Coupling device
First Claim
1. In a coupling device comprising means for fixing a solution supplying male pipe, which is to be inserted into a cleaning chamber, adjacent and in opposite to a solution supplied female pipe which is arranged in the cleaning chamber, and means for moving the solution supplied female pipe in such a direction that it can be connected to the solution supplying male pipe, said coupling device further comprising a check valve arranged in that end portion of a solution passage in the male pipe which is located on the side of the female pipe;
- a valve pusher formed in that end portion of a solution passage in the female pipe which is located on the side of the male pipe to push the female pipe against the male one so as to cause the check valve to open the solution passage in the male pipe;
a valve system arranged in the rear end portion of the solution passage in the female pipe;
a cleaning liquid passage communicated with the solution passage in the female pipe to supply cleaning liquid through it; and
a check valve arranged in the outlet of the cleaning liquid passage.
1 Assignment
0 Petitions
Accused Products
Abstract
A coupling device intended to prevent impurities such as dust and particles adhering to the end face of a solution supplying male pipe 2 from being mixed with a high purity chemical solution N, which will be supplied through the device, not to degrade the purity of the solution. It includes a check valve 7 arranged in that end portion of a solution passage 5 in the male pipe 2 which is inserted into a cleaning chamber 15, a valve pusher 44a arranged in that end portion of a solution passage 43 in a solution supplied female pipe 3 which is connected to the passage 5 in the male pipe 2 to push the check valve 7 to open the passage 5, a valve system for opening and closing the passage 43 when the female pipe 3 is reciprocated in the axial direction, and a check valve 51 located on the outlet side of a cleaning liquid passage 48.
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Citations
9 Claims
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1. In a coupling device comprising means for fixing a solution supplying male pipe, which is to be inserted into a cleaning chamber, adjacent and in opposite to a solution supplied female pipe which is arranged in the cleaning chamber, and means for moving the solution supplied female pipe in such a direction that it can be connected to the solution supplying male pipe, said coupling device further comprising a check valve arranged in that end portion of a solution passage in the male pipe which is located on the side of the female pipe;
- a valve pusher formed in that end portion of a solution passage in the female pipe which is located on the side of the male pipe to push the female pipe against the male one so as to cause the check valve to open the solution passage in the male pipe;
a valve system arranged in the rear end portion of the solution passage in the female pipe;
a cleaning liquid passage communicated with the solution passage in the female pipe to supply cleaning liquid through it; and
a check valve arranged in the outlet of the cleaning liquid passage. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
- a valve pusher formed in that end portion of a solution passage in the female pipe which is located on the side of the male pipe to push the female pipe against the male one so as to cause the check valve to open the solution passage in the male pipe;
Specification