Tuning system for external cavity diode laser

• US 5,319,668 A
• Filed: 09/30/1992
• Issued: 06/07/1994
• Est. Priority Date: 09/30/1992
• Status: Expired due to Term

• Current Assignee: Newport Corporation (MKS Instruments Incorporated)
• Original Assignee: New Focus Inc. (MKS Instruments Incorporated)
• Inventors: Luecke, Francis S.
• Primary Examiner(s): Bovernick, Rodney B.
• Assistant Examiner(s): McNutt, Robert
• Application Number:
  US07/954,398
• Time in Patent Office: 615 Days
• Field of Search: 372/15, 372/20, 372/23, 372/102, 372/107
• US Class Current: 372/107
• CPC Class Codes: H01S 3/105 by controlling the mutual position or the reflecting properties of the reflectors of the cavity , e.g. by controlling the cavity lengthH01S3/10076, H01S3/13 take precedence
• CPC Class Codes: H01S 5/02208 characterised by the shape of the housings
• CPC Class Codes: H01S 5/02325 Mechanically integrated components on mount members or optical micro-benches
• CPC Class Codes: H01S 5/143 Littman-Metcalf configuration, e.g. laser - grating - mirror

Abstract

A tunable external cavity semiconductor laser is provided with a semiconductor laser diode, a diffraction grating and a movable mirror. The diode laser is positioned to illuminate a diffraction grating and a movable mirror is positioned to reflect a selected wavelength back into the cavity. The mirror is mounted on a pivot so positioned to provide simultaneous rotation and linear translation. The pivot point is selected so as to provide an internal cavity length which is exactly an integral number of half wavelengths at three different wavelengths and an exceptionally close (within 1/1000 of one wavelength) match at all other wavelengths within the tuning range. Significantly, the pivot point calculation takes into account the effect of the dispersion of the laser and other optical elements in the system on the cavity length. These elements are usually a small part of the physical length of the cavity, but their greater dispersion makes their contribution to the number of half wavelengths in the resonant cavity very significant.

Claims

1. In a tunable diode laser having an external cavity including a collimating lens, a rotatable mirror for reflecting a selected wavelength from a diffraction grating back into the laser, means for simultaneous rotation and linear translation of said mirror comprising:

a. a pivot axis, for rotation of said mirror, positioned at the intersection of the bisectors of the angles created by the normals to the mirror planes at the points of intersection between said minor for first, second and third positions of said mirror;

b. the first said position representing the angular position which reflects a first desired wavelength, diffracted by said diffraction grating, in the tuning rang of said system, and a first lineal position corresponding to an optical distance for said lasers and cavity representing a first integral number of half wavelengths at said first desired wavelength;

c. the second said position representing the angular position which reflects a second desired wavelength, the nominal center wavelength of said system, diffracted by said diffraction grating and a second lineal position corresponding to the optical distance for said laser and said cavity representing said first integral number of half wavelengths at said nominal center wavelength of said system;

d. the third said position representing the angular position which reflects a third desired wavelength, on the opposite side of said nominal center wavelength form said first desired wavelength and within the tuning range of said system, diffracted by said diffraction grating and a third lineal position corresponding to the optical distance for said laser and cavity representing said first integral number of half wavelengths at said third wavelength; and

,

e. said first, second and third lineal positions including distance corrections to the actual physical length corresponding to the length and indices of refraction of the window of said diode laser and a distance correction corresponding to the thickness and indices of refraction of the lens.

2. A system according to claim 1 wherein said distance corrections for said first, second and third lineal positions further include distance corrections for additional optical elements in said tuning cavity corresponding to the lengths and indices of refraction of said additional elements including the air in said optical cavity.

3. A system according to claim 1 wherein said distance corrections to said first, second and third lineal positions is calculated according to the formula:

space="preserve" listing-type="equation">opl.sub.i =[td(nd.sub.i -1)]+[tw(nw.sub.i -1)]+[tl(nl.sub.i -1)]

where;

opl_i =the correction to the physical length

td=the length of the semiconductor diode

nd_i =the index of refraction of the semiconductor diode material

tw=the thickness of the window of the semiconductor diode

nw₁ =the index of refraction of the window material

tl=the thickness of the lens

nl_i =the index of refraction of the lens material.

4. A system according to claim 1 further including:

a. a base element supporting said diffraction grating; and

,

b. first and second spaced spherical elements having their centers positioned at spaced points on said pivot axis and lying between said rotatable mirror and said base element to provide a bearing therebetween permitting rotational movement of said mirror and said diffraction grating about said pivot axis.

