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Vacuum processing apparatus and operating method therefor

  • US 5,314,509 A
  • Filed: 08/29/1991
  • Issued: 05/24/1994
  • Est. Priority Date: 08/29/1990
  • Status: Expired due to Term
First Claim
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1. A method of operating a vacuum processing apparatus having vacuum processing chambers for which dry cleaning is effected therein after substrates to be processed are processed therein in vacuum, said method comprising the step of:

  • disposing first storage means for storing said substrates to be processed and second storage means for storing dummy substrates in the air atmosphere;

    transferring said substrates to be processed between said first storage means and said vacuum processing chambers, and vacuum-processing said substrates to be processed; and

    transferring said dummy substrates between said second storage means and said vacuum processing chamber before and after dry cleaning of said vacuum processing chambers.

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