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Method of edge detection in optical images using neural network classifier

  • US 5,311,600 A
  • Filed: 09/29/1992
  • Issued: 05/10/1994
  • Est. Priority Date: 09/29/1992
  • Status: Expired due to Fees
First Claim
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1. A method of measurement of linewidths in integrated circuit fabrication comprising the steps ofa) obtaining a digitized pixel image of a surface of said integrated circuit including conductive lines,b) training a neural network classifier using a series of random sequences of adjacent pixels until classifier weights are converged to a required tolerance for said measurement,c) applying said weights to all pixels to obtain a binary image,d) subtracting a one-pixel shifted version of said binary image from said binary image to obtain an edge map, ande) determining minimum distance between edges in said edge map as a measure of linewidths of said conductive lines.

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