5. A system according to claim 4 further including:

a. a first pair of bearing retention sockets in said base member;

b. mirror mounting means for support of said rotatable mirror;

c. a second pair of bearing retention sockets in said mirror mounting means; and

,

d. first and second pairs of sockets coacting to retain said first and second spherical elements in a position where their centers lie on said pivot axis.

6. The system according to claim 5 further including first and second spring means having their ends affixed to said base member and said mirror mount to bias said base member and said mirror mount toward each other and hold said spherical elements within said retention sockets.

7. A system according to claim 6 wherein said spring means are coil springs.

8. A system according to claim 7 wherein the coil springs are oriented to permit rotational movement of said mirror.

9. A system according to claim 8 wherein said spherical elements are spaced apart on said pivot axis to inhibit axial misalignment of said mirror.

10. In an external cavity tunable laser system having a laser, having a laser, a diffraction grating and a rotatable mirror positionable to reflect a beam diffracted by said diffraction grating at a selected angle, corresponding to the diffraction angle of a selected wavelength, back into said laser, the improvement comprising:

a. pivot means for said mirror;

b. the axis of rotation of said pivot means positioned at the line of intersection of the bisectors of the angles created by the normals to the plane of said mirror at three different angular positions of said mirror representing the diffraction angle from said grating of three different wavelengths;

c. said normals passing through their corresponding mirror planes at the points of intersection between said mirror planes at said three different angular positions;

d. said three different angular positions of said mirror corresponding to the angular position which reflects three different wavelengths within the tuning range of said laser and a lineal position representing an integral number of half wavelengths within said cavity at said three different wavelengths; and

,

e. one of said three different wavelengths is the nominal center wavelength of the system.

11. A system according to claim 10 wherein said three different wavelengths are spaced approximately equal number of wavelengths from each other.

12. The system according to claim 10 wherein the other two of said three different wavelengths are nominally a wavelength near the shortest wavelength of the system and a wavelength near the longest wavelength of the system.

13. A semiconductor diode laser according to claim 10 wherein the second of said three different wavelengths is wavelength closer to the longest wavelength than said nominal center wavelength, and said third wavelength is a wavelength closer to the shortest wavelength than said nominal center wavelength.

14. An external cavity tunable laser system comprising:

a. a base member;

b. diffraction grating means mounted on said base member;

c. diode laser means mounted on said base member and having an output beam positioned to strike said grating at a grazing angle;

d. mirror means for reflecting a diffracted beam from said grating back onto said grating and thence back into said laser;

e. mirror mounting means providing for simultaneous lineal and rotational movement of said mirror about an axis of rotation corresponding to the line of intersection of the bisectors of the angles created by the normals to the plane of said mirror at three different positions of said mirror, said normals passing through their corresponding mirror planes at the points of intersection between said mirror planes at said three different angular positions, each of said three different angular positions of said mirror providing an integral number of half wavelengths within said cavity at a selected wavelength, calculated according to the general formula;

space="preserve" listing-type="equation">Opl=Ph1+C,

where;

Opl=the optical length of the tuning cavity

Phl=the physical length of the tuning cavity

C=a correction for the wavelength-dependent indices of refraction of the optical elements of the system.

15. A system according to claim 14 wherein said mounting means for said mirror comprises

a. first and second pairs of sockets positioned in abutting relationship on said bas member and said mounting means respectively;

and,

b. first and second bearing members positioned within said sockets to accommodate rotational movement of said mirror mount relative to said base member.

16. A system according to claim 15 further including spring means affixed to said base member and said mirror mount to bias said mirror mount against said bearing members.

17. The system according to claim 15 wherein said bearing members are a hemispherical shape

18. A system according to claim 15 wherein said mirror mounting means further includes:

a. a pair of mirror adjustment arms respectively affixed to said mirror mounting means in close proximity to one of said second pair of sockets and extending outwardly therefrom to a point spaced from said mirror mounting means; and

,

b. each of said adjustment arms having a first adjustment screw passing through a clearance hole in said adjustment arm into a tapped hole in said mirror mounting means a first distance from the point at which said adjustment arm is affixed to said mirror mounting means and a second adjustment screw passing through a tapped hole in said adjustment arm to bear against said mirror mounting means at a point spaced a second, greater, distance from the point at which said adjustment arm is affixed to said mirror mounting means, whereby said first screw is operative to deflect said mirror toward said axis of rotation and said second adjustment screw is operative to deflect said mirror away from said axis of rotation.