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Method of making an acceleration sensor

  • US 5,310,450 A
  • Filed: 06/17/1992
  • Issued: 05/10/1994
  • Est. Priority Date: 07/06/1991
  • Status: Expired due to Fees
First Claim
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1. Method of making an acceleration sensor, comprisingconnecting together at least an upper plate (3) and a lower plate (2), andforming a cavity (4) between said plates,in such a way thatat least one of said plates (2, 3) defines a membrane (5) which deforms in response to an internal pressure in said cavity, thereby facilitating immediate detection of any faulty connection between said plates.

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