A precision capacitor sensor

• US 5,317,919 A
• Filed: 06/16/1992
• Issued: 06/07/1994
• Est. Priority Date: 06/16/1992
• Status: Expired due to Fees

• Current Assignee: Teledyne Geotech (Teledyne Technologies Incorporated)
• Original Assignee: Teledyne Industries Incorporated (Teledyne Technologies Incorporated)
• Inventors: Awtrey, James D.
• Primary Examiner(s): WOODIEL, DONALD
• Application Number:
  US07/899,618
• Time in Patent Office: 721 Days
• Field of Search: 73/718, 73/724, 73/517 R, 361/283, 29/25.41
• US Class Current: 73/718
• CPC Class Codes: G01D 5/2417 by varying separation
• CPC Class Codes: G01L 1/142 using capacitors
• CPC Class Codes: G01L 9/0075 using a ceramic diaphragm, e.g. alumina, fused quartz, glass
• CPC Class Codes: Y10T 29/43 Electric condenser making

Abstract

A precision, low cost, capacitor sensor comprised of two parallel plates, with an air dielectric, with preferably both substrates comprised of vitreous materials and electrically conductive coating, but with at least one of the substrates and coating being transparent. The coatings are preferably of identical material, thickness and pattern to offset stress distortion of the sensor plates from thermal expansion and contraction. Uniform spacing between the plates is provided by means of glass fibers of uniform diameter, dispersed in a matrix of adhesive and bonded under pressure, deposited between the plates as two thin semicircular seal rings surrounding the dielectric and separated by a diametrical gap, allowing entrance or escape of air dielectric. A novel feature, provided by at least one plate and coating being transparent, is use of optical measuring techniques during fabrication to verify acceptability of the manufacturing process and uniformity of the sensor product. This permits easy, rapid, efficient and economical grading and process control of the sensors during fabrication with resulting improved precision performance of the product and economical cost to manufacture. As an option, three or more of the four faces of the two substrates will bear conductive coatings, for structural stability, to minimize distortion in capacitance due to changes in temperature.

Claims

1. A capacitor sensor, comprising;

two substantially parallel capacitive plates comprising a first plate and second plate;

a dielectric between said plates, comprised of nonconductive materials such as air and other gases;

electrical conductive coating, forming an electrode, on at least the inwardly facing surface of each of said plates;

means for spacing said plates a precise distance apart;

said first plate comprising a mechanically flexible diaphragm being relatively capable of responding to flexure forces as compared to said second plate, wherein an input force will cause said first plate to flex, causing the effective plate spacing to be reduced or increased, resulting in a proportional increase or decrease in sensor capacitance, and sensor function occurs when said input force changes said sensor capacitance by varying said plate spacing;

each of said plates being comprised of vitreous materials for a substrate;

at least one of said plates being comprised of transparent vitreous materials; and

said conductive coating on said transparent plate being transparent.

2. A capacitor sensor according to claim 1 further comprising optical means for visual inspection of physical characteristics of said sensor such as parallelism between said plates.

3. A capacitor sensor according to claim 2 wherein said optical means is comprised of said transparency of at least one of said plates and its said transparent electrode, and means for visual observation of light interference patterns known in the art as Newton'"'"'s rings, using light of known wavelength such as monochromatic light.

4. A capacitor sensor according to claim 2 further comprising an inertial mass attached to said first plate, optical means for precisely locating and mounting said inertial mass on said first plate, and ultraviolet cure bonding means for bonding said mass to said first plate, for use of said sensor as a kinetic force measurement transducer.

5. A capacitor sensor according to claim 1 wherein at least one of said plates is coated on both sides with identical said electrical conductive coating materials, thickness and pattern.

6. A capacitor sensor according to claim 1 wherein said first plate is relatively thin as compared to said second plate.

7. A capacitor sensor according to claim 1 wherein said spacing means is comprised of fiber spacers of uniform diameter, of materials of low coefficient of thermal expansion, such as glass and other vitreous materials.

8. A capacitor sensor according to claim 1 wherein said plate not having said transparent conductive coating is coated with metallic coating of substantially lower electrical resistance than said transparent conductive coating.

9. A capacitor sensor according to claim 1, wherein said dielectric between said plates is comprised of a pressure sealed vacuum.

10. A capacitor sensor according to claim 1 wherein said spacing means further comprises means for sealing said dielectric on all surfaces except through an air port of predetermined size to achieve controlled air damping of said dielectric.

11. A capacitor sensor, comprising;

two substantially parallel capacitive plates comprising a first plate and a second plate;

a dielectric between said plates, comprised of nonconductive materials such as air and other gases;

electrical conductive coating, forming an electrode, on at least the inwardly facing surface of each of said plates;

means for binding said plates together;

said first plate comprising a mechanically flexible diaphragm being relatively capable of responding to flexure forces as compared to said second plate, wherein an input force will cause said first plate to flex, causing the effective plate spacing to be reduced or increased, resulting in a proportional increase or decrease in sensor capacitance, and sensor function occurs when said input force changes said sensor capacitance by varying said plate spacing;

each of said plates being comprised of vitreous materials for a substrate;

at least one of said plates being comprised of transparent vitreous materials; and

said conductive coating on said transparent plate being transparent.

12. A capacitor sensor according to claim 11 further comprising optical means for visual inspection of physical characteristics of said sensor such as parallelism between said plates.

13. A capacitor sensor according to claim 12 wherein said optical means is comprised of said transparency of at least one of said plates and its said transparent electrode, and means for visual observation of light interference patterns known in the art as Newton'"'"'s rings, using light of known wavelength such as monochromatic light.

14. A capacitor sensor according to claim 12 further comprising an inertial mass attached to said first plate, optical means for precisely locating and mounting said inertial mass on said first plate, and ultraviolet cure bonding means for bonding said mass to said first plate, for use of said sensor as a kinetic force measurement transducer.

15. A capacitor sensor according to claim 11 wherein said plate not having said transparent conductive coating is coated with coating of substantially lower electrical resistance than said transparent conductive coating.

16. A capacitor sensor, comprising;

two substantially parallel capacitive plates comprising a first plate and a second plate;

a dielectric between said plates, comprised of nonconductive materials such as air and other gases;

electrical conductive coating, forming an electrode, on at least the inwardly facing surface of each of said plates;

means for bonding said plates together a precisely spaced distance apart;

said first plate comprising a mechanically flexible diaphragm being relatively capable of responding to flexure forces as compared to said second plate, wherein an input force will cause said first plate to flex, causing the effective plate spacing to be reduced or increased, resulting in a proportional increase or decrease in sensor capacitance, and sensor function occurs when said input force changes said sensor capacitance by varying said plate spacing;

each of said plates being comprised of vitreous materials for a substrate.

17. A capacitor sensor according to claim 16 wherein at least one of said plates is coated on both sides with identical said electrical conductive coating materials, thickness and pattern.

18. A capacitor sensor according to claim 16 wherein said first plate is relatively thin as compared to said second plate.

19. A capacitor sensor according to claim 16 wherein said means for bonding said plates together a precisely spaced and parallel distance apart is comprised of fiber spacers of uniform thickness, of materials of low coefficient of thermal expansion, such as glass and other vitreous materials.

20. A capacitor sensor according to claim 16, wherein said dielectric between said plates is comprised of a pressure sealed vacuum.

21. A capacitor sensor according to claim 16 wherein said bonding means further comprises means for sealing said dielectric on all surfaces except through an air port of predetermined size to achieve controlled air damping of said dielectric.