Differential dielectric analyzer
First Claim
1. An apparatus for analyzing the dielectric properties of a sample comprising:
- a substrate;
a first bottom electrode mounted on said substrate;
a second bottom electrode mounted on said substrate;
a top electrode;
oscillator means, coupled to said first and second bottom electrodes, for driving said first and second bottom electrodes, said second electrode being driven out of phase relative to said first electrode;
demodulator means, coupled to said top electrode, for extracting a signal representative of the conductance of the sample and a signal representative of the susceptance of the sample;
calculator means, coupled to said oscillator means and said demodulator means, for calculating desired dielectric properties of the sample; and
display means, coupled to said calculator means, for displaying desired dielectric properties of the sample.
3 Assignments
0 Petitions
Accused Products
Abstract
An apparatus for analyzing the dielectric properties of a sample. A thin planar sample having a hole therein is positioned over two bottom electrodes having the hole over one of the bottom electrodes. An oscillator provides a first signal to one of the bottom electrodes and a second signal 180° out of phase with the first signal to the second bottom electrode. A differential signal is obtained on the top electrode representative of the dielectric properties of the sample with the elimination of edge effects. A phase sensitive demodulator synchronized with the oscillator extracts the two components of the conductance and susceptance of the sample. A position sensor measures the thickness of the sample and is used to calculate the dielectric constant of the sample. Thereby, an accurate measurement of the dielectric properties of the sample is obtained without a complicated structure in order to eliminate edge effects.
-
Citations
14 Claims
-
1. An apparatus for analyzing the dielectric properties of a sample comprising:
-
a substrate; a first bottom electrode mounted on said substrate; a second bottom electrode mounted on said substrate; a top electrode; oscillator means, coupled to said first and second bottom electrodes, for driving said first and second bottom electrodes, said second electrode being driven out of phase relative to said first electrode; demodulator means, coupled to said top electrode, for extracting a signal representative of the conductance of the sample and a signal representative of the susceptance of the sample; calculator means, coupled to said oscillator means and said demodulator means, for calculating desired dielectric properties of the sample; and display means, coupled to said calculator means, for displaying desired dielectric properties of the sample. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
-
-
10. An apparatus for analyzing the dielectric properties of a sample comprising:
-
a substrate; a first bottom electrode mounted on said substrate; a second bottom electrode mounted on said substrate; a top electrode; oscillator means, coupled to said first and second bottom electrodes, for driving said first and second bottom electrodes, said second electrode being driven out of phase relative to said first electrode; demodulator means, coupled to said top electrode, for extracting a signal representative of the conductance of the sample and a signal representative of the susceptance of the sample; calculator means, coupled to said oscillator means and said demodulator means, for calculating desired dielectric properties of the sample; display means, coupled to said calculator means, for displaying desired dielectric properties of the sample; and heater means, coupled to said substrate, for heating the sample over a range of temperatures.
-
-
11. An apparatus for analyzing dielectric properties comprising:
-
a substrate; a first bottom electrode mounted on said substrate; a second bottom electrode mounted on said substrate adjacent said first bottom electrode, said second bottom electrode having a top surface area equal to a top surface area of said first bottom electrode; a top electrode positioned above said first and second bottom electrodes having a bottom surface area at least as large as the combined top surface areas of said first and second bottom electrode; a planar sample to be analyzed, said sample having a hole therein, said sample positioned between said top electrode and said first and second bottom electrodes such that the hole is positioned completely over one of said first or second bottom electrodes; oscillator means, coupled to said first and second bottom electrodes, for applying a first signal to said first bottom electrode, and a second signal 180°
out of phase with said first signal to said second bottom electrode; andphase sensitive demodulator means, coupled to said top electrode and said oscillator means, for obtaining a first component in phase with said first signal representative of the conductance of said sample and a second component 90°
out of phase with said first signal representative of the susceptance of the sample. - View Dependent Claims (12, 13, 14)
-
Specification