High intensity illuminator

• US 5,309,277 A
• Filed: 06/19/1992
• Issued: 05/03/1994
• Est. Priority Date: 06/19/1992
• Status: Expired due to Term

• Current Assignee: Zygo Corporation (Ametek Incorporated)
• Original Assignee: Zygo Corporation (Ametek Incorporated)
• Inventors: Deck, Leslie L.
• Primary Examiner(s): Ben, Loha
• Assistant Examiner(s): NGUYEN, THONG Q
• Application Number:
  US07/901,658
• Time in Patent Office: 683 Days
• Field of Search: 359/385-390, 359/599, 359/707, 359/798, 359/19-20, 359/656, 359/599, 359/613, 362/227, 362/239-252, 362/382, 250/201.3, 351/247
• US Class Current: 359/387
• CPC Class Codes: F21V 19/001 the light sources being semiconductors devices, e.g. LEDs
• CPC Class Codes: H01S 3/0941 of a laser diode
• CPC Class Codes: H01S 5/4025 Array arrangements, e.g. constituted by discrete laser diodes or laser bar H01S5/42 takes precedence

Abstract

The high intensity illuminator of the invention includes a mounting fixture, a receiving surface spaced from the mounting fixture, and a plurality of semiconductor illumination sources which are implemented, most preferably, by light emitting diodes or laser diodes. Each illumination source is operable for emitting an outwardly-diverging illumination cone along an axis of illumination of the source at a predetermined illumination wavelength. The plural illumination sources are mounted on the mounting fixture such that their illumination cones are overlappingly coincident on a selected portion of the receiving surface to provide at the receiving surface portion a highly uniform illumination of high intensity at the predetermined wavelength.

Claims

1. A high intensity illuminator comprising;

a mounting fixture;

a receiving surface spaced from said mounting fixture;

a plurality of semiconductor illumination sources, each said illumination source being operable for emitting an outwardly-diverging illumination cone along an axis of illumination of said each source at a predetermined illumination wavelength;

said plural illumination sources being mounted on said mounting fixture such that said illumination cones of said sources are overlappingly coincident on a selected portion of said receiving surface to provide at said receiving surface portion a highly uniform illumination of high intensity at said predetermined wavelength; and

a light pipe extending from an input end and terminating at an output end having a surface defining said receiving surface, said light pipe being disposed relative to said mounting fixture so that the illumination cones of said plural illumination sources enter said light pipe at said input end and are directed by said light pipe along said pipe and onto said light pipe output end.

2. A high intensity illuminator in accordance with claim 1, wherein said light pipe outlet end comprises a diffuse surface for smoothing intensity irregularities in the illumination impinging on said receiving surface portion from said plural illumination sources.

3. A high intensity illuminator in accordance with claim 1, wherein said light pipe comprises a frustoconically-converging light pipe for concentrating said illumination source illumination cones on said receiving surface.

4. A high intensity illuminator in accordance with claim 1, said light pipe having an outer configuration of decreasing circumference from said input end to said outlet end.

5. A high intensity illuminator comprising:

a mounting fixture;

a receiving surface spaced from said mounting fixture; and

a plurality of semiconductor illumination sources, each said illumination source being operable for emitting an outwardly-diverging illumination cone along an axis of illumination of said each source at a predetermined illumination wavelength;

said plural illumination sources being mounted on said mounting fixture such that said illumination cones of said sources are overlappingly coincident on a selected portion of said receiving surface to provide at said receiving surface portion a highly uniform illumination of high intensity at said predetermined wavelength;

wherein said plural illumination sources comprise a first plurality of semiconductor illumination sources and said predetermined illumination wavelength comprises a first predetermined illumination wavelength, further comprising a second plurality of semiconductor illumination sources, each said illumination source of said second plurality being operable for emitting an outwardly-diverging illumination cone along an axis of illumination of said each source at a second predetermined illumination wavelength;

said second plural illumination sources being mounted on said mounting fixture such that said illumination cones of said second sources are overlappingly coincident on said selected portion of said receiving surface to provide at said receiving surface portion a highly uniform illumination of high intensity at said second predetermined wavelength.

6. A high intensity illuminator in accordance with claim 5, wherein said first and said second pluralities of illumination sources are mounted on said mounting fixture in a substantially alternating array of illumination sources of said respective first and second pluralities.

7. A high intensity illuminator in accordance with claim 5, further comprising means for selectively modulating said first and second plural illumination sources between a first operating condition in which illumination sources of said first plurality emit said illumination cones at said first predetermined wavelength and a second operating condition in which illumination sources of said second plurality emit said illumination cones at said second predetermined wavelength.

8. A high intensity illuminator in accordance with claim 5, further comprising means for selectively modulating said first and second plural illumination sources between a first operating condition in which only illumination sources of said first plurality are operated to emit said illumination cones and a second operating condition in which only illumination sources of said second plurality emit said illumination cones so as to vary said high intensity illumination at said receiving surface between said first and second predetermined wavelengths.

9. A high intensity illuminator in accordance with claim 5, further comprising means for selectively modulating said illumination sources of said first and second pluralities of sources between an operating condition in which at least some of the sources of said first and second pluralities of illumination sources emit said illumination cones and a nonoperating condition of said at least some sources.

10. A high intensity illuminator in accordance with claim 9 wherein said means for selectively modulating said illumination sources comprises means for supplying an electrical signal to said plural illumination sources for operating said sources to emit said illumination cones, further comprising means for sensing an illumination intensity at said receiving surface portion, said sensing means being connected to said supplying means and said supplying means further comprising means for varying the electrical signal supplied to said first and second pluralities of illumination sources in compensating accordance with illumination intensity variations sensed by said sensing means so as to provide a substantially constant illumination intensity at said receiving surface portion.

11. A high intensity illuminator in accordance with claim 10, further comprising a light pipe extending from an input end and terminating at an output end having a surface defining said receiving surface, said light pipe being disposed relative to said mounting fixture so that the illumination cones of said first and second pluralities of illumination sources enter said light pipe at said input end and are directed by said light pipe along said pipe and onto said light pipe output end.

12. A high intensity illuminator comprising:

a mounting fixture;

a receiving surface spaced from said mounting fixture;

a plurality of semiconductor illumination sources, each said illumination source being operable for emitting an outwardly-diverging illumination cone along an axis of illumination of said each source at a predetermined illumination wavelength;

said plural illumination sources being mounted on said mounting fixture such that said illumination cones of said sources are overlappingly coincident on a selected portion of said receiving surface to provide at said receiving surface portion a highly uniform illumination of high intensity at said predetermined wavelength;

means for supplying an electrical signal to said plural illumination sources for operating said sources to emit said illumination cones; and

means for sensing an illumination intensity at said receiving surface portion, said sensing means being connected to said supplying means and said supplying means further comprising means for varying the electrical signal supplied to said plural illumination sources in compensating accordance with illumination intensity variations sensed by said sensing means so as to provide a substantially constant illumination intensity at said receiving surface portion.

13. A high intensity illuminator in accordance with claim 12, further comprising means for directing a portion of the illumination at said receiving surface portion to said sensing means.

14. A high intensity illuminator in accordance with claim 13, wherein said directing means comprises a beamsplitter.

15. A high intensity illuminator comprising:

a mounting fixture;

a receiving surface spaced from said mounting fixture;

a plurality of semiconductor illumination sources, each said illumination source being operable for emitting an outwardly-diverging illumination cone along an axis of illumination of said each source at a predetermined illumination wavelength;

said plural illumination sources being mounted on said mounting fixture such that said illumination cones of said sources are overlappingly coincident on a selected portion of said receiving surface to provide at said receiving surface portion a highly uniform illumination of high intensity at said predetermined wavelength;

means for supplying an electrical signal to said plural illumination sources for operating said sources to emit said illumination cones, said supplying means further comprising means for selectively modulating said illumination sources between an operating condition in which the sources emit said illumination cones and a nonoperating condition; and

means for sensing an illumination intensity at said receiving surface portion, said sensing means being connected to said supplying means and said supplying means further comprising means for varying the electrical signal supplied to said plural illumination sources in compensating accordance with illumination intensity variations sensed by said sensing means so as to provide a substantially constant illumination intensity at said receiving surface portion.

16. A high intensity illuminator in accordance with claim 15, further comprising a light pipe extending from an input end terminating at an output end having a surface defining said receiving surface, said light pipe being disposed relative to said mounting fixture so that the illumination cones of said plural illumination sources enter said light pipe at said input end are directed by said light pipe along said pipe and onto said light pipe output end.

17. A high intensity illuminator comprising;

a mounting fixture;

a diffuse surface spaced from said mounting fixture;

a plurality of semiconductor illumination sources, each said illumination source comprising a light emitting diode operable for emitting an outwardly-diverging illumination cone along an axis of illumination of said each source at a predetermined illumination wavelength;

said plural illumination sources being mounted on said mounting fixture such that said illumination cones of said sources are overlappingly coincident on a selected portion of said diffuse surface to provide at said diffuse surface portion a highly uniform illumination of high intensity at said predetermined wavelength;

means for supplying an electrical signal to said plural illumination sources for operating said sources to emit said illumination cones; and

means for sensing an illumination intensity as said diffuse surface portion, said sensing means being connected to said supplying means and said supplying means further comprising means for varying the electrical signal supplied to said plural illumination sources in compensation accordance with illumination intensity variations sensed by said sensing means so as to provide a substantially constant illumination intensity at said receiving surface portion.

18. A high intensity illuminator comprising;

a mounting fixture;

a diffuse surface spaced from said mounting fixture;

a plurality of semiconductor illumination sources, each said illumination source comprising a light emitting diode operable for emitting an outwardly-diverging illumination cone along an axis of illumination of said each source at a predetermined illumination wavelength;

said plural illumination sources being mounted on said mounting fixture such that said illumination cones of said sources are overlapping coincident on a selected portion of said diffuse surface to provide at said diffuse surface portion a highly uniform illumination of high intensity at said predetermined wavelength;

means for supplying an electrical signal to said plural illumination sources for operating said sources to emit said illumination cones, said supplying means further comprising means for selectively modulating said illumination sources between an operating condition in which the sources emit said illumination cones and a nonoperating condition; and

means for sensing an illumination intensity at said diffuse surface portion, said sensing means being connected to said supplying means and said supplying means further comprising means for varying the electrical signal supplied to said plural illumination sources in compensating accordance with the illumination intensity variations sensed by said sensing means so as to provide a substantially constant illumination intensity at said diffuse surface portion.

19. A high intensity illuminator in accordance with claim 18, further comprising a light pipe extending from an input end and terminating at an output end having a surface defining said diffuse surface, said light pipe being disposed relative to said mounting fixture so that the illumination cones of said plural illumination sources enter said light pipe at said input end and are directed by said light pipe along said pipe and onto said light pipe output end.