includes a rocking beam, a base, and means for supporting the beam adjacent a surface of the base such that the beam can pivot about at least one axis parallel to the base surface. In contrast to rocking-beam systems of the prior art, the support means comprise at least one pivot element that can be held against the base surface by a magnetic field.

Claims

1. A force-sensing system which comprises:

a) a base member having a principal surface at least a portion of which is substantially planar and electrically conductive;

b) a rocker element having a principal surface at least a portion of which is substantially planar and electrically conductive;

c) at least one pivot element for supporting the rocker element on the base member such that;

said base-surface portion faces said rocker-surface portion, the rocker element can be tilted about at least one axis parallel to said base-surface portion; and

at least one capacitance is defined between said base-surface portion and said rocker-surface portion; and

d) means for controlling the capacitance;

characterized in that

e) the pivot element comprises magnetic material; and

f) the force-sensing system further comprises means for providing a magnetic field adapted to hold the pivot element against the base principal surface.

2. The system of claim 1, wherein the magnetic means comprise a permanent magnet affixed to the base.

3. The system of claim 1, wherein the base comprises magnetic material, and at least a portion of the base is magnetized, such that the magnetic means are coextensive with the magnetized base portion.

4. The system of claim 1, wherein the pivot element consists of one spherical body, such that the rocker element can be tilted about two independent axes that lie parallel to the base principal surface.

5. The system of claim 1, wherein the at least one pivot element consists of two spheroidal bodies.

6. The system of claim 1, wherein the at least one pivot element is adapted such that the mounting of the rocker element on the base principal surface is kinematic.

7. The system of claim 2, wherein the permanent magnet is located relative to the pivot element such that the pivot element experiences a relatively high magnetic field gradient.

8. The system of claim 5, wherein the rocker element is a rectangular parallelepiped having two longitudinal faces perpendicular to said rocker-element principal surface, and each of the spheroidal bodies is affixed to one of the longitudinal faces.