Process for sorption of hazardous waste products from exhaust gas streams

• US 5,320,817 A
• Filed: 08/28/1992
• Issued: 06/14/1994
• Est. Priority Date: 08/28/1992
• Status: Expired due to Term

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Novapure Corporation
• Inventors: Hardwick, Steven, McManus, James V.
• Primary Examiner(s): HELLER, GREGORY
• Application Number:
  US07/937,243
• Time in Patent Office: 655 Days
• Field of Search: 423/237, 423/238, 423/245.3, 423/210, 423/245.1, 423/240 R
• US Class Current: 423/237
• CPC Class Codes: B01D 53/46 Removing components of defined structure
• CPC Class Codes: B01D 53/58 Ammonia

Abstract

A method for cleaning an exhaust gas containing ammonia and at least one silicon-containing compound selected from the group consisting of silane and chlorosilanes, which comprises contacting the exhaust gas with a scavenger comprising a metal salt which forms tight complexes with ammonia. This ammine-forming metal salt may be immobilized on a porous solid support. Suitable ammine-forming metal salts include the sulfates, nitrates, chlorides, bromides, iodides, and hydroxides of copper, cobalt, iron, and nickel. Suitable supports include materials which are compatible with the gas mixtures being cleaned and the reaction products of the sorption process and which are stable under the conditions of use. Useful support materials include zeolites, aluminosilicates, alumina, silica, silica gel, kieselguhr, and activated carbon.

Claims

1. A dry scrubbing method for cleaning a gas mixture containing ammonia and least one silicon-containing gaseous component selected from the group consisting of silane and chlorosilanes, wherein the ratio R of the concentration of ammonia to the concentration of said at least one silicon-containing gaseous component in said gas mixture, is governed by the relationship:

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R≦

14,

to yield treated gas having a reduced content of ammonia and said silicon-containing gaseous component, which comprises contacting the exhaust gas for sufficient time and at sufficient conditions with a bed of scavenger comprising an ammine-forming metal salt immobilized on a porous solid support, wherein the metal salt is (i) selected from the group consisting of sulfates, nitrates, chlorides, bromides, and iodides of copper, cobalt, iron, nickel, chromium, rhodium, palladium and platinum, and (ii) present on the support at a concentration of from 0.25 moles of metal per liter of scavenger to 2 moles metal per liter of scavenger.

2. A method as in claim 1, wherein the porous solid support material is selected from the group consisting of aluminosilicates, zeolites, alumina, silica, silica gel, kieselguhr, activated carbon, macroreticulate polystyrene-divinylbenzene copolymer and polystyrene-polyvinylpyridine.

3. A method as in claim 2, wherein the porous solid support has surface area greater than 100 square meters per gram.

4. A method as in claim 2, wherein the porous solid support material is high porosity silica gel.

5. A method as in claim 2, wherein the porous solid support material is a zeolite.

6. A method as in claim 1, wherein the scavenger is deployed in supported form as a composite bed of scavenger material, comprising a first scavenger material in a first contact region of the composite bed, wherein the ammine-forming metal salt of both the first scavenger material and the second scavenger material is the same, but wherein the support of the first scavenger material is different from the support of the second scavenger material.

7. A method according to claim 6, wherein the ammine-forming metal salt is copper sulfate, the first scavenger material support is silica gel, and the second scavenger material support is zeolite.

8. A method according to claim 6, wherein the first scavenger material and the second scavenger material are arranged in discrete, contiguous layers in the composite bed.

9. A method according to claim 6, wherein the first scavenger material and the second scavenger material are interspersed with one another in the composite bed.

10. A method as in claim 1, wherein the ammine-forming metal salt is selected from the group consisting of copper sulfate and iron sulfate.