Method of making an acceleration sensor
First Claim
1. Method of making an acceleration sensor, comprisingconnecting together at least an upper plate (3) and a lower plate (2), andforming a cavity (4) between said plates,in such a way thatat least one of said plates (2, 3) defines a membrane (5) which deforms in response to an internal pressure in said cavity, thereby facilitating immediate detection of any faulty connection between said plates.
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Accused Products
Abstract
A method of making acceleration sensors with integrated measurement of internal pressure includes connecting multiple plates to each other, thereby defining internal cavities. The tightness of these connections or bonds is checked and controlled during the manufacturing process. The plates define membrane portions adjacent each cavity, the membranes deforming in accordance with the internal pressure in the adjacent cavity. Preferably, the internal pressure of the sensor is measurable by detecting deformation of a sensor wall which defines a membrane.
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Citations
8 Claims
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1. Method of making an acceleration sensor, comprising
connecting together at least an upper plate (3) and a lower plate (2), and forming a cavity (4) between said plates, in such a way that at least one of said plates (2, 3) defines a membrane (5) which deforms in response to an internal pressure in said cavity, thereby facilitating immediate detection of any faulty connection between said plates.
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2. Method of making an acceleration sensor, comprising
connecting together at least an upper plate (24), a lower plate (21), and at least one intermediate plate (22, 23), and forming a cavity (26, 27) between said plates, in such a way that at least one of said plates (22,23) defines a membrane (5) which deforms in response to an internal pressure in said cavity, and forming respective openings (7) adjacent each membrane (5), so that all of said membranes (5) are accessible from outside.
Specification