Integrated monolithic gyroscopes/accelerometers with logic circuits
First Claim
1. An inertial guidance system comprising gyroscopic apparatus providing three gyroscopic outputs, each of the three gyroscopic outputs being indicative of rotational movement of the system about a different one of three mutually orthogonal axes, the apparatus being formed on a semiconductor substrate, and control circuitry formed on the same semiconductor substrate and electrically connected to the gyroscopic apparatus for controlling the gyroscopic apparatus and receiving the three gyroscopic outputs.
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Accused Products
Abstract
A multi-axes gyroscope, a single axis gyroscope and a three axis accelerometer are formed on a single semiconductor substrate, along with and MPU. The gyroscopes provide sensing for rotation about three mutually orthogonal axes and the accelerometer provides sensing of acceleration along the three axes. The MPU controls and drives the gyroscopes and accelerometer and provides a continuous indication of position.
217 Citations
11 Claims
- 1. An inertial guidance system comprising gyroscopic apparatus providing three gyroscopic outputs, each of the three gyroscopic outputs being indicative of rotational movement of the system about a different one of three mutually orthogonal axes, the apparatus being formed on a semiconductor substrate, and control circuitry formed on the same semiconductor substrate and electrically connected to the gyroscopic apparatus for controlling the gyroscopic apparatus and receiving the three gyroscopic outputs.
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6. An inertial guidance system comprising:
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a semiconductor substrate; rotational vibration gyroscope apparatus formed on the substrate and providing gyroscopic outputs about three mutually orthogonal axes, the gyroscopic apparatus including a single, substantially centrally located mounting post fixedly attached to a base and defining a first axis, a mass positioned in and defining a plane perpendicular to the post, helical springs affixed at one end to the post and at another end to the mass, and mounting the mass for oscillatory rotary movement about the post, oscillatory motion driving apparatus mounted adjacent to the mass for causing the mass to move in an oscillatory rotary motion about the first axis, and sensing apparatus, positioned adjacent to the mass and defining second and third axes mutually perpendicular to each other and to the first axis, for sensing movement of the mass about the third axis in response to movement of the gyroscope about the second axis and for sensing movement of the mass about the second axis in response to movement of the gyroscope about the third axis; and control circuitry formed on the same semiconductor substrate and electrically connected to the gyroscopic apparatus for controlling the gyroscopic apparatus and receiving the gyroscopic outputs. - View Dependent Claims (7, 8)
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9. An inertial guidance system comprising:
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a semiconductor substrate; a three axis accelerometer formed on the substrate and including a plurality of layers of conductive material each generally defining a plane and each mounted so the defined planes are parallel with and in spaced relation to each other, a first of the layers being fixedly mounted and with a second layer being mounted for limited movement relative to the first layer, the first and second layers forming a first capacitance varying in accordance with acceleration of the accelerometer along a first axis defined by the first and second layers, first and second structures formed as a portion of the first and the second layers, respectively, and positioned in parallel juxtaposition, the second structures being moveable with the second layer and relative to the first layer, the first and second structures being further formed to define second and third axes mutually orthogonal with each other and the first axis, and variable capacitances being formed between the first and second structures, which capacitances vary in accordance with acceleration in the second and third axes, respectively; and control electronics formed on the substrate and connected to the three axis accelerometer for control and operation thereof.
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- 10. An inertial guidance system comprising gyroscopic apparatus providing gyroscopic outputs about three mutually orthogonal axes and acceleration sensing apparatus providing acceleration outputs along three mutually orthogonal axes, the gyroscopic and acceleration sensing apparatus being formed on a single semiconductor substrate, and control circuitry formed on the same semiconductor substrate and electrically connected to the gyroscopic and acceleration sensing apparatus for controlling the gyroscopic and acceleration sensing apparatus and receiving the gyroscopic and acceleration outputs.
Specification