Discharge excitation gas laser apparatus
First Claim
1. A discharge excitation laser apparatus comprising:
- a pair of first and second primary electrodes disposed in a spaced opposed relation with respect to each other and having a main discharge space defined therebetween;
excitation means connected to said first and second primary electrodes for causing a main discharge therebetween to thereby generate laser oscillations of a laser gas in the main discharge space between said first and second primary electrodes; and
preionization means disposed behind said second primary electrode in relation to the main discharge space, said preionization means being provided for preionizing the laser gas in the main discharge space prior to the main discharge between said first and second primary electrodes, and said preionization means comprising at least two different types of preionization systems, said preionization systems generating a substantially uniform region and a high density region of preionized electrons in the main discharge space.
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Abstract
At least two types of preionization systems are provided at a backside of one of a pair of primary electrodes which are disposed in a spaced opposed relation with respect to each other for causing a large area, spatially uniform main discharge in a laser gas therebetween. This improves efficiency and stability in laser oscillations under repeated operations at a high rate of tens to hundreds of shots per second. In addition, without using the laser output power, the preionization timing is controlled such that an optimal preionization timing is realized. The optimal preionization timing is determined on the basis of a minimum discharge starting voltage between the primary electrodes or a minimum required time from the time of applying a high voltage between said first and second primary electrodes until the time the main discharge commences.
21 Citations
16 Claims
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1. A discharge excitation laser apparatus comprising:
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a pair of first and second primary electrodes disposed in a spaced opposed relation with respect to each other and having a main discharge space defined therebetween; excitation means connected to said first and second primary electrodes for causing a main discharge therebetween to thereby generate laser oscillations of a laser gas in the main discharge space between said first and second primary electrodes; and preionization means disposed behind said second primary electrode in relation to the main discharge space, said preionization means being provided for preionizing the laser gas in the main discharge space prior to the main discharge between said first and second primary electrodes, and said preionization means comprising at least two different types of preionization systems, said preionization systems generating a substantially uniform region and a high density region of preionized electrons in the main discharge space. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. A discharge excitation laser apparatus comprising:
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a pair of first and second primary electrodes disposed in, a spaced opposed relation with respect to each other and having a main discharge spaced defined therebetween; an excitation circuit connected to said first and second primary electrodes for causing a main discharge therebetween to thereby generate laser oscillations of a laser gas in the main discharge space; preionization means for preionizing the laser gas in the main discharge space prior to the main discharge between said first and second primary electrodes; and preionization timing setting means for setting a time when preionization is triggered including a means for establishing a minimum discharge starting voltage between said first and second primary electrodes, and a means for using the established voltage to determine the preionization trigger time. - View Dependent Claims (14)
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15. A discharge excitation laser apparatus comprising:
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a pair of first and second primary electrodes disposed in a spaced opposed relation with respect to each other and having a main discharge spaced defined therebetween; an excitation circuit connected to said first and second primary electrodes for causing a main discharge therebetween to thereby generate laser oscillations of a laser gas in the main discharge space; preionization means for preionizing the laser gas in the main discharge space prior to the main discharge between said first and second primary electrodes; and preionization timing setting means for setting a time when preionization is triggered including a means for establishing a minimum time between the time a high voltage is applied between said first and second primary electrodes and the time the main discharge starts, and a means for using the established time to determine the preionization trigger time. - View Dependent Claims (16)
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Specification