Packaging arrangement for power semiconductor devices

• US 5,313,098 A
• Filed: 04/08/1993
• Issued: 05/17/1994
• Est. Priority Date: 04/08/1993
• Status: Expired due to Term

• Current Assignee: Alliedsignal Inc.
• Original Assignee: Alliedsignal Inc.
• Inventors: Shekhawat, Sampat S., Borden, Raymond W., Tumpey, John J., Eckenfelder, Robert C.
• Primary Examiner(s): Hille, Rolf
• Assistant Examiner(s): POTTER, ROY KARL
• Application Number:
  US08/043,688
• Time in Patent Office: 404 Days
• Field of Search: 257/714, 257/708, 257/712, 174/16.3, 361/699, 361/703, 361/713
• US Class Current: 257/712
• CPC Class Codes: H01L 23/473 by flowing liquids H01L23/4332, H01L23/4338 take precedence
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/0002 Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Abstract

A two-sided hermetically sealed package of a metal matrix composite material includes a heat sink and integral cooling fins on each of the two sides which are totally enclosed to retain cooling fluid. Power semiconductors are mounted on ceramic substrates having metallic conductors mounted on both sides thereof. The substrates are mounted to the heat sinks. Cooling is provided by the passage of cooling fluid into one end of the enclosed fins, over the fins and out the other end. The metal matrix composite material and the ceramic are thermally matched and the package is provided with a minimum number of thermal interfaces.

Claims

1. A packaging arrangement for power semiconductor devices, comprising:

a unitary case having two sides, each of said sides having two opposite surfaces;

one of the two opposite surfaces of each of the two sides having a wall secured thereto and extending continuously and peripherally therearound, said wall defining a heat sink on said one surface;

the other of the opposite surfaces of each of the two sides including longitudinally extending integral cooling fins;

at least two slots extending transversely across the longitudinally extending integral cooling fins on the other of the opposite surfaces of each of the two sides for providing cooling fluid turbulence;

the two sides arranged so that the integral cooling fins on the other of the opposite surfaces of each of the two sides cooperate to provide an integral fin arrangement;

each of the heat sinks on the one of the two opposite surfaces of each of the two sides having mounted thereto a plurality of substrates with a conductor mounted to each of the substrates;

power semiconductor devices disposed on the conductors so as to be conductively interconnected through said conductors;

each of the two sides of the case closed by a lid for hermetically sealing the case; and

a side of one of the walls on the one of the two opposite surfaces of one of the two sides having feedthrough holes for accepting feedthroughs connected to said power semiconductor devices.

2. An arrangement as described by claim 1, wherein:

the case has a cooling fluid input port at one end of the integral fin arrangement and an output port at the other end of said integral fin arrangement, whereby a cooling fluid enters said one end through said input port, flows over said integral fin arrangement, and exits said other end through said output port.

3. An arrangement as described by claim 1, wherein:

the two sides of the case and the lids closing said two sides are of a metal matrix composite material;

the plurality of substrates are of a ceramic material; and

the thermal coefficient of expansion of the metal matrix composite material matches that of the ceramic material.

4. An arrangement as described by claim 1, wherein:

the wall secured to one of the two opposite surfaces of each of the two sides is of a metallic alloy material.

5. An arrangement as described by claim 1, wherein:

the conductors are mounted to both sides of the substrates.

6. A method for packaging power semiconductor devices, comprising:

forming two sides of a unitary case so that each of said sides has two opposite surfaces;

forming one of said opposite surfaces of each of the two case sides with longitudinally extending integral cooling fins;

forming the longitudinally extending cooling fins with at least two transversely extending slots for providing cooling fluid turbulence;

securing a wall to the other of the two opposite surfaces of each of the two sides, said walls extending continuously and peripherally around said opposite surfaces so as to define a heat sink on each of said two sides;

mounting a plurality of substrates having conductors mounted thereto on the heat sink on each of the two sides;

disposing power semiconductor devices on the conductors for conductively interconnecting said semiconductor devices;

providing feedthrough holes in a side of one of the walls on the one of the two opposite surfaces of one of the two sides;

inserting feedthroughs in said holes and connecting the feedthroughs to the power semiconductor devices;

joining the two sides of the case at the one of their opposite surfaces for providing a cooling fin arrangement within the unitary case; and

securing a lid to the wall on each of the other of the opposite surfaces of the two case sides for hermetically sealing the case.

7. A method as described by claim 6, including:

providing a cooling fluid intake port in said unitary case on one side of the cooling fin arrangement and providing a cooling fluid output port on the other side thereof for permitting a cooling fluid to flow through the inlet port, over the fin arrangement, and out the outlet port.

8. A method as described by claim 6, wherein:

forming the two sides of the case so that each of said two sides has two opposite surfaces and so that one of said opposite surfaces of each of the two case sides has integral fins includes forming said two case sides of a metal matrix composite material; and

joining the two sides of the case at the one of their opposite surfaces for providing an integral cooling fin arrangement within a unitary case includes metallurgically joining said two case sides.

9. A method as described by claim 8, wherein securing a wall to the other of the two opposite surfaces of each of the two sides, includes:

providing the walls of a metallic alloy material; and

soldering said metallic alloy material walls to the metal matrix composite material.

10. A method as described by claim 6, including:

providing the plurality of substrates of a ceramic material.

11. A method as described by claim 10, including:

providing the conductors of a metallic material; and

bonding the metallic material conductors to the substrates.

12. A method as described by claim 10, including:

matching the thermal coefficient of expansion of the metal matrix composite material with that of the ceramic material.

13. A method as described in claim 11, including:

bonding the conductors to both sides of the substrates.