Cantilever type probe, scanning tunnel microscope and information processing apparatus using the same

• US 5,321,685 A
• Filed: 11/20/1992
• Issued: 06/14/1994
• Est. Priority Date: 10/09/1990
• Status: Expired due to Term

• Current Assignee: Canon Kabushiki Kaisha (Canon Inc.)
• Original Assignee: Canon Kabushiki Kaisha (Canon Inc.)
• Inventors: Miyazaki, Toshihiko, Kasanuki, Yuki, Suzuki, Yoshio, Yagi, Takayuki, Kawase, Toshimitsu, Yamamoto, Keisuke, Nose, Hiroyasu, Shinjo, Katsuhiko, Sakai, Kunihiro, Hatanaka, Katsunori, Hirai, Yutaka
• Primary Examiner(s): Levy, Stuart S.
• Assistant Examiner(s): Letscher, George J.
• Application Number:
  US07/979,453
• Time in Patent Office: 571 Days
• Field of Search: 369/101, 369/126, 365/151, 365/174, 250/306, 250/310, 250/305, 310/328, 310/330, 310/316, 310/318, 310/311, 73/862.64
• US Class Current: 369/126
• CPC Class Codes: B82Y 10/00 Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
• CPC Class Codes: B82Y 35/00 Methods or apparatus for measurement or analysis of nanostructures
• CPC Class Codes: G01Q 10/045 Self-actuating probes, i.e. wherein the actuating means for driving are part of the probe itself, e.g. piezoelectric means on a cantilever probe
• CPC Class Codes: G01Q 60/16 Probes, their manufacture, or their related instrumentation, e.g. holders
• CPC Class Codes: G01Q 80/00 Applications, other than SPM, of scanning-probe techniques manufacture or treatment of nanostructures B82B3/00; recording or reproducing information using near-field interaction G11B9/12, G11B11/24, G11B13/08
• CPC Class Codes: G11B 9/1409 Heads
• CPC Class Codes: G11B 9/1436 with provision for moving the heads or record carriers relatively to each other
• CPC Class Codes: Y10S 977/732 Nanocantilever
• CPC Class Codes: Y10S 977/861 Scanning tunneling probe
• CPC Class Codes: Y10S 977/873 Tip holder
• CPC Class Codes: Y10S 977/881 Microscopy or spectroscopy, e.g. sem, tem
• CPC Class Codes: Y10S 977/947 with scanning probe instrument

Abstract

A cantilever type probe comprising a piezoelectric bimorph cantilever containing a piezoelectric material provided between driving electrodes for driving a cantilever, a probe formed thereon and a drawing electrode for a probe provided along the surface where a probe is formed, wherein there is provided a shielding electrode for electrically isolating the probe and the drawing electrode from the driving electrodes.

Claims

1. A cantilever probe, comprising:

a piezoelectric bimorph cantilever, said cantilever containing a plurality of driving electrodes for receiving driving signals and a piezoelectric material provided between three pairs of said driving electrodes each of which is divided in the longitudinal direction of a corresponding plane; and

a probe and a drawing electrode for the probe formed on a common plane as one of the three pairs of driving electrodes which is located on an uppermost layer,

wherein a first shielding electrode which electrically isolates the probe member and the drawing electrode from the driving electrode is provided in the same plane as another one of the three pairs of driving electrodes which are located on an intermediate portion of the cantilever and below the common plane of the probe and the drawing electrode.

2. A cantilever probe according to claim 1, wherein there is further provided a second shielding electrode to sandwich the probe and the drawing electrode together with the first shielding electrode.

3. An information processing apparatus comprising a cantilever probe, comprising:

a piezoelectric bimorph cantilever, said cantilever containing a plurality of driving electrodes for receiving driving signals and a piezoelectric material provided between three pairs of said driving electrodes each of which is divided in the longitudinal direction of a corresponding plane; and

a probe and a drawing electrode for the probe formed on a common plane as one of the three pairs of driving electrodes which is located on an uppermost layer,

wherein a first shielding electrode which electrically isolates the probe member and the drawing electrode from the driving electrode is provided in the same plane as another one of the three pairs of driving electrodes which are located on an intermediate portion of the cantilever and below the common plane of the probe and the drawing electrode.

4. An information processing apparatus comprising a cantilever probe according to claim 3, wherein there is further provided a second shielding electrode to sandwich the probe and the drawing electrode together with the first shielding electrode